US4829215A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Discharge reaction apparatus utilizing dynamic magnetic field
Assignee: Tokyo Electron Ltd
•
Filing: 1987-10-20
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Granted: 1989-05-09
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Expires: 2007-10-20
Abstract
Abstract A discharge reaction apparatus utilizing dynamic magnetic field for subjecting the surface of an object to a depositing or an etching process is disclosed. The apparatus comprises a member for generating dynamic magnetic field along the surface of an electrode and a member for limiting or forbidding the circulating motion of electron around the electrode.
Inventors
- 👤 Kyungshik Kim
- 👤 Owen Wilkinson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 17:50
CPC Classifications
H; H05; H05H; H05H1/00; H05H1/24; H05H1/26; H05H1/32; H05H1/34; H05H1/40; H01; H01J; H01J37/00; H01J37/32; H01J37/32431; H01J37/32623; C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/517; H01J37/3266; H05H1/28
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
152 words
A discharge reaction apparatus having vacuum vessel, comprising: at least one electrode incorporated in the vacuum vessel; means for introducing a given amount of processing gas into the vacuum vessel; means for controlling pressure in the vacuum vessel; means for generating discharge plasma from the gas in the vacuum vessel, the generating means including means for supplying electric power to the electrode to produce an electric field perpendicular to the surface of the electrode for processing a to be processed object disposed in the vacuum vessel; means for generating a dynamic magnetic field parallel to the surface of the electrode to provide a high density plasma near the electrode, the plasma containing electrons having a circulating motion; means for limiting the circulating motion of the electrons circulating the electrode; wherein the electric field and the magnetic field are perpendicular to each other, thereby processing the object with uniform and high density plasma.
Claim 2
Dependent Claim
152 words
A discharge reaction apparatus having vacuum vessel, comprising: at least one electrode incorporated in the vacuum vessel; means for introducing a given amount of processing gas into the vacuum vessel; means for controlling pressure in the vacuum vessel; means for generating discharge plasma from the gas in the vacuum vessel, the generating means including means for supplying electric power to the electrode to produce an electric field perpendicular to the surface of the electrode for processing a to be processed object disposed in the vacuum vessel; means for generating a dynamic magnetic field parallel to the surface of the electrode to provide a high density plasma near the electrode, the plasma containing electrons having a circulating motion; means for limiting the circulating motion of the electrons circulating the electrode; wherein the electric field and the magnetic field are perpendicular to each other, thereby processing the object with uniform and high density plasma.
Claim 3
Dependent Claim
30 words
A discharge reaction apparatus as claimed in claim 1, wherein the electrode incorporated in the vacuum vessel has a flat surface portion along which the dynamic magnetic field is present.
Claim 4
Dependent Claim
19 words
A discharge reaction apparatus as claimed in claim 2, wherein the dynamic magnetic field is a rotating magnetic field.
Claim 5
Dependent Claim
18 words
A discharge reaction apparatus as claimed in claim 2, wherein the dynamic magnetic field is an alternating field.
Claim 6
Dependent Claim
59 words
A discharge reaction apparatus as claimed in claim 3, wherein the means for generating the rotating magnetic field comprises three pairs of excitation coils, each pair of excitation coils being disposed diametrically opposite to the vacuum vessel, and each phase current of a three phase alternating current being applied to these excitation coils for generating the rotating magnetic field.
Claim 7
Dependent Claim
59 words
A discharge reaction apparatus as claimed in claim 3, wherein the means for generating the rotating magnetic field comprises three excitation coils, the coils being disposed in the diametrical direction through an axis of the vacuum vessel, and each phase current of a three phase alternating current being applied to these excitation coils for generating the rotating magnetic field.
Claim 8
Dependent Claim
51 words
A discharge reaction apparatus as claimed in claim 4, wherein the means for generating the alternating field comprises two excitation coils, the electrode being disposed between the excitation coils, and an alternating current being applied to these excitation coils for generating the alternating field parallel to the surface of the electrode.
Claim 9
Dependent Claim
19 words
A discharge reaction apparatus as claimed in claim 7, wherein the excitation coils are arranged outside the vacuum vessel.
Claim 10
Dependent Claim
19 words
A discharge reaction apparatus as claimed in claim 7, wherein the excitation coils are arranged inside the vacuum vessel.
Claim 11
Dependent Claim
39 words
A discharge reaction apparatus as claimed in claim 1, wherein the means for limiting the circulating motion of electrons comprises inner side walls of the vacuum vessel and an upper surface of an insulator having the electrode embedded therein.
Claim 12
Dependent Claim
36 words
A discharge reaction apparatus as claimed in claim 1, wherein the means for limiting the circulating motion of electrons comprises the electrode itself, the electrode having at least two side walls which have an upright section.
Claim 13
Dependent Claim
40 words
A discharge reaction apparatus as claimed in claim 1, wherein the means for limiting the circulating motion of electrons comprises the electrode itself, the electrode having at least two side walls which have a section inclined in the inside direction.
Claim 14
Dependent Claim
35 words
A discharge reaction apparatus as claimed in claim 1, wherein the means for limiting the circulating motion of electrons comprises an insulator having the electrode embedded therein, which has at least two upright side walls.
Claim 15
Dependent Claim
34 words
A discharge reaction apparatus as claimed in claim 1, wherein the means for limiting the circulating motion of electrons comprises an insulator provided on the electrode, which has at least two upright side walls.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1992-05-08 | 1992-11-07 | 1993-05-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1996-05-08 | 1996-11-07 | 1997-05-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2000-05-08 | 2000-11-07 | 2001-05-09 | $7700.00 | Window Closed / Lapsed |