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US5143894A Expired / Lapsed US ⏱️ 0.0 years remaining

Formation and high resolution patterning of superconductors

Assignee: Individual
•
Filing: 1989-08-16
•
Granted: 1992-09-01
•
Expires: 2009-08-16
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Abstract

Abstract A method is disclosed for forming a patterned oxide superconducting film wherein a selected region of a ternary metal oxide superconducting film is irradiated in a controlled atmosphere with photons so as to become non-superconductive.

Inventors

  • 👤 Mordechai Rothschild
  • 👤 Daniel J. Ehrlich
  • 👤 Jerry G. Black

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-09 04:01
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/01; H10N60/0268; H10N60/0661; Y; Y10; Y10S; Y10S428/00; Y10S428/922; Y10S428/9265; Y10S428/93; Y10S505/00; Y10S505/70; Y10S505/701; Y10S505/725; Y10S505/73; Y10S505/732; Y10S505/742

Claims Analysis

Total Claims: 14
Claim 1
Independent Claim 57 words
A method of forming a superconductive pattern in a selected ternary metal oxide material, the method comprising: forming a film of superconductive material upon a substrate; and selectively irradiating regions of the film with photons in a predefined pattern to transform regions of the film from a superconducting state to a non-superconducting state by photothermally-induced material changes.
Claim 2
Independent Claim 57 words
A method of forming a superconductive pattern in a selected ternary metal oxide material, the method comprising: forming a film of superconductive material upon a substrate; and selectively irradiating regions of the film with photons in a predefined pattern to transform regions of the film from a superconducting state to a non-superconducting state by photothermally-induced material changes.
Claim 3
Dependent Claim 55 words
The method of claim 1 wherein the ternary metal oxide is a compound characterized by the formula MBa.sub.2 Cu.sub.3 O.sub.x where x falls in the range from approximately 6 to 9, and M is an element selected from the group consisting of Yttrium, Scandium, Lanthanum, Neodymium, Samarium, Europium, Gadolinium, Dysprosium, Holmium, Erbium, Ytterbium, and Lutetium.
Claim 4
Dependent Claim 26 words
The method of claim 1 wherein the step of irradiating regions of the film includes irradiating said regions with a laser in a direct write mode.
Claim 5
Dependent Claim 26 words
The method of claim 1 wherein the step of irradiating regions of the film includes irradiating said regions with a laser in a mask projection mode.
Claim 6
Dependent Claim 26 words
The method of claim 1 wherein the step of irradiating regions of the film includes irradiating said regions with a laser in a contact printing mode.
Claim 7
Dependent Claim 26 words
The method of claim 1 wherein the step of irradiating regions of the film includes irradiating said regions with a lamp in a contact printing mode.
Claim 8
Dependent Claim 44 words
The method of claim 1 wherein the irradiating step includes selectively exposing regions of the film to a light beam from a laser, and the exposing step includes forming a mask on said film for selectively defining said regions prior to said irradiating step.
Claim 9
Dependent Claim 56 words
The method of claim 1 wherein the irradiating step includes selectively exposing regions of the film to a light beam from a laser, and wherein the exposing step includes interposing a mask between the laser and the film, focusing the light beam on the film, and directing the light beam through the mask to the film.
Claim 10
Dependent Claim 17 words
The method of claim 1 further comprises maintaining the deposited film in an oxygen-right atmosphere during irradiation.
Claim 11
Dependent Claim 17 words
The method of claim 1 further comprises maintaining the deposited film in an oxygen-deficient atmosphere during irradiation.
Claim 12
Dependent Claim 15 words
A superconducting device having a pattern formed in accordance with the method of claim 1.
Claim 13
Independent Claim 77 words
A method of producing a superconductive circuit comprising a superconduction phase showing superconductivity at a prescribed working temperature and a non-superconducting phase showing no superconductivity at a prescribed working temperature, said method comprising: a step of forming a film having said superconducting phase open a substrate; and a step of applying a laser beam to a part of superconducting phase on said film to cause transition of said part of said superconducting phase into said non-superconducting phase.
Claim 14
Independent Claim 77 words
A method of producing a superconductive circuit comprising a superconduction phase showing superconductivity at a prescribed working temperature and a non-superconducting phase showing no superconductivity at a prescribed working temperature, said method comprising: a step of forming a film having said superconducting phase open a substrate; and a step of applying a laser beam to a part of superconducting phase on said film to cause transition of said part of said superconducting phase into said non-superconducting phase.

References Cited (Backward Citations)

US4316785A Cited
US4332833A Cited
JPS5720486A Cited
US4499441A Cited
EP0282360A2 Cited
EP0286106A2 Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1995-09-01 1996-03-02 1996-09-01 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1999-09-01 2000-03-02 2000-09-01 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2003-09-01 2004-03-02 2004-09-01 $7700.00 Window Closed / Lapsed

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