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Patent US5122737A successfully refreshed from Google Patents.
US5122737A
Expired / Lapsed
US
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Method for photoemission inspection of via studs in integrated circuit packages
Assignee: International Business Machines Corp
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Filing: 1990-06-05
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Granted: 1992-06-16
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Expires: 2010-06-05
Abstract
Abstract This method for photoemission inspection of via studs in integrated circuit packages is based on the large photoemission contrast between the metals used in integrated circuit manufacture and insulating contaminants which may have remained from previous fabrication steps. A light source (27) sheds a beam of photons having energies above the work function of said metals and below the work function of said insulators onto the via connection (18, 19, 24, 25, 26) under inspection. The electrons photoemitted from the metallization are detected by a channelplate detector (28, 29, 31) which is divided into a plurality of identical segments the size of which is chosen smaller than the smallest contaminant expected. An electron gun (34) supplies low-energy electrons for neutralizing charges occurring in the conducting parts on the surface of the integrated circuit package (21) owing to the induced photoemission of electrons from the via connections (18, 19, 24, 25, 26). The output signals from the channelplate detector (28, 29, 31) are compared (32) against pre-stored (33) ideal values representing perfect via connections.
Inventors
- 👤 Rolf Clauberg
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 18:10
CPC Classifications
G; G01; G01R; G01R31/00; G01R31/28; G01R31/302; G01R31/308
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
244 words
A method for photoemission inspection of integrated circuit package comprising at least one lamina, said lamina comprising at least one substrate and having on at least one of its faces a pattern of electrical conductors, and at least one via connection for interconnecting selected conductors arranged on opposite face of said at least one substrate, said method involving the following steps; (a) illuminating of said at least one via connection by a light source, wherein said light source provides a beam of photons having energies above the work function of the metals used for said conductors and below the work function of any insulating materials used in the manufacture of said package, (b) compensating a charge building up on said at least one via connection and associated conductors through the supply of free electrons from an electron gun, (c) detecting photoemission emitted from said package by a detector means, wherein said detector means comprises at least one channelplate divided into segments of a size smaller than the size of a smallest still significant contaminant affecting said at least one via connection, (d) providing a signal evaluator for comparing an output signal from said detector means to a pre-stored reference value representing an ideal all-metal via connection, (e) electronically counting the number of segments yielding less than said pre stored reference value, said said count representing a bad or good via connection is then processed, thereby providing said photoemission inspection of an integrated circuit package.
Claim 2
Independent Claim
244 words
A method for photoemission inspection of integrated circuit package comprising at least one lamina, said lamina comprising at least one substrate and having on at least one of its faces a pattern of electrical conductors, and at least one via connection for interconnecting selected conductors arranged on opposite face of said at least one substrate, said method involving the following steps; (a) illuminating of said at least one via connection by a light source, wherein said light source provides a beam of photons having energies above the work function of the metals used for said conductors and below the work function of any insulating materials used in the manufacture of said package, (b) compensating a charge building up on said at least one via connection and associated conductors through the supply of free electrons from an electron gun, (c) detecting photoemission emitted from said package by a detector means, wherein said detector means comprises at least one channelplate divided into segments of a size smaller than the size of a smallest still significant contaminant affecting said at least one via connection, (d) providing a signal evaluator for comparing an output signal from said detector means to a pre-stored reference value representing an ideal all-metal via connection, (e) electronically counting the number of segments yielding less than said pre stored reference value, said said count representing a bad or good via connection is then processed, thereby providing said photoemission inspection of an integrated circuit package.
Claim 3
Dependent Claim
15 words
The method in accordance with claim 1, wherein said light source is a laser device.
Claim 4
Dependent Claim
31 words
The method in accordance with claim 2, wherein said laser device emits a beam of photons having energies in the order of 5 eV, corresponding to a wavelength of 250 nm.
Claim 5
Dependent Claim
31 words
The method in accordance with claim 1, wherein said beam emitted by said light source is focused so as to permit the inspection of a single via connection at a time.
Claim 6
Dependent Claim
15 words
The method in accordance with claim 4, wherein said light source is a laser device.
Claim 7
Dependent Claim
19 words
The method in accordance with claim 1, wherein at least one channelplate having at least 100 segments is used.
Claim 8
Dependent Claim
14 words
The method in accordance with claim 6, wherein said segments are of equal size.
Claim 9
Dependent Claim
45 words
The method in accordance with claim 1, wherein said charge compensation is performed by an electron gun directing a beam of low-energy electrons onto the surface of the integrated circuit package under inspection so as to generate a cloud of free electrons above said surface.
Claim 10
Dependent Claim
15 words
The method in accordance with claim 1, wherein said channelplate is divided into equal segments.
Claim 11
Independent Claim
250 words
An apparatus for photoemission inspection of integrated circuit package comprising at least one lamina, said lamina comprising at least one substrate and having on at least one of its faces a pattern of electrical conductors, and at least one via connection for interconnecting selected conductors arranged on opposite face of said at least one substrate, said apparatus comprising means for illuminating said at least one via connection by a light source, wherein said light source provides a beam of photons having energies above the work function of the metals used for said conductors and below the work function of any insulating materials used in the manufacture of said package, an electron gun for providing a supply of free electrons in order to compensate a charge that builds up on said at least one via connection and associated conductors, detector means comprises at least one channelplate divided into segments of a size smaller than a size of the smallest still significant contaminant affecting said at least one via connection, said detector means for detecting the light coming from said light source passes through said segmented channelplate a signal evaluator for receiving the output signal from said detector means and for comparing said output signal to a pre-stored reference value representing an ideal all-metal via connection, the number of segments yielding less than said pre-stored reference value is electronically counted, said count representing a bad or good via connection is then processed, thereby providing said photoemission inspection of an integrated circuit package.
Claim 12
Independent Claim
250 words
An apparatus for photoemission inspection of integrated circuit package comprising at least one lamina, said lamina comprising at least one substrate and having on at least one of its faces a pattern of electrical conductors, and at least one via connection for interconnecting selected conductors arranged on opposite face of said at least one substrate, said apparatus comprising means for illuminating said at least one via connection by a light source, wherein said light source provides a beam of photons having energies above the work function of the metals used for said conductors and below the work function of any insulating materials used in the manufacture of said package, an electron gun for providing a supply of free electrons in order to compensate a charge that builds up on said at least one via connection and associated conductors, detector means comprises at least one channelplate divided into segments of a size smaller than a size of the smallest still significant contaminant affecting said at least one via connection, said detector means for detecting the light coming from said light source passes through said segmented channelplate a signal evaluator for receiving the output signal from said detector means and for comparing said output signal to a pre-stored reference value representing an ideal all-metal via connection, the number of segments yielding less than said pre-stored reference value is electronically counted, said count representing a bad or good via connection is then processed, thereby providing said photoemission inspection of an integrated circuit package.
Claim 13
Dependent Claim
14 words
The apparatus according to claim 10, wherein said light source is a laser device.
Claim 14
Dependent Claim
30 words
The apparatus according to claim 11, wherein said laser device emits a beam of photons having energies in the order of 5 eV, corresponding to a wavelength of 250 nm.
Claim 15
Dependent Claim
30 words
The apparatus according to claim 10, wherein said beam emitted by said light source is focused so as to permit the inspection of a single via connection at a time.
Claim 16
Dependent Claim
14 words
The apparatus according to claim 13, wherein said light source is a laser device.
Claim 17
Dependent Claim
18 words
The apparatus according to claim 10, wherein at least one channelplate having at least 100 segments is used.
Claim 18
Dependent Claim
13 words
The apparatus according to claim 15, wherein said segments are of equal size.
Claim 19
Dependent Claim
44 words
The apparatus according to claim 10, wherein said charge compensation is performed by an electron gun directing a beam of low-energy electrons onto the surface of the integrated circuit package under inspection so as to generate a cloud of free electrons above said surface.
Claim 20
Dependent Claim
14 words
The apparatus according to claim 10, wherein said channelplate is divided into equal segments.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1995-06-16 | 1995-12-16 | 1996-06-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-06-16 | 1999-12-16 | 2000-06-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-06-16 | 2003-12-16 | 2004-06-16 | $7700.00 | Window Closed / Lapsed |