US5133602A
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US
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Particle path determination system
Assignee: GlobalFoundries Inc
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Filing: 1991-04-08
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Granted: 1992-07-28
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Expires: 2011-04-08
Abstract
Abstract A bright-field, particle position determining optical system is disclosed that uses both phase shift and extinction signals to determine particle trajectories. In a first embodiment, a pair of orthogonally polarized beams are positioned along an axis that intersects a particle's flow path at an acute angle. An optical system recombines the beams after they exit the flow path, the combined beams manifesting an elliptical polarization if a particle intersects one of the beams. Bright field detectors detect polarization components of the combined beam, provide a phase shift signal between the beam's orthogonal components and provide corresponding signals to a processor. The processor determines a signal asymmetry from the phase shift signal that is indicative of a particle's position in the flow path. Another embodiment of the invention examines a signal resulting from the beam's phase shift and determines a correction factor that is dependent upon the distance of the particle from the focal plane of the beams. Another embodiment employs a dithering system for cyclically moving one or more optical beams across a particle to further enable its trajectory or position to be determined.
Inventors
- 👤 John S. Batchelder
- 👤 Donald M. DeCain
- 👤 Philip C. D. Hobbs
- 👤 Marc A. Taubenblatt
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 03:00
CPC Classifications
G; G01; G01N; G01N15/00; G01N15/02; G01N15/0205; G01N2015/0238; G01N21/00; G01N21/17; G01N2021/1757; G01N2021/1759; G01N21/47; G01N2021/4792
Claims Analysis
Total Claims: 31
Claim 1
Independent Claim
208 words
An apparatus for determining a particle's position in a flow path having a determinable direction comprising: means for transmitting to a flow path, first and second substantially parallel optical beams, said beams being initially mutually coherent but of different polarizations, said second beam offset from said first beam along an axis that intersects said determinable direction at an acute twist angle, a particle that passes through a beam inducing a phase shift in said beam that decreases as the distance increases of the particle from said beam's optical axis; recombining means positioned in a path which said beams take after departing from said flow path, for combining said beams, a phase shift in a said beam causing said combined beam to manifest an elliptical polarization exhibiting first and second polarization axes; detector means for sensing an intensity of one of said elliptical polarization axes to provide a phase shift signal; and processing means for accumulating phase shift signals resulting from a particle's travel in said flow path past said first and second beams, and subtracting a phase shift signal derived from said first beam from a phase shift signal derived from said second beam to determine an asymmetry value indicative of said particle's position in said flow path.
Claim 2
Independent Claim
208 words
An apparatus for determining a particle's position in a flow path having a determinable direction comprising: means for transmitting to a flow path, first and second substantially parallel optical beams, said beams being initially mutually coherent but of different polarizations, said second beam offset from said first beam along an axis that intersects said determinable direction at an acute twist angle, a particle that passes through a beam inducing a phase shift in said beam that decreases as the distance increases of the particle from said beam's optical axis; recombining means positioned in a path which said beams take after departing from said flow path, for combining said beams, a phase shift in a said beam causing said combined beam to manifest an elliptical polarization exhibiting first and second polarization axes; detector means for sensing an intensity of one of said elliptical polarization axes to provide a phase shift signal; and processing means for accumulating phase shift signals resulting from a particle's travel in said flow path past said first and second beams, and subtracting a phase shift signal derived from said first beam from a phase shift signal derived from said second beam to determine an asymmetry value indicative of said particle's position in said flow path.
Claim 3
Dependent Claim
52 words
The apparatus as recited in claim 1 wherein said beams exhibit substantially the same diameter and are offset from each other in both x and y dimensional directions, the beams being separated along the x direction by a distance which is in the range of 0.05 to 0.35 of a beam diameter.
Claim 4
Dependent Claim
39 words
The apparatus as recited in claim 1 wherein a said phase shift signal exhibits bipolar succeeding peaks, one said peak exhibiting a lower absolute amplitude than a second peak if said particle is offset from a central flow path.
Claim 5
Dependent Claim
49 words
The apparatus as recited in claim 1 wherein said processing means includes a stored table of asymmetry values for different distances of a particle from said central flow path, said processing means employing said determined asymmetry value and asymmetry values stored in said respect to said central flow path.
Claim 6
Dependent Claim
68 words
The apparatus as recited in claim 1 wherein said detector means comprises: means for prod two beams from said combined beam, a first said beam exhibiting said first polarization axis and a second said beam exhibiting said second polarization axis; sensor means for detecting intensities of said first and second beams; and differential means responsive to said sensor means for eliminating common mode noise from said detected intensities.
Claim 7
Independent Claim
187 words
An apparatus for determining a particle's position in a flow path comprising: means for transmitting to a focal plane in said flow path, first and second substantially parallel optical beams, said beams being initially mutually coherent but of different polarizations, said beams displaced from each other along said flow path, a particle in said flow path that passes through a beam inducing a phase shift and change in extinction of said beam; recombining means positioned in a path which said beams take after departing from said flow path for combining said beams, a phase shift in a said beam causing said combined beam to manifest an elliptical polarization exhibiting first and second polarization axes; detector means for sensing an intensity of at least one of said polarization axes to provide a phase shift signal; processing means for accumulating phase shift signals resulting from a particle's travel in said flow path, to derive a phase shift waveform therefrom, and for measuring a width characteristic of said phase shift waveform and deriving from said width characteristic an indication of the position of said particle relative to said focal plane.
Claim 8
Independent Claim
187 words
An apparatus for determining a particle's position in a flow path comprising: means for transmitting to a focal plane in said flow path, first and second substantially parallel optical beams, said beams being initially mutually coherent but of different polarizations, said beams displaced from each other along said flow path, a particle in said flow path that passes through a beam inducing a phase shift and change in extinction of said beam; recombining means positioned in a path which said beams take after departing from said flow path for combining said beams, a phase shift in a said beam causing said combined beam to manifest an elliptical polarization exhibiting first and second polarization axes; detector means for sensing an intensity of at least one of said polarization axes to provide a phase shift signal; processing means for accumulating phase shift signals resulting from a particle's travel in said flow path, to derive a phase shift waveform therefrom, and for measuring a width characteristic of said phase shift waveform and deriving from said width characteristic an indication of the position of said particle relative to said focal plane.
Claim 9
Dependent Claim
89 words
The apparatus as recited in claim 6 wherein said phase shift signal exhibits succeeding bipolar peaks, said processing means employing measured width characteristics of said succeeding peaks, and determined width characteristics of a phase shift signal that would be produced if said particle intersected said beams at said focal plane, to derive a correction factor, said processing means further combining said derived correction factor with said derived phase shift waveform to produce characteristics of a waveform that would have been produced had said particle passed through said focal plane.
Claim 10
Dependent Claim
68 words
The apparatus as recited in claim 6 wherein said detector means comprises: means for producing two beams from said combined beam, a first said beam exhibiting said first polarization axis and a second said beam exhibiting said second polarization axis; sensor means for detecting intensities of said first and second beams; and differential means responsive to said sensor means for eliminating common mode noise from said detected intensities.
Claim 11
Independent Claim
152 words
An apparatus for determining a particle's position in a flow path having a determinable direction, comprising: means for transmitting to a flow path at least an optical beam; dither means for oscillating said optical beam across said flow path at a rate that is high in relation to a rate of travel of a particle in said flow path, a particle in said flow path causing a change in extinction in said optical beam when said beam intercepts said particle; sensor means for providing output signals indicative of the extinction of said beam and including a noise cancelling amplifier provided with an input from said transmitting means, whereby said amplifier provides a minimal signal output at times other than when a particle in said flowpath intersects said beam; and processor means for sampling said output signals and deriving an extinction signal profile resulting from a said particle's travel in said flow path.
Claim 12
Independent Claim
152 words
An apparatus for determining a particle's position in a flow path having a determinable direction, comprising: means for transmitting to a flow path at least an optical beam; dither means for oscillating said optical beam across said flow path at a rate that is high in relation to a rate of travel of a particle in said flow path, a particle in said flow path causing a change in extinction in said optical beam when said beam intercepts said particle; sensor means for providing output signals indicative of the extinction of said beam and including a noise cancelling amplifier provided with an input from said transmitting means, whereby said amplifier provides a minimal signal output at times other than when a particle in said flowpath intersects said beam; and processor means for sampling said output signals and deriving an extinction signal profile resulting from a said particle's travel in said flow path.
Claim 13
Dependent Claim
25 words
The apparatus as recited in claim 9 wherein said dither means moves said optical beam at an acute angle with respect to said determinable direction.
Claim 14
Dependent Claim
19 words
The apparatus as recited in claim 10 wherein said acute angle lies in the range of 15° to 20°.
Claim 15
Dependent Claim
29 words
The apparatus as recited in claim 11, wherein said optical beam, at extremities of its cyclic dither travel, defines an inspection volume within which particle positions can be determined
Claim 16
Dependent Claim
33 words
The apparatus as recited in claim 12 wherein said processor means derives said extinction signal profile from samples of said sensor output taken at each extremity of cyclic dither travel of said beam.
Claim 17
Dependent Claim
31 words
The apparatus as recited in claim 13 wherein said processor means employs said derived extinction signal profile to determine an asymmetry value indicative of said particle's position in a flow path.
Claim 18
Dependent Claim
41 words
The apparatus as recited in claim 13 wherein said processor means measures a width characteristic of said derived extinction signal profile and derives therefrom an indication of the position of said particle relative to a focal plane in said flow path.
Claim 19
Dependent Claim
107 words
The apparatus as recited in claim 9 wherein said dither means exhibits a diffraction efficiency characteristic which decreases on either side of a center frequency, a non-particulate artifact in the path of said optical beam causing a center frequency component in said output signal, the combination further comprising: a variable frequency oscillator for energizing said dither means; a feedback circuit responsive to a dither frequency component in said output signals for providing a delayed acting feedback signal to said variable frequency oscillator to vary its frequency about said center frequency, whereby said diffraction efficiency is altered to substantially remove said center frequency component from said output signals.
Claim 20
Dependent Claim
45 words
The apparatus as recited in claim 16 wherein said feedback circuit includes integrating means to provide said delayed-acting feedback signal, whereby said feedback signal is ineffective to alter an output signal from said sensor means that is caused by a particle in said flow path.
Claim 21
Dependent Claim
78 words
The apparatus as recited in claim 17 wherein said feedback circuit further includes: a dither oscillator; a comparison circuit for comparing the phase of said sensor output signals with the phase of said dither oscillator and for providing a correction signal to said integrating means in response to said phase comparison; and summer means for combining outputs from said dither oscillator and integrating means and applying said combined outputs to vary the frequency of said variable frequency oscillator.
Claim 22
Independent Claim
171 words
An apparatus for determining a particle's position in a flow cell, said particle's flow direction path being indeterminate, comprising: means for transmitting to said flow cell, first and second substantially parallel optical beams, said beams being initially mutually coherent but of different polarizations, said beams displaced from each other along an axis, a particle in said cell that intercepts a beam inducing a change in intensity of said beam; dither means for cyclically moving said optical beams across said flow cell in a direction at an angle with respect to said axis; a pair of detector means, one said detector means responsive to said first beam's intensity to produce a first output, and another said detector means responsive to said second beam's intensity to produce a second output; means for combining said first and second outputs to provide a composite signal; and processing means for accumulating composite signals resulting from a particle's interception of said dithered beams to derive a waveform therefrom, and for determining said particle's position from said waveform.
Claim 23
Independent Claim
171 words
An apparatus for determining a particle's position in a flow cell, said particle's flow direction path being indeterminate, comprising: means for transmitting to said flow cell, first and second substantially parallel optical beams, said beams being initially mutually coherent but of different polarizations, said beams displaced from each other along an axis, a particle in said cell that intercepts a beam inducing a change in intensity of said beam; dither means for cyclically moving said optical beams across said flow cell in a direction at an angle with respect to said axis; a pair of detector means, one said detector means responsive to said first beam's intensity to produce a first output, and another said detector means responsive to said second beam's intensity to produce a second output; means for combining said first and second outputs to provide a composite signal; and processing means for accumulating composite signals resulting from a particle's interception of said dithered beams to derive a waveform therefrom, and for determining said particle's position from said waveform.
Claim 24
Dependent Claim
35 words
The apparatus as recited in claim 19 wherein said dither means simultaneously moves both said optical beams reciprocally along said direction so as to cause at least one said beam to intercept a said particle.
Claim 25
Dependent Claim
38 words
The apparatus as recited in claim 20 wherein said beams are displaced along said axis at a distance which enables both said beams to overlap and create a continuous inspection volume as they are moved along said direction.
Claim 26
Independent Claim
114 words
An apparatus for determining a particle's position in a flow cell, said particle's flow direction being indeterminate, comprising: means for transmitting to said flow cell, a coherent optical beam, a particle in said cell that intercepts said beam inducing a change in extinction of said beam; dither means for cyclically moving said optical beam in said flow cell in a pattern that closes upon itself and encompasses an inspection region; detector means responsive to said beam's extinction to produce first output signals; and processing means for accumulating said first output signals resulting from a particle's interception of said dithered beam to derive a waveform therefrom and for determining said particle's position from said waveform.
Claim 27
Independent Claim
114 words
An apparatus for determining a particle's position in a flow cell, said particle's flow direction being indeterminate, comprising: means for transmitting to said flow cell, a coherent optical beam, a particle in said cell that intercepts said beam inducing a change in extinction of said beam; dither means for cyclically moving said optical beam in said flow cell in a pattern that closes upon itself and encompasses an inspection region; detector means responsive to said beam's extinction to produce first output signals; and processing means for accumulating said first output signals resulting from a particle's interception of said dithered beam to derive a waveform therefrom and for determining said particle's position from said waveform.
Claim 28
Dependent Claim
21 words
The apparatus as recited in claim 22 wherein said dither means moves said optical beam in a closed, substantially circular pattern.
Claim 29
Dependent Claim
24 words
The apparatus as recited in claim 23 wherein said dither means moves said optical beam so as to trace a plurality of closed patterns.
Claim 30
Independent Claim
205 words
An apparatus for determining a particle's position in a flow path, comprising: means for transmitting to said flow path, first and second optical beams, said beams being initially mutually coherent but of different polarizations, said second beam offset from said first beam along an axis that intersects said flow path at an acute twist angle, a particle that intersects a beam inducing a change in a said beam; recombining means positioned in a path which said beams take after departing from said flow path, for combining said beams, a change in a said beam causing said combined beam to manifest an elliptical polarization exhibiting first and second polarization axes; detector means for sensing an intensity of one of said polarization axes to provide a signal; and processing means for accumulating said signals resulting from a particle's travel in said flow path past said beams, and for determining an asymmetry value of said signal indicative of said particle s position in said flow path and a further value indicative of said particle's position relative to a focal plane in said flow path, said processor further determining from said values and from stored, allowed off-axis and out-of-focus distances, whether the particle resides in an allowed inspection volume.
Claim 31
Independent Claim
205 words
An apparatus for determining a particle's position in a flow path, comprising: means for transmitting to said flow path, first and second optical beams, said beams being initially mutually coherent but of different polarizations, said second beam offset from said first beam along an axis that intersects said flow path at an acute twist angle, a particle that intersects a beam inducing a change in a said beam; recombining means positioned in a path which said beams take after departing from said flow path, for combining said beams, a change in a said beam causing said combined beam to manifest an elliptical polarization exhibiting first and second polarization axes; detector means for sensing an intensity of one of said polarization axes to provide a signal; and processing means for accumulating said signals resulting from a particle's travel in said flow path past said beams, and for determining an asymmetry value of said signal indicative of said particle s position in said flow path and a further value indicative of said particle's position relative to a focal plane in said flow path, said processor further determining from said values and from stored, allowed off-axis and out-of-focus distances, whether the particle resides in an allowed inspection volume.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-07-28 | 1996-01-27 | 1996-07-28 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-07-28 | 2000-01-27 | 2000-07-28 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-07-28 | 2004-01-27 | 2004-07-28 | $7700.00 | Window Closed / Lapsed |