US4689288A
Expired / Lapsed
US
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Photosensitive film based on silicon-containing polymer and its use as a masking resin in a lithography process
Assignee: Commissariat à l'Énergie Atomique et Aux Énergies Alternatives
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Filing: 1985-09-19
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Granted: 1987-08-25
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Expires: 2005-09-19
Abstract
Abstract Photosensitive film which is photosensitive in a given wavelength range comprises at least one silicon-containing polymer, at least one salt which can be converted into a Brunsted acid by irradiation and optionally at least one photosensitizer. The silicon-containing polymer-based photosensitive film can be used as a masking resin in a lithography process for producing electronic components.
Inventors
- 👤 Francois Buiguez
- 👤 Louis Giral
- 👤 Charles Rosilio
- 👤 Francois Schue
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 18:34
CPC Classifications
C; C08; C08F; C08F30/00; C08F30/04; C08F30/08; G; G03; G03F; G03F7/00; G03F7/004; G03F7/075; G03F7/0757; G03F7/0758; Y; Y10; Y10S; Y10S430/00; Y10S430/1053; Y10S430/1055; Y10S430/114; Y10S430/115; Y10S430/122; Y10S430/123; Y10S430/126; Y10S430/127
Claims Analysis
Total Claims: 16
Claim 1
Independent Claim
139 words
A film photosensitive to a given wavelength wherein it comprises: (a) at least one silicon-containing polymer in accordance with the formula: ##STR24## in which R 1 represents H or an alkyl radical of 1 to 4 carbon atoms, R 2 , R 3 , and R 4 , being the same or different, represent an alkyl radical of 1 to 4 carbon atoms, Z represents --O--, --(CH 2 ) n --O-- with n being an integer between 1 and 4, or ##STR25## with R 5 , R 6 and R 7 , being the same or different, representing an alkyl radical of 1 to 4 carbon atoms and m being a number between 25 and 2000 and (b) at least one salt which is converted into a Brunsted acid upon irradiation at a wavelength in the given wavelength range.
Claim 2
Dependent Claim
139 words
A film photosensitive to a given wavelength wherein it comprises: (a) at least one silicon-containing polymer in accordance with the formula: ##STR24## in which R 1 represents H or an alkyl radical of 1 to 4 carbon atoms, R 2 , R 3 , and R 4 , being the same or different, represent an alkyl radical of 1 to 4 carbon atoms, Z represents --O--, --(CH 2 ) n --O-- with n being an integer between 1 and 4, or ##STR25## with R 5 , R 6 and R 7 , being the same or different, representing an alkyl radical of 1 to 4 carbon atoms and m being a number between 25 and 2000 and (b) at least one salt which is converted into a Brunsted acid upon irradiation at a wavelength in the given wavelength range.
Claim 3
Dependent Claim
16 words
A photosensitive film according to claim 1, wherein it also comprises: (c) at least one photosensitizer.
Claim 4
Dependent Claim
45 words
A photosensitive film according to claim 1, wherein it comprises for 100 parts by weight of the silicon-containing polymer or polymers, 2 to 25 parts by weight of the said salt or salts and 0 to 10 parts by weight of at least one photosensitizer.
Claim 5
Dependent Claim
21 words
A photosensitive film according to claim 3, wherein it comprises 3 to 10 parts by weight of the photosensitizer or photosensitizers.
Claim 6
Dependent Claim
29 words
A photosensitive film according to either of the claims 1 and 2, wherein in the formula (I) for the silicon-containing polymer, R 1 represents H or CH 3 .
Claim 7
Dependent Claim
37 words
A photosensitive film according to claim 5, wherein in the formula (I) for the silicon-containing polymer, R 2 , R 3 , R 4 , R 5 , R 6 and R 7 represent the methyl radical.
Claim 8
Dependent Claim
23 words
A photosensitive film according to either of the claims 1 and 2, wherein the silicon-containing polymer is in accordance with the formula: ##STR26##
Claim 9
Dependent Claim
35 words
A photosensitive film according to either of claims 1 and 2, wherein said salt is is selected from the group consisting of the sulphonium salts, the diaryliodonium salts, the triarylselenonium salts and the triaryltelluronium salts.
Claim 10
Dependent Claim
78 words
A photosensitive film according to claim 8, wherein the sulphonium salt is a salt of formula: ##STR27## in which R 8 , R 9 and R 10 , being the same or different, are substituted or unsubstituted alkyl or aryl radicals, M is an element of the periodic classification of elements able to form an anion with a halogen, X is a halogen atom and p is equal to v+1, with v representing the valency state of M.
Claim 11
Dependent Claim
74 words
A photosensitive film according to claim 8, wherein the diaryliodonium salt is in accordance with the formula: ##STR28## in which R 8 and R 9 , being the same or different, represent a substituted or unsubstituted aryl radical, M represents an element of the periodic classification of elements able to form an anion with a halogen, X represents a halogen atom and p is equal to 1+v, with v representing the valency of M.
Claim 12
Dependent Claim
38 words
A photosensitive film according to either of claims 9 and 10, wherein MX p - is selected from the group consisting of BF 4 - , AsF 6 - , PF 6 - and SbF 6 - .
Claim 13
Dependent Claim
23 words
A photosensitive film according to any one of the claims 1 and 2, wherein said salt is triphenyl sulphonium hexafluoroarsenate or diphenyliodonium hexafluorarsenate.
Claim 14
Dependent Claim
14 words
A photosensitive film according to claim 2, wherein the photosensitizer is an aromatic hydrocarbon.
Claim 15
Dependent Claim
12 words
A photosensitive film according to claim 12, wherein the photosensitizer is perylene.
Claim 16
Dependent Claim
34 words
A photosensitive film according to claim 10, wherein MX p - is selected from the group consisting of BF 4 - , AsF 6 - , PF 6 - and SbF 6 - .
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1990-08-24 | 1991-02-23 | 1991-08-25 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-08-24 | 1995-02-23 | 1995-08-25 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-08-24 | 1999-02-23 | 1999-08-25 | $7700.00 | Window Closed / Lapsed |