US5117272A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Having a protective film of a polymer having a fluorine-containing aliphatic cyclic structure
Assignee: UMC Japan Co Ltd
•
Filing: 1990-04-16
•
Granted: 1992-05-26
•
Expires: 2010-04-16
Abstract
Abstract A semiconductor integrated circuit device having a protective film made of a polymer having a fluorine-containing aliphatic cyclic structure.
Inventors
- 👤 Shinzou Nomura
- 👤 Hiroshi Katsushima
- 👤 Toru Kawasaki
- 👤 Masao Unoki
- 👤 Masaru Nakamura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 10:56
CPC Classifications
H; H10; H10W; H10W74/00; H10W74/40; H10W42/00; H10W42/20; H10W42/25
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
32 words
A semiconductor integrated circuit device having a protective film made of a polymer having as part of its molecular structure a fluorine-containing aliphatic cyclic structure obtained by cyclic polymerization or radical polymerization.
Claim 2
Dependent Claim
32 words
A semiconductor integrated circuit device having a protective film made of a polymer having as part of its molecular structure a fluorine-containing aliphatic cyclic structure obtained by cyclic polymerization or radical polymerization.
Claim 3
Dependent Claim
27 words
The semiconductor integrated circuit device according to claim 1, wherein the polymer is a polymer having the cyclic structure in its main chain, obtained by cyclic polymerization.
Claim 4
Dependent Claim
42 words
The semiconductor integrated circuit device according to claim 1, wherein the polymer is a polymer having the cyclic structure in its main chain, obtained by cyclic polymerization of a monomer having two carbon-carbon multiple bonds differing in the polymerizability in its molecule.
Claim 5
Dependent Claim
35 words
The semiconductor integrated circuit device according to claim 3, wherein the monomer is one having a straight chain portion of a linking chain connecting the two carbon-carbon multiple bonds of from 2 to 7 atoms.
Claim 6
Dependent Claim
47 words
The semiconductor integrated circuit device according to claim 1, wherein the polymer is a polymer having the cyclic structure in its main chain, obtained by cyclic polymerization of at least one monomer selected from the group consisting of a perfluoroallyl vinyl ether and a perfluorobutenyl vinyl ether.
Claim 7
Dependent Claim
31 words
The semiconductor integrated circuit device according to claim 1, wherein the polymer is a polymer having the cyclic structure in its main chain, obtained by radical polymerization of a cyclic monomer.
Claim 8
Dependent Claim
29 words
The semiconductor integrated circuit device according to claim 1, wherein the polymer is a polymer having the cyclic structure in its main chain, obtained by radical polymerization of perfluoro-2,2-dimethyl-1,3-dioxol.
Claim 9
Dependent Claim
25 words
The semiconductor integrated circuit device according to claim 1, wherein the polymer is a polymer having a fluorine content of at least 30% by weight.
Claim 10
Dependent Claim
25 words
The semiconductor integrated circuit device according to claim 1, wherein the polymer is a polymer containing at least 20 mol % of the cyclic structure.
Claim 11
Dependent Claim
58 words
A semiconductor integrated circuit device having a protective film according to claim 1, wherein the fluorine-containing aliphatic cyclic structure is of the formula ##STR12## wherein l is from 0 to 5, m is from 0 to 4, n is 0 or 1, provided that l+m+n is from 1 to 6, and R is F or CF 3 .
Claim 12
Dependent Claim
43 words
A semiconductor integrated circuit device having a protective film according to claim 1, wherein the fluorine-containing aliphatic cyclic structure is of the formula ##STR13## wherein each of o, p and q is from 0 to 5, provided o+p+q is from 1 to 6.
Claim 13
Dependent Claim
43 words
, A semiconductor integrated circuit device having a protective film according to claim 1, wherein the fluorine-containing aliphatic cyclic structure is of the formula ##STR14## wherein R 1 if F or CF 3 , and R 2 is F or CF 3 .
Claim 14
Dependent Claim
24 words
A semiconductor integrated circuit device having a protective film according to claim 1, wherein the fluorine-containing aliphatic cyclic structure is of the formula ##STR15##
Claim 15
Dependent Claim
24 words
A semiconductor integrated circuit device having a protective film according to claim 1, wherein the fluorine-containing aliphatic cyclic structure is of the formula ##STR16##
Claim 16
Dependent Claim
24 words
A semiconductor integrated circuit device having a protective film according to claim 1, wherein the fluorine-containing aliphatic cyclic structure is of the formula ##STR17##
Claim 17
Dependent Claim
24 words
A semiconductor integrated circuit device having a protective film according to claim 1, wherein the fluorine-containing aliphatic cyclic structure is of the formula ##STR18##
Claim 18
Dependent Claim
24 words
A semiconductor integrated circuit device having a protective film according to claim 1, wherein the fluorine-containing aliphatic cyclic structure is of the formula ##STR19##
Claim 19
Dependent Claim
24 words
A semiconductor integrated circuit device having a protective film according to claim 1, wherein the fluorine-containing aliphatic cyclic structure is of the formula ##STR20##
Claim 20
Dependent Claim
24 words
A semiconductor integrated circuit device having a protective film according to claim 1, wherein the fluorine-containing aliphatic cyclic structure is of the formula ##STR21##
Claim 21
Dependent Claim
24 words
A semiconductor integrated circuit device having a protective film according to claim 1, wherein the fluorine-containing aliphatic cyclic structure is of the formula ##STR22##
Claim 22
Dependent Claim
24 words
A semiconductor integrated circuit device having a protective film according to claim 1, wherein the fluorine-containing aliphatic cyclic structure is of the formula ##STR23##
Claim 23
Dependent Claim
24 words
A semiconductor integrated circuit device having a protective film according to claim 1, wherein the fluorine-containing aliphatic cyclic structure is of the formula ##STR24##
Claim 24
Dependent Claim
24 words
A semiconductor integrated circuit device having a protective film according to claim 1, wherein the fluorine-containing aliphatic cyclic structure is of the formula ##STR25##
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GB2097999A
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JPS61154151A
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JPS62177950A
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US4977199A
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US4933305A
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JPS6475575A
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US4980268A
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