Patent US5116250A successfully refreshed from Google Patents.
US5116250A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for applying a coating material to a substrate
Assignee: Tokyo Ohka Kogyo Co Ltd
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Filing: 1988-09-19
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Granted: 1992-05-26
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Expires: 2008-09-19
Abstract
Abstract A coating apparatus comprises a spinning chuck rotatably supported within an enclosure and securely holding a substrate thereon. A coating material is applied onto the surface of the substrate and distributed over the substrate by centrifugal forces. An annular air duct is disposed in surrounding and spaced relation to the spinning chuck, and a disk is placed between the air duct and the spinning chuck and has a plurality of guide vanes. Fans are provided in the air duct to develop a positive flow of air over the substrate. The flow of air is guided by the guide vanes in a direction identical to the direction of rotation of the substrate so as to eliminate undesirable deposition from the end edges of the substrate.
Inventors
- 👤 Hiroyoshi Sago
- 👤 Hideyuki Mizuki
- 👤 Katsuhiko Kudo
- 👤 Muneo Nakayama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 02:56
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0448
Claims Analysis
Total Claims: 5
Claim 1
Independent Claim
117 words
An apparatus for applying a coating material to a substrate, comprising: an enclosure; a spinning chuck rotatably supported within the enclosure and having a vacuum table on which a substrate is securely held; means for applying a coating material onto a surface of the substrate; means for developing a flow of air over the substrate; and means for guiding said flow of air in a direction identical to the direction of rotation of the substrate, said guiding means including an annular air duct disposed in surrounding and spaced relation to the spinning chuck and having outlets, and a fixed disk disposed between the air duct and the spinning chuck and having a plurality of guide vanes thereon.
Claim 2
Independent Claim
117 words
An apparatus for applying a coating material to a substrate, comprising: an enclosure; a spinning chuck rotatably supported within the enclosure and having a vacuum table on which a substrate is securely held; means for applying a coating material onto a surface of the substrate; means for developing a flow of air over the substrate; and means for guiding said flow of air in a direction identical to the direction of rotation of the substrate, said guiding means including an annular air duct disposed in surrounding and spaced relation to the spinning chuck and having outlets, and a fixed disk disposed between the air duct and the spinning chuck and having a plurality of guide vanes thereon.
Claim 3
Dependent Claim
23 words
The apparatus of claim 1, wherein said air flow developing means includes fans mounted within the air duct adjacent to said outlets thereof.
Claim 4
Dependent Claim
37 words
The apparatus of claim 1, wherein said air flow developing means includes a vacuum system having vacuum lines, each vacuum line being adapted to connect one of said outlets of the air duct with a vacuum source.
Claim 5
Dependent Claim
18 words
The apparatus of claim 1, wherein said guide vanes extend in a direction tangentially of the vacuum table.
References Cited (Backward Citations)
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Cited
JPS5376748A
Cited
JPS5544780A
Cited
US4528934A
Cited
US4510176A
Cited
US4587139A
Cited
US4790262A
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-05-26 | 1995-11-25 | 1996-05-26 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-05-26 | 1999-11-25 | 2000-05-26 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-05-26 | 2003-11-25 | 2004-05-26 | $7700.00 | Window Closed / Lapsed |