US5138401A
Expired / Lapsed
US
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Electronic devices utilizing superconducting materials
Assignee: Semiconductor Energy Laboratory Co Ltd
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Filing: 1991-10-17
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Granted: 1992-08-11
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Expires: 2011-10-17
Abstract
Abstract A new type superconducting electronic device is described. In the description, a field effect semiconductor device is constructed in accordance with the present invention. A superconducting ceramic material is deposited on the source and drain regions of the semiconductor device with insulating film therebetween functioning as a tunnel current film.
Inventors
- 👤 Shunpei Yamazaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 21:56
CPC Classifications
H; H10; H10N; H10N60/00; H10N60/20; H10N60/205; H10N60/207; H10D; H10D64/00; H10D64/60; H10D64/608; H10D64/66; H10D64/667; H10D64/68
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
48 words
In a superconducting device comprising a semiconductor region and a superconducting region electrically connected to said semiconductor region, the improvement comprising a barrier layer formed at an interface between said semiconductor region and said superconducting region, which barrier layer is such that tunneling currents can be passed therethrough.
Claim 2
Dependent Claim
48 words
In a superconducting device comprising a semiconductor region and a superconducting region electrically connected to said semiconductor region, the improvement comprising a barrier layer formed at an interface between said semiconductor region and said superconducting region, which barrier layer is such that tunneling currents can be passed therethrough.
Claim 3
Dependent Claim
14 words
The superconducting device of claim 1 wherein said barrier layer comprises a non-oxide material.
Claim 4
Dependent Claim
24 words
The superconducting device of claim 2 wherein said non-oxide material is selected from the group consisting of silicon nitride, silicon carbide and diamond-like carbon.
Claim 5
Dependent Claim
18 words
The superconducting device of claim 1 wherein said barrier layer has a thickness from 10 to 30 Angstroms.
Claim 6
Dependent Claim
86 words
The device of claim 1 wherein said superconducting regions comprise a superconducting material represented by a general formula: (A.sub.1-x B.sub.x).sub.y Cu.sub.z O.sub.w X.sub.v where A is one or more elements selected from the group consisting of Sc, Y, Lanthanides and Actinides, B is one or more elements selected from the group consisting of Be, Mg, Ca, Sr, Ba and Ra, X is one or more elements selected from the group consisting of Ge, Sn, Pb, F and Cl and where x=0-1; y=2-4; z=1-4; w=4-10; and v=0-3.
Claim 7
Dependent Claim
66 words
The device of claim 1 wherein said superconducting regions comprise a superconducting material represented by a general formula: (A.sub.1-x B.sub.x).sub.y Cu.sub.z O.sub.w where A is one or more elements selected from the group consisting of N, P, As, Sb and Bi, B is one or more elements selected from the group consisting of Be, Mg, Ca, Sr, Ba and Ra, where x=0.3-1; y=2-4; z=1-4; and w=4-10.
Claim 8
Dependent Claim
72 words
A superconducting device comprising: a pair of oxide superconducting regions; a semiconductor region formed between said pair of superconducting regions; barrier layers formed at interfaces between said semiconductor region and said superconducting regions for preventing an interaction with each other; a control electrode formed on said semiconductor region for applying an electric field thereto with an insulating layer therebetween; wherein said barrier layers are such that tunneling currents can be passed therethrough.
Claim 9
Dependent Claim
72 words
A superconducting device comprising: a pair of oxide superconducting regions; a semiconductor region formed between said pair of superconducting regions; barrier layers formed at interfaces between said semiconductor region and said superconducting regions for preventing an interaction with each other; a control electrode formed on said semiconductor region for applying an electric field thereto with an insulating layer therebetween; wherein said barrier layers are such that tunneling currents can be passed therethrough.
Claim 10
Dependent Claim
17 words
The device of claim 7 wherein said barrier layers have a thickness from 10 to 30 Angstroms.
Claim 11
Dependent Claim
15 words
The device of claim 7 wherein the barrier layers are insulating layers or semi-insulating layers.
Claim 12
Dependent Claim
86 words
The device of claim 7 wherein said superconducting regions comprise a superconducting material represented by a general formula: (A.sub.1-x B.sub.x).sub.y Cu.sub.z O.sub.w X.sub.v where A is one or more elements selected from the group consisting of Sc, Y, Lanthanides and Actinides, B is one or more elements selected from the group consisting of Be, Mg, Ca, Sr, Ba and Ra, X is one or more elements selected from the group consisting of Ge, Sn, Pb, F and Cl and where x=0-1; y=2-4; z=1-4; w=4-10; and v=0-3.
Claim 13
Dependent Claim
66 words
The device of claim 7 wherein said superconducting regions comprise a superconducting material represented by a general formula: (A.sub.1-x B.sub.x).sub.y Cu.sub.z O.sub.w where A is one or more elements selected from the group consisting of N, P, As, Sb and Bi, B is one or more elements selected from the group consisting of Be, Mg, Ca, Sr, Ba and Ra, where x=0.3-1; y=2-4; z=1-4; and w=4-10.
Claim 14
Dependent Claim
77 words
A superconducting device comprising: a pair of oxide superconducting regions; a semiconductor region formed between said pair of superconducting regions; barrier layers formed at interfaces between said semiconductor region and said superconducting regions for preventing an interaction with each other; a control electrode formed on said semiconductor region for applying an electric field thereto with an insulating layer therebetween; wherein said barrier layers are such that tunneling currents can be passed therethrough and comprise a non-oxide material.
Claim 15
Dependent Claim
77 words
A superconducting device comprising: a pair of oxide superconducting regions; a semiconductor region formed between said pair of superconducting regions; barrier layers formed at interfaces between said semiconductor region and said superconducting regions for preventing an interaction with each other; a control electrode formed on said semiconductor region for applying an electric field thereto with an insulating layer therebetween; wherein said barrier layers are such that tunneling currents can be passed therethrough and comprise a non-oxide material.
Claim 16
Dependent Claim
17 words
The device of claim 12 wherein said barrier layers have a thickness from 10 to 30 Angstroms.
Claim 17
Dependent Claim
15 words
The device of claim 12 wherein the barrier layers are insulating layers or semi-insulating layers.
Claim 18
Dependent Claim
86 words
The device of claim 12 wherein said superconducting regions comprise a superconducting material represented by a general formula: (A.sub.1-x B.sub.x).sub.y Cu.sub.z O.sub.w X.sub.v where A is one or more elements selected from the group consisting of Sc, Y, Lanthanides and Actinides, B is one or more elements selected from the group consisting of Be, Mg, Ca, Sr, Ba and Ra, X is one or more elements selected from the group consisting of Ge, Sn, Pb, F and Cl, and where x=0-1; y=2-4; z=1-4; w=4-10; and v=0-3.
Claim 19
Dependent Claim
66 words
The device of claim 12 wherein said superconducting regions comprise a superconducting material represented by a general formula: (A.sub.1-x B.sub.x).sub.y Cu.sub.z O.sub.w where A is one or more elements selected from the group consisting of N, P, As, Sb and Bi, B is one or more elements selected from the group consisting of Be, Mg, Ca, Sr, Ba and Ra, where x=0.3-1; y=2-4; z=1-4; and w=4-10.
Claim 20
Dependent Claim
89 words
A superconducting device comprising: a pair of oxide superconducting regions; a semiconductor region formed between said pair of superconducting regions; barrier layers formed at interface between said semiconductor region and said superconducting regions for preventing an interaction with each other; a control electrode formed on said semiconductor region for applying an electric field thereto with an insulating layer therebetween; wherein said barrier layers are such that tunneling currents can be passed therethrough and comprise a material selected from the group consisting of silicon nitride, silicon carbide and diamond-like carbon.
Claim 21
Dependent Claim
89 words
A superconducting device comprising: a pair of oxide superconducting regions; a semiconductor region formed between said pair of superconducting regions; barrier layers formed at interface between said semiconductor region and said superconducting regions for preventing an interaction with each other; a control electrode formed on said semiconductor region for applying an electric field thereto with an insulating layer therebetween; wherein said barrier layers are such that tunneling currents can be passed therethrough and comprise a material selected from the group consisting of silicon nitride, silicon carbide and diamond-like carbon.
Claim 22
Dependent Claim
17 words
The device of claim 12 wherein said barrier layers have a thickness from 10 to 30 Angstroms.
Claim 23
Dependent Claim
86 words
The device of claim 12 wherein said superconducting regions comprise a superconducting material represented by a general formula: (A.sub.1-x B.sub.x).sub.y Cu.sub.z O.sub.w X.sub.v where A is one or more elements selected from the group consisting of Sc, Y, Lanthanides and Actinides, B is one or more elements selected from the group consisting of Be, Mg, Ca, Sr, Ba and Ra, X is one or more elements selected from the group consisting of Ge, Sn, Pb, F and Cl, and where x=0-1; y=2-4; z=1-4; w=4-10; and v=0-3.
Claim 24
Dependent Claim
66 words
The device of claim 17 wherein said superconducting regions comprise a superconducting material represented by a general formula: (A.sub.1-x B.sub.x).sub.y Cu.sub.z O.sub.w where A is one or more elements selected from the group consisting of N, P, As, Sb and Bi, B is one or more elements selected from the group consisting of Be, Mg, Ca, Sr, Ba and Ra, where x=0.3-1; y=2-4; z=1-4; and w=4-10.
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