Patent US5121256A successfully refreshed from Google Patents.
US5121256A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Lithography system employing a solid immersion lens
Assignee: Leland Stanford Junior University
•
Filing: 1991-03-14
•
Granted: 1992-06-09
•
Expires: 2011-03-14
Abstract
Abstract A lithography system employing a solid immersion lens having a spherical surface to enhance its resolution is disclosed.
Inventors
- 👤 Timothy R. Corle
- 👤 Gordon S. Kino
- 👤 Scott M. Mansfield
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 19:41
CPC Classifications
G; G02; G02B; G02B7/00; G02B7/02; G02B7/026; B; B82; B82Y; B82Y10/00; G03; G03F; G03F7/00; G03F7/70; G03F7/70058; G03F7/70075; G03F7/70216; G03F7/70241; G03F7/70325; G03F7/70341; G03F7/70358; G03F7/70366; G03F7/708; G03F7/70808; G03F7/70825
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
66 words
In a lithography system of the type which includes a lens system for imaging a mask onto a sample, the improvement comprising placing a solid immersion lens placed closely adjacent to the sample, said solid immersion lens being constructed of a material having a high refractive index and shaped with a spherical surface facing said lens system and a flat front surface adjacent to said sample.
Claim 2
Dependent Claim
66 words
In a lithography system of the type which includes a lens system for imaging a mask onto a sample, the improvement comprising placing a solid immersion lens placed closely adjacent to the sample, said solid immersion lens being constructed of a material having a high refractive index and shaped with a spherical surface facing said lens system and a flat front surface adjacent to said sample.
Claim 3
Dependent Claim
28 words
The improvement in claim 1 in which said lens system includes an objective lens and the solid immersion lens is placed between the objective lens and the sample.
Claim 4
Dependent Claim
42 words
The improvement in claim 1 in which the solid immersion lens is mounted for vertical movement and said lens and sample are rapidly moved relative to each other whereby the solid immersion lens is spaced from the sample by an air bearing.
Claim 5
Dependent Claim
48 words
The improvement in claim 1 including a light source for establishing an interference pattern between light reflected from the flat surface of the solid immersion lens and the sample and means responsive to the interference pattern for controlling the spacing between the solid immersion lens and the sample.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-06-09 | 1995-12-09 | 1996-06-09 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-06-09 | 1999-12-09 | 2000-06-09 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-06-09 | 2003-12-09 | 2004-06-09 | $7700.00 | Window Closed / Lapsed |