Patent US5138159A successfully refreshed from Google Patents.
US5138159A
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US
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Scanning tunneling microscope
Assignee: Olympus Corp
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Filing: 1991-07-08
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Granted: 1992-08-11
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Expires: 2011-07-08
Abstract
Abstract White light emitted from a light source is made incident on a spectroscope via a lens. The light from the spectroscope is converged by a lens and fed to one end of an optical fiber. The other end of the fiber is provided with a probe. The probe has a pointed end portion coated with a total reflection film and a transparent electrically conductive film. The probe is attached to a cylindrical piezoelectric actuator via a metal frame. Thus, the probe is scanned along the surface of a sample, and the distance between the probe and the surface of the sample is controlled. The light emitted from the tip of the probe and transmitted through the sample is converged by a lens system and radiated on a photoelectrical conversion element. The output from the photoelectrical conversion element is processed by a signal processor, and the processed result is displayed on a display. A driver circuit scans the probe along the surface of the sample, and controls the distance between the probe and the sample upon receiving a tunnel current. The output from the driver circuit is processed by the signal processor and an STM image is displayed on the display.
Inventors
- 👤 Tsugiko Takase
- 👤 Takao Okada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 12:57
CPC Classifications
G; G01; G01Q; G01Q60/00; G01Q60/10; G01Q60/16; B; B82; B82Y; B82Y20/00; B82Y35/00; G01Q60/18; G01Q60/22; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/852; Y10S977/86; Y10S977/861
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
237 words
A scanning tunneling microscope comprising: a probe including a tapered end portion, a light incidence section, a light propagation medium with a light emission portion at the tip of the tapered end portion, said light emission portion allowing the incident light to be emitted, and an electrically conductive layer provided near the tapered end portion and having a transparent electrical conductor with an optically transparent pointed tip portion through which light from the light emission portion passes; a light source; guide means for guiding light from the light source to the light incidence section of the probe; scanning means for supporting the probe in the vicinity of a sample, thereby radiating the light from the light emission portion onto the sample, and for scanning the probe along the surface of the sample; a photoelectrical conversion element receiving the light from the sample; tunnel current detecting means for applying a voltage across the probe and the sample and detecting a tunnel current flowing across the probe and the sample; control means for controlling the distance between the tip of the probe and the surface of the sample; and measuring/displaying means for measuring optical characteristics of the sample on the basis of the output from the photoelectrical conversion element, measuring a fine configuration and electrical characteristics of the surface of the sample on the basis of the output from the tunnel current detecting means, and displaying the measurement results.
Claim 2
Dependent Claim
237 words
A scanning tunneling microscope comprising: a probe including a tapered end portion, a light incidence section, a light propagation medium with a light emission portion at the tip of the tapered end portion, said light emission portion allowing the incident light to be emitted, and an electrically conductive layer provided near the tapered end portion and having a transparent electrical conductor with an optically transparent pointed tip portion through which light from the light emission portion passes; a light source; guide means for guiding light from the light source to the light incidence section of the probe; scanning means for supporting the probe in the vicinity of a sample, thereby radiating the light from the light emission portion onto the sample, and for scanning the probe along the surface of the sample; a photoelectrical conversion element receiving the light from the sample; tunnel current detecting means for applying a voltage across the probe and the sample and detecting a tunnel current flowing across the probe and the sample; control means for controlling the distance between the tip of the probe and the surface of the sample; and measuring/displaying means for measuring optical characteristics of the sample on the basis of the output from the photoelectrical conversion element, measuring a fine configuration and electrical characteristics of the surface of the sample on the basis of the output from the tunnel current detecting means, and displaying the measurement results.
Claim 3
Dependent Claim
22 words
The scanning tunneling microscope according to claim 1, wherein said light propagation medium is an optical fiber having a pointed tip portion.
Claim 4
Dependent Claim
46 words
The scanning tunneling microscope according to claim 2, wherein said electrically conductive layer includes a reflection layer provided on the peripheral surface of the light propagation medium, said reflection layer reflecting light which travels from the inside of the light propagation medium to the outside thereof.
Claim 5
Dependent Claim
33 words
The scanning tunneling microscope according to claim 2, further comprising an optical element having conjugation points at a portion of the sample at the tip of the probe and the photoelectrical conversion element.
Claim 6
Dependent Claim
16 words
The scanning tunneling microscope according to claim 4, wherein said optical element is a concave mirror.
Claim 7
Dependent Claim
35 words
The scanning tunneling microscope according to claim 1, wherein the light source is a pulse driven laser, said microscope has a wavelength variable element, and said photoelectrical conversion element is operated in synchronism with pulses.
Claim 8
Dependent Claim
28 words
The scanning tunneling microscope according to claim 6, wherein said pulse driven laser includes a high-frequency generating unit for generating a high frequency of an emission light wavelength.
Claim 9
Dependent Claim
18 words
The scanning tunneling microscope according to claim 6, wherein said wavelength variable element is a tunable dye laser.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-08-11 | 1996-02-10 | 1996-08-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-08-11 | 2000-02-10 | 2000-08-11 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-08-11 | 2004-02-10 | 2004-08-11 | $7700.00 | Window Closed / Lapsed |