Patent US2234351A successfully refreshed from Google Patents.
Patent US5133849A successfully refreshed from Google Patents.
US5133849A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Thin film forming apparatus
Assignee: Ricoh Co Ltd
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Filing: 1989-12-11
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Granted: 1992-07-28
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Expires: 2009-12-11
Abstract
Abstract An apparatus for forming a thin film has a vacuum container to which an active gas, an inert gas or a mixture thereof is introduced, and a source of evaporation from which a substance is evaporated. A counter electrode is disposed in the vacuum container for holding a substrate for forming a thin film thereon in such a manner as to be opposed to the source of evaporation. A grid is disposed between the source of evaporation and the counter electrode and having openings which allow the evaporated substance to pass therethrough. A filament for thermionic emission is disposed between the grid and the source of evaporation. A target is also disposed between the filament and the source of evaporation for emitting sputtered particles. A power source device establishes predetermined electric potential relationships between the grid, the filament, and the target.
Inventors
- 👤 Mikio Kinoshita
- 👤 Wasaburo Ohta
- 👤 Tatsuya Sato
- 👤 Masashi Nakazawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 06:10
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32422; C; C23; C23C; C23C14/00; C23C14/0021; C23C14/22; C23C14/24; C23C14/32
Claims Analysis
Total Claims: 3
Claim 1
Independent Claim
165 words
An apparatus for forming a thin film comprising: a vacuum container to which an active gas, an inert gas or a mixture thereof is introduced; a source of evaporation from which a substance is evaporated, said source being disposed in said vacuum container; a counter electrode disposed in said vacuum container for holding a substrate for forming a thin film thereon in such a manner as to be opposed to said source of evaporation; a grid disposed between said source of evaporation and said counter electrode, and having openings which allow said evaporated substance to pass therethrough, said grid being divided into a plurality of small portions, each of which is set to such a potential that said evaporated substance can impinge substantially perpendicularly onto said surface of said substrate; and a filament for thermionic emission disposed between said grid and said source of evaporation; said grid being maintained in voltage at a positive potential relative to potentials of said counter electrode and said filament.
Claim 2
Independent Claim
165 words
An apparatus for forming a thin film comprising: a vacuum container to which an active gas, an inert gas or a mixture thereof is introduced; a source of evaporation from which a substance is evaporated, said source being disposed in said vacuum container; a counter electrode disposed in said vacuum container for holding a substrate for forming a thin film thereon in such a manner as to be opposed to said source of evaporation; a grid disposed between said source of evaporation and said counter electrode, and having openings which allow said evaporated substance to pass therethrough, said grid being divided into a plurality of small portions, each of which is set to such a potential that said evaporated substance can impinge substantially perpendicularly onto said surface of said substrate; and a filament for thermionic emission disposed between said grid and said source of evaporation; said grid being maintained in voltage at a positive potential relative to potentials of said counter electrode and said filament.
Claim 3
Dependent Claim
26 words
An apparatus according to claim 1, in which each of said small portions is provided with a variable resistor so as to be changed in potential.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-07-28 | 1996-01-27 | 1996-07-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-07-28 | 2000-01-27 | 2000-07-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-07-28 | 2004-01-27 | 2004-07-28 | $7700.00 | Window Closed / Lapsed |