Hybrid substrate

Claim 2

A hybrid substrate comprising an aluminum-based ceramic base substrate and a silicon layer provided directly on said base substrate, wherein said silicon layer has a thickness of 20 μm or more.

Claim 3

A hybrid substrate comprising a polycrystalline ceramic base substrate and a silicon layer provided directly on said base substrate, wherein said silicon layer has a thickness of 20 μm or more.

Claim 4

A hybrid substrate comprising a polycrystalline ceramic base substrate and a silicon layer provided directly on said base substrate, wherein said silicon layer has a thickness of 20 μm or more.

Claim 5

A hybrid substrate comprising a ceramic base substrate and a polycrystalline layer of a different material from said ceramic base substrate deposited on said ceramic base substrate, said polycrystalline layer being constituted of plural layers of varying crystal grain sizes, wherein: (a) the lowest layer among the layers constituting said polycrystalline layer deposited on the ceramic base substrate has a thickness of 10 μm or less, and a crystal grain size of 1 μm or less, (b) the second layer laminated directly on the lowest layer amount the layers constituting said polycrystalline layer has a thickness of 10 to 50 μm or less, and a crystal grain size of 2 μm or more and (c) the uppermost layer among the layers constituting said polycrystalline layer has a grain size of 0.5 μm or less.

Claim 6

A hybrid substrate comprising a ceramic base substrate and a polycrystalline layer of a different material from said ceramic base substrate deposited on said ceramic base substrate, said polycrystalline layer being constituted of plural layers of varying crystal grain sizes, wherein: (a) the lowest layer among the layers constituting said polycrystalline layer deposited on the ceramic base substrate has a thickness of 10 μm or less, and a crystal grain size of 1 μm or less, (b) the second layer laminated directly on the lowest layer amount the layers constituting said polycrystalline layer has a thickness of 10 to 50 μm or less, and a crystal grain size of 2 μm or more and (c) the uppermost layer among the layers constituting said polycrystalline layer has a grain size of 0.5 μm or less.

Claim 7

A hybrid substrate comprising a ceramic base substrate and a polycrystalline layer of a different material from said ceramic base substrate deposited on said ceramic base substrate, said polycrystalline layer being constituted of plural layers of varying crystal grain sizes, wherein: (a) the lowest layer among the layers constituting said polycrystalline layer deposited on the ceramic base substrate has a thickness of 10 μm or less, and a crystal grain size of 1 μm or less, (b) the second layer laminated directly on the lowest layer among the layers constituting said polycrystalline layer has a thickness of 10 to 50 μm or less, and a crystal grain size of 2 μm or more and (c) the uppermost layer among the layers has a grain size of 0.5 μm or less; said ceramic base substrate being an aluminum oxide polycrystalline sintered product.

Claim 8

A hybrid substrate comprising a ceramic base substrate and a polycrystalline layer of a different material from said ceramic base substrate deposited on said ceramic base substrate, said polycrystalline layer being constituted of plural layers of varying crystal grain sizes, wherein: (a) the lowest layer among the layers constituting said polycrystalline layer deposited on the ceramic base substrate has a thickness of 10 μm or less, and a crystal grain size of 1 μm or less, (b) the second layer laminated directly on the lowest layer among the layers constituting said polycrystalline layer has a thickness of 10 to 50 μm or less, and a crystal grain size of 2 μm or more and (c) the uppermost layer among the layers has a grain size of 0.5 μm or less; said ceramic base substrate being an aluminum oxide polycrystalline sintered product.

Claim 9

A hybrid substrate comprising a ceramic base substrate and a polycrystalline layer of a different material from said ceramic base substrate deposited on said ceramic base substrate, said polycrystalline layer being constituted of plural layers of varying crystal grain sizes, wherein: (a) the lowest layer among the layers constituting said polycrystalline layer deposited on the ceramic base substrate has a thickness of 10 μm or less, and a crystal grain size of 1 μm or less, (b) the second layer laminated directly on the lowest layer among the layers constituting said polycrystalline layer has a thickness of 10 to 50 μm or less, and a crystal grain size of 2 μm or more, and (c) the uppermost layer among the layers constituting said polycrystalline layer has a grain size of 0.5 μm or less; said polycrystalline layer being polycrystalline silicon.

Claim 10

A hybrid substrate comprising a ceramic base substrate and a polycrystalline layer of a different material from said ceramic base substrate deposited on said ceramic base substrate, said polycrystalline layer being constituted of plural layers of varying crystal grain sizes, wherein: (a) the lowest layer among the layers constituting said polycrystalline layer deposited on the ceramic base substrate has a thickness of 10 μm or less, and a crystal grain size of 1 μm or less, (b) the second layer laminated directly on the lowest layer among the layers constituting said polycrystalline layer has a thickness of 10 to 50 μm or less, and a crystal grain size of 2 μm or more, and (c) the uppermost layer among the layers constituting said polycrystalline layer has a grain size of 0.5 μm or less; said polycrystalline layer being polycrystalline silicon.