US5114876A
Expired / Lapsed
US
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Selective epitaxy using the gild process
Assignee: Lawrence Livermore National Security LLC
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Filing: 1990-12-07
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Granted: 1992-05-19
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Expires: 2010-12-07
Abstract
Abstract The present invention comprises a method of selective epitaxy on a semiconductor substrate. The present invention provides a method of selectively forming high quality, thin GeSi layers in a silicon circuit, and a method for fabricating smaller semiconductor chips with a greater yield (more error free chips) at a lower cost. The method comprises forming an upper layer over a substrate, and depositing a reflectivity mask which is then removed over selected sections. Using a laser to melt the unmasked sections of the upper layer, the semiconductor material in the upper layer is heated and diffused into the substrate semiconductor material. By varying the amount of laser radiation, the epitaxial layer is formed to a controlled depth which may be very thin. When cooled, a single crystal epitaxial layer is formed over the patterned substrate. The present invention provides the ability to selectively grow layers of mixed semiconductors over patterned substrates such as a layer of Ge x Si 1-x grown over silicon. Such a process may be used to manufacture small transistors that have a narrow base, heavy doping, and high gain. The narrowness allows a faster transistor, and the heavy doping reduces the resistance of the narrow layer. The process does not require high temperature annealing; therefore materials such as aluminum can be used. Furthermore, the process may be used to fabricate diodes that have a high reverse breakdown voltage and a low reverse leakage current.
Inventors
- 👤 Kurt H. Weiner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 05:05
CPC Classifications
H; H10; H10P; H10P14/00; H10P14/20; H10P14/29; H10P14/2901; H10P14/2902; H10P14/2905; H10P14/24; H10P14/27; H10P14/271; H10P14/2907; H10P14/2911; H10P14/34; H10P14/3402; H10P14/3404; H10P14/3411; H10P14/3414; H10P14/3421; Y; Y10; Y10S; Y10S148/00; Y10S148/105; Y10S148/106
Claims Analysis
Total Claims: 23
Claim 1
Independent Claim
143 words
A method of selective epitaxy on a semiconductor substrate, said method comprising: a. providing a crystalline semiconductor substrate; b. forming an oxide layer on the substrate; c. depositing a reflectivity mask over the oxide layer; d. removing a selected portion of the reflectivity mask and the oxide layer in a selective epitaxy region, thereby uncovering the substrate in the selective epitaxy region; e. depositing an upper layer over the substrate in the selective epitaxy region and adjacent portions of the reflectivity mask; f. applying laser radiation, so that a molten region is formed in the selective epitaxial region, the molten region comprising the material in the upper layer and the substrate; and, g. cooling the resulting structure so that the molten region solidifies to form a crystalline epitaxial section that comprises a mixture of the material in the upper layer and the substrate.
Claim 2
Independent Claim
143 words
A method of selective epitaxy on a semiconductor substrate, said method comprising: a. providing a crystalline semiconductor substrate; b. forming an oxide layer on the substrate; c. depositing a reflectivity mask over the oxide layer; d. removing a selected portion of the reflectivity mask and the oxide layer in a selective epitaxy region, thereby uncovering the substrate in the selective epitaxy region; e. depositing an upper layer over the substrate in the selective epitaxy region and adjacent portions of the reflectivity mask; f. applying laser radiation, so that a molten region is formed in the selective epitaxial region, the molten region comprising the material in the upper layer and the substrate; and, g. cooling the resulting structure so that the molten region solidifies to form a crystalline epitaxial section that comprises a mixture of the material in the upper layer and the substrate.
Claim 3
Dependent Claim
17 words
The method as claimed in claim 1, further comprising an additional step (i), removing the reflectivity layer.
Claim 4
Dependent Claim
15 words
The method as claimed in claim 1, wherein the upper layer comprises a semiconductor material.
Claim 5
Dependent Claim
21 words
The method as claimed in claim 3, wherein in the step (f), a dopant gas is diffused into the molten region.
Claim 6
Dependent Claim
15 words
The method as claimed in claim 3, wherein the upper layer further comprises a dopant.
Claim 7
Independent Claim
153 words
A method of selective epitaxy on a semiconductor substrate, said method comprising: a. providing a crystalline semiconductor substrate; b. forming an oxide layer on the substrate; c. depositing a metal reflectivity mask over the oxide layer; d. removing a selected portion of the reflectivity mask and the oxide layer in a selective epitaxy region, thereby uncovering the substrate in the selective epitaxy region; e. depositing an upper layer over the substrate in the selective epitaxy region and adjacent portions of the reflectivity mask, said upper layer comprising a semiconductor material; f. applying laser radiation, so that a molten region is formed in the selective epitaxial region, the molten region mixing the semiconductor material in the upper layer with the substrate; and, g. cooling the resulting structure so that the molten region solidifies to form a crystalline epitaxial section that comprises a mixture of the semiconductor material in the upper layer and the substrate.
Claim 8
Independent Claim
153 words
A method of selective epitaxy on a semiconductor substrate, said method comprising: a. providing a crystalline semiconductor substrate; b. forming an oxide layer on the substrate; c. depositing a metal reflectivity mask over the oxide layer; d. removing a selected portion of the reflectivity mask and the oxide layer in a selective epitaxy region, thereby uncovering the substrate in the selective epitaxy region; e. depositing an upper layer over the substrate in the selective epitaxy region and adjacent portions of the reflectivity mask, said upper layer comprising a semiconductor material; f. applying laser radiation, so that a molten region is formed in the selective epitaxial region, the molten region mixing the semiconductor material in the upper layer with the substrate; and, g. cooling the resulting structure so that the molten region solidifies to form a crystalline epitaxial section that comprises a mixture of the semiconductor material in the upper layer and the substrate.
Claim 9
Dependent Claim
13 words
The method as claimed in claim 6, wherein the reflectivity layer comprises aluminum.
Claim 10
Dependent Claim
12 words
The method as claimed in claim 6, wherein the substrate comprises silicon.
Claim 11
Dependent Claim
13 words
The method as claimed in claim 8, wherein the upper layer comprises germanium.
Claim 12
Dependent Claim
13 words
The method as claimed in claim 8, wherein the upper layer comprises silicon.
Claim 13
Dependent Claim
13 words
The method as claimed in claim 6, wherein the substrate comprises gallium arsenide.
Claim 14
Dependent Claim
13 words
The method as claimed in claim 11, wherein the upper layer comprises indium.
Claim 15
Dependent Claim
14 words
The method as claimed in claim 11, wherein the upper layer comprises gallium arsenide.
Claim 16
Independent Claim
164 words
A method of selective epitaxy on a semiconductor substrate, said method comprising: a. providing a crystalline semiconductor substrate; b. forming an oxide layer on the substrate; c. depositing a metal reflectivity mask over the oxide layer; d. removing a selected portion of the reflectivity mask and the oxide layer in a selective epitaxy region, thereby uncovering the substrate in the selective epitaxy region; e. depositing an upper layer over the substrate in the selective epitaxy region and adjacent portions of the reflectivity mask, said upper layer comprising a semiconductor material; f. applying laser radiation, so that a molten region is formed in the selective epitaxial region, the molten region mixing the semiconductor material in the upper layer with the substrate; g. diffusing a dopant gas into the molten region; and, h. cooling the resulting structure so that the molten region solidifies to form a crystalline epitaxial section that comprises a mixture of the semiconductor material in the upper layer, the dopant, and the substrate.
Claim 17
Independent Claim
164 words
A method of selective epitaxy on a semiconductor substrate, said method comprising: a. providing a crystalline semiconductor substrate; b. forming an oxide layer on the substrate; c. depositing a metal reflectivity mask over the oxide layer; d. removing a selected portion of the reflectivity mask and the oxide layer in a selective epitaxy region, thereby uncovering the substrate in the selective epitaxy region; e. depositing an upper layer over the substrate in the selective epitaxy region and adjacent portions of the reflectivity mask, said upper layer comprising a semiconductor material; f. applying laser radiation, so that a molten region is formed in the selective epitaxial region, the molten region mixing the semiconductor material in the upper layer with the substrate; g. diffusing a dopant gas into the molten region; and, h. cooling the resulting structure so that the molten region solidifies to form a crystalline epitaxial section that comprises a mixture of the semiconductor material in the upper layer, the dopant, and the substrate.
Claim 18
Dependent Claim
13 words
The method as claimed in claim 14, wherein the reflectivity layer comprises aluminum.
Claim 19
Dependent Claim
12 words
The method as claimed in claim 14, wherein the substrate comprises silicon.
Claim 20
Dependent Claim
13 words
The method as claimed in claim 16, wherein the upper layer comprises germanium.
Claim 21
Dependent Claim
13 words
The method as claimed in claim 14, wherein the substrate comprises gallium arsenide.
Claim 22
Dependent Claim
13 words
The method as claimed in claim 18, wherein the upper layer comprises indium.
Claim 23
Dependent Claim
14 words
The method as claimed in claim 18, wherein the upper layer comprises gallium arsenide.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1995-05-19 | 1995-11-18 | 1996-05-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-05-19 | 1999-11-18 | 2000-05-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-05-19 | 2003-11-18 | 2004-05-19 | $7700.00 | Window Closed / Lapsed |