Light-sensitive composition containing onium salt and polysiloxane reaction product

Claim 2

A light-sensitive composition comprising: (a) a polysiloxane compound having at least 1 mol% of a structural unit derived from a product of a thermal cycloaddition reaction between a compound of formula (I), (II), (III) or (IV) and a compound of formula (V), (VI), (VII) or (VIII), and (b) an onium salt compound of formula (IX) or (X); ##STR15## wherein R 1 to R 5 may be same or different and represent hydrogen, alkyl, substituted alkyl, aryl, substituted aryl, substituted silyl, siloxy or substituted siloxy groups, R 4 represents hydrogen, an alkyl, substituted alkyl, aryl, substituted aryl, ##STR16## R 7 to R 9 represent hydrogen, an alkyl, substituted alkyl, aryl, substituted aryl, alkoxy, substituted alkoxy, cyano, nitro, --P 1 --Q or ##STR17## which may contain --O--, --CO--, --COO--, --OCO--, --CONR 13 --, --NR 13 CO--, --SO 2 --or --SO 3 --, R 13 represents hydrogen, an alkyl, substituted alkyl, aryl or substituted aryl group, R 7 and R 8 or R 7 and P 1 may combine to form a ring, X 1 to X 3 represent hydroxy groups or hydrolyzable P 1 to P 3 represent single bonds, alkylene, substituted alkylene, arylene or substituted arylene groups which may contain --O---, --CO--, --COO--, --OCO--, --CONR 13 --, --NR 13 CO--, --SO 2 --or --SO 3 --, Y represents a trivalent aromatic ring, Q represents an acid group having pKa of not more than 12, Z 1 represents ##STR18## wherein Y n+2 represents a (n+2) valent aromatic ring, and n is an integer of 1 to 3, Ar 1 and Ar 2 may be same or different and each represents a substituted or unsubstituted aryl group, R 10 to R 12 may be same or different and each represents a substituted or unsubstituted alkyl or aryl group, Z 2 - represents BF 4 - , PF 6 - , A 5 F 6 31 , SbF 6 - , ClO 4 - , CF 3 SO 3 - or R 10 SO 3 - , two of the groups R 10 , R 11 and R 12 , or Ar 1 and Ar 2 each may be bonded through a single bond or a substituent.

Claim 3

The light-sensitive composition of claim 1, wherein the amount of the polysiloxane compound ranges from 5 to 95% by weight of the total solid weight of the composition and the amount of the onium salt compound ranges from 5 to 70% by weight of the total solid content of the composition.

Claim 4

The light-sensitive composition of claim 1, wherein it further comprises an alkali-soluble polymer in the amount of 1 to 90% by weight of the total solid content of the composition.

Claim 5

The light-sensitive composition of claim 1, wherein the polysiloxane compound contains at least 3 mol% of the structural unit.

Claim 6

The light-sensitive composition of claim 1, wherein the polysiloxane compound contains at least 5 mol% of the structural unit.

Claim 7

The light-sensitive composition of claim 1, wherein the polysiloxane is a co-condensate of at least one compound of formula (XI) to (XXVI) and at least one compound of formula (XXVII) to (XXXI), which co-condensate contains at least 1 mol% of the siloxane unit derived from the thermal cycloaddition reaction product between a compound of formula (I), (II), (III) or (IV) and a compound of formula (V), (vI), (vII) or (VIII); ##STR19## wherein R 1 to R 5 may be same or different and represent hydrogen, alkyl, substituted alkyl, aryl, substituted aryl, silyl, substituted silyl, siloxy or substituted siloxy groups, R 4 represents hydrogen, an alkyl, substituted alkyl, aryl, substituted aryl, ##STR20## R 7 to R 9 represents hydrogen, an alkyl, substituted alkyl, aryl, substituted aryl, alkoxy, substituted alkoxy, cyano, nitro groups, --p 1 --Q or ##STR21## which may contain --O--, --CO--, --COO--, --OCO--, --CONR 13 --, --NR 13 CO--, --SO 2 --or --SO 3 --, R 14 to R 17 represent hydrogen, alkyl, substituted alkyl, aryl or substituted aryl groups, R 7 and R 8 or R 7 and P 1 may combine to form a ring, X 1 to X 7 represent hydroxy groups or hydrolyzable groups, P 1 to P 4 represent single bonds, alkylene, substituted alkylene, arylene or substituted arylene groups which may contain --O--, --CO--, --COO--, --OCO--, --CONR 13 --, --NR 13 CO--, --SO 2 --or --SO 2 --, Y represents a trivalent aromatic ring, Q represents an acid group having pKa of not more than 12, Z 1 represents ##STR22## wherein Y n+2 represents a (n+2) valent aromatic ring, and n is an integer of 1 to 3.

Claim 8

The light-sensitive composition of claim 1, wherein the polysiloxane is a product of the thermal cycloaddition reaction between a compound of formula (I), (II), (III) or (IV) and a compound of formula (V), (VI), (VII) or (VIII) in the presence of at least one compound of formula (XXXII) or (XXXIII); ##STR23## wherein D 1 and D 2 may be same or different and may combine to form a ring but do not contain acid groups having pKa of not more than 12, R 14 and R 15 represent hydrogen, alkyl, substituted alkyl, aryl or substituted aryl groups, and the polysiloxane contains at least 1 mol% of the siloxane unit derived from the thermal cycloaddition reaction product between the compound of formula (I), (II), (III) or (IV) and the compound of formula (V), (VI), (VII) or (VIII).

Claim 9

The light-sensitive composition of claim 1, wherein the onium salt is the iodonium salt of formula (IX).

Claim 10

The light-sensitive composition of claim 1, wherein the onium salt is the sulfonium salt of formula (X).

Claim 11

A light-sensitive composition which comprises: (a) a polysiloxane compound having at least 1 mol% of a structural unit derived from a product of a thermal cycloaddition reaction between a compound of formula (I), (II), (III) or (IV) and a compound of formula (V), (VI), (VII) or (VIII), (b) an onium salt compound of formula (IX) or (X), and (c) a solvent; ##STR24## wherein R 1 to R 5 may be same or different and represent hydrogen, alkyl, substituted alkyl, aryl, substituted aryl, silyl, substituted sily, siloxy or substituted alkyl, aryl, substituted aryl, ##STR25## R 7 to R 9 represent hydrogen, an aklyl, substituted alkyl, aryl, substituted arly, alkoxy, substituted alkoxy, cyano, nitro, --P 1 --Q or ##STR26## which may contain --O--, --CO--, --COO--, --OCO--, --CONR 13 --, --NR 13 CO--, --SO 2 --or --SO 3 --.R 4 represents hydrogen, an alkyl, substituted alkyl, aryl, substituted aryl, R 13 represents hydrogen, an alkyl, substituted alkyl, aryl or substituted aryl group, R 7 and R 8 or R 7 and P 1 may combine to form a ring, X 1 to X 3 represent hydroxy groups or hydrolyzable groups, P 1 to P 3 represent single bonds, alkylene, substituted alkylene, arylene or substituted arylene groups which may contain --O--, --CO--, --COO--, --OCO--, --CONR 13 --, --NR 13 CO--, --SO 2 --or --SO 3 --, Y represents a trivalent aromatic ring, Q represents an acid group having pKa of not more than 12, Z 1 represents ##STR27## wherein Y n+2 represents a (n+2) valent aromatic ring, n is an integer of 1 to 3, Ar 1 and Ar 2 may be same or different and each represents a substituted or unsubstituted aryl group, R 10 to R 12 may be same or different and each represents a substituted or unsubstituted alkyl or aryl group, R 10 to R 12 may be same or different and each represents a substituted or unsubstituted alkyl or aryl group, Z 2 - represents BF 4 - , PF 4 - ,A 5 F 4 - ,SbF 4 - , ClO 4 - , CF 3 SO 3 - or R 10 SO 3 - , two of the groups R 10 , R 11 and R 12 , or Ar 1 and Ar 2 each may be bonded through a single bond or a substituent.

Claim 12

A light-sensitive composition which comprises: (a) a polysiloxane compound having at least 1 mol% of a structural unit derived from a product of a thermal cycloaddition reaction between a compound of formula (I), (II), (III) or (IV) and a compound of formula (V), (VI), (VII) or (VIII), (b) an onium salt compound of formula (IX) or (X), and (c) a solvent; ##STR24## wherein R 1 to R 5 may be same or different and represent hydrogen, alkyl, substituted alkyl, aryl, substituted aryl, silyl, substituted sily, siloxy or substituted alkyl, aryl, substituted aryl, ##STR25## R 7 to R 9 represent hydrogen, an aklyl, substituted alkyl, aryl, substituted arly, alkoxy, substituted alkoxy, cyano, nitro, --P 1 --Q or ##STR26## which may contain --O--, --CO--, --COO--, --OCO--, --CONR 13 --, --NR 13 CO--, --SO 2 --or --SO 3 --.R 4 represents hydrogen, an alkyl, substituted alkyl, aryl, substituted aryl, R 13 represents hydrogen, an alkyl, substituted alkyl, aryl or substituted aryl group, R 7 and R 8 or R 7 and P 1 may combine to form a ring, X 1 to X 3 represent hydroxy groups or hydrolyzable groups, P 1 to P 3 represent single bonds, alkylene, substituted alkylene, arylene or substituted arylene groups which may contain --O--, --CO--, --COO--, --OCO--, --CONR 13 --, --NR 13 CO--, --SO 2 --or --SO 3 --, Y represents a trivalent aromatic ring, Q represents an acid group having pKa of not more than 12, Z 1 represents ##STR27## wherein Y n+2 represents a (n+2) valent aromatic ring, n is an integer of 1 to 3, Ar 1 and Ar 2 may be same or different and each represents a substituted or unsubstituted aryl group, R 10 to R 12 may be same or different and each represents a substituted or unsubstituted alkyl or aryl group, R 10 to R 12 may be same or different and each represents a substituted or unsubstituted alkyl or aryl group, Z 2 - represents BF 4 - , PF 4 - ,A 5 F 4 - ,SbF 4 - , ClO 4 - , CF 3 SO 3 - or R 10 SO 3 - , two of the groups R 10 , R 11 and R 12 , or Ar 1 and Ar 2 each may be bonded through a single bond or a substituent.

Claim 13

The light-sensitive composition of claim 10, wherein it further comprises an alkali-soluble polymer.

Claim 14

The light-sensitive composition of claim 11, wherein the alkali-soluble polymer is a polymer carrying acidic hydrogen atom having pKa of not more than 11.

Claim 15

The light-sensitive composition of claim 11, wherein the alkali-soluble polymer is a novolak type phenol resin.

Claim 16

The light-sensitive composition of claim 11, wherein the amount of the alkali-soluble polymer ranges from 5 to 80% by weight based on the solid content of the light-sensitive composition.

Claim 17

The light-sensitive composition of claim 11, wherein the solvent is selected from the group consisting of ethylene dichloride, cyclohexanone, methy ethyl ketone, methyl isobutyl ketone, methanol, ethanol, propanol, ethylene glycol monomethyl ether, 1-methoxy-2-propanol, ethylene glycol monoethyl ether, 2methoxyethyl acetate, 2-ethoxyethyl acetate, 1-methoxy-2-propyl acetate, dimethoxyethane, methyl lactate, ethyl lactate, N, N-dimethylacetamide, N, N-dimethylformamide, tetramethyl urea, N-methylpyrrolidone, dimethylsulfoxide, sulforane, butyrolactone, toluene, ethyl acetate, ethyl cellosolve acetate and mixtures thereof.