US5122249A
Expired / Lapsed
US
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Method of producing a cover layer of amorphous carbon on a substrate
Assignee: Licentia Patent Verwaltungs GmbH
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Filing: 1989-06-26
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Granted: 1992-06-16
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Expires: 2009-06-26
Abstract
Abstract A method of providing an amorphous carbon cover layer on an electrophotographic recording material, including the steps of (a) providing a substrate which is an electrophotographic recording material, (b) maintaining the substrate in an atmosphere comprised of argon, hydrogen, and C 2 F 6 , and (c) simultaneously with step (b), depositing amorphous fluorinated, hydrogenated carbon on the substrate by direct current magnetron cathode sputtering of glasslike carbon to provide an amorphous carbon cover layer which is transparent, hydrophobic, and has a Vickers hardness of greater than 2000.
Inventors
- 👤 Ekkehard Niemann
- 👤 Roland Herkert
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 15:36
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/06
Claims Analysis
Total Claims: 12
Claim 1
Independent Claim
88 words
A method of providing an amorphous carbon cover layer on an electrophotographic recording material, comprising the steps of: (a) providing a substrate which is an electrophotograhpic recording material; (b) maintaining the substrate in an atmosphere comprised of argon, hydrogen, and C 2 F 6 ; and (c) simultaneously with step (b), depositing amorphous fluorinated, hydrogenated carbon on the substrate by direct current magnetron cathode sputtering of glass-like carbon to provide an amorphous carbon cover layer which is transparent, hydrophobic, and has a Vickers hardness of greater than 2000.
Claim 2
Independent Claim
88 words
A method of providing an amorphous carbon cover layer on an electrophotographic recording material, comprising the steps of: (a) providing a substrate which is an electrophotograhpic recording material; (b) maintaining the substrate in an atmosphere comprised of argon, hydrogen, and C 2 F 6 ; and (c) simultaneously with step (b), depositing amorphous fluorinated, hydrogenated carbon on the substrate by direct current magnetron cathode sputtering of glass-like carbon to provide an amorphous carbon cover layer which is transparent, hydrophobic, and has a Vickers hardness of greater than 2000.
Claim 3
Dependent Claim
28 words
The method as defined in claim 1, wherein the glass-like carbon has an apparent specific weight of 1.5 to 1.55 g/cm 3 and a porosity of about 0%.
Claim 4
Dependent Claim
41 words
The method as defined in claim 1, wherein the glass-like carbon has an ash content of less than 400 ppm, a sulfur content of not more than about 50 ppm, and a boron content of not more than about 2 ppm.
Claim 5
Dependent Claim
56 words
The method as defined in claim 1, wherein the glass-like carbon has a bending strength ranging from 600 to 1000 deca N/cm 2 , a crushing strength ranging from 1500 to 3000 deca N/cm 2 , a Shore hardness ranging from 120 to 125 and a Vickers microhardness at 0.3 N ranging from 150 to 225.
Claim 6
Dependent Claim
27 words
The method as defined in claim 1, wherein the glass-like carbon has a coefficient of thermal expansion of about 3.2×10 -6 per ° C. at 100° C.
Claim 7
Dependent Claim
30 words
The method as defined in claim 1, wherein the glass-like carbon has a specific electrical conductivity ranging from 2.2×10 2 Ω-1 cm -1 to 1.8×10 2 Ω-1 cm -1 .
Claim 8
Dependent Claim
14 words
The method as defined in claim 1, wherein said atmosphere further comprises doping gas.
Claim 9
Dependent Claim
24 words
The method as defined in claim 7, wherein the doping gas is phosphine (PH 3 ), whereby the cover layer is an n-conductive material.
Claim 10
Dependent Claim
40 words
The method as defined in claim 7, wherein the doping gas is selected from the group consisting of diborane (B 2 H 6 ) and trimethyl gallium (Ga(CH 3 ) 3 ), whereby the cover layer is a p-conductive material.
Claim 11
Dependent Claim
30 words
The method as defined in claim 1, wherein the step of maintaining the substrate in an atmosphere, step (b), includes providing a hydrogen influx rate of at least 1 sccm.
Claim 12
Dependent Claim
26 words
The method as defined in claim 1, wherein the electrophotographic recording material is comprised of a substance selected from the group consisting of silicon and selenium.
References Cited (Backward Citations)
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US4612100A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-06-16 | 1995-12-16 | 1996-06-16 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-06-16 | 1999-12-16 | 2000-06-16 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-06-16 | 2003-12-16 | 2004-06-16 | $7700.00 | Window Closed / Lapsed |