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US5114875A
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Planar dielectric isolated wafer
Assignee: Motorola Solutions Inc
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Filing: 1991-05-24
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Granted: 1992-05-19
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Expires: 2011-05-24
Abstract
Abstract A substantially planar dielectric wafer is formed by utilizing a polysilicon filler to remove surface irregularities (15, 15'). The polysilicon filler is formed by filling surface irregularities (15, 15') with polysilicon (19) and polishing the polysilicon (19) to form a substantially planar surface. A polishing stop (18) terminates the polishing and prevents damage to the wafer's isolated tubs (13). The polishing stop (18) can also be used as a mask during field oxide growth. The polysilicon filler also protects underlying areas (12) from subsequent etch operations. During subsequent field oxide growth, polysilicon layer (19) is converted to silicon dioxide which enhances dielectric isolation of each tub (13).
Inventors
- 👤 Thomas R. Baker
- 👤 Bernard W. Boland
- 👤 David A. Shumate
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 11:55
CPC Classifications
H; H10; H10P; H10P95/00; H10P95/06; H10P95/062; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/019; H10W10/10; Y; Y10; Y10S; Y10S438/00; Y10S438/969; Y10S438/977
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
154 words
A method of planarizing a dielectric isolated wafer which improves continuity of a conductor on the dielectric isolated wafer which comprises: providing a polysilicon substrate having a plurality of single crystal silicon tubs in a surface of the substrate with each tub electrically isolated from the substrate by a dielectric liner, a single crystal epitaxial layer covering each tub, a polysilicon epitaxial layer covering the polysilicon substrate, and an interface trough between the single crystal epitaxial layer and the polysilicon epitaxial layer wherein the interface trough exposes a surface of the dielectric liner; covering at least a portion of each tub with a stress relief layer; covering the stress relief layer with a polishing stop; depositing a layer of polysilicon covering the polishing stop, the interface trough, and at least a portion of the polysilicon epitaxial layer; and planarizing the polysilicon layer by polishing the polysilicon layer until the polishing stop terminates the polishing.
Claim 2
Independent Claim
154 words
A method of planarizing a dielectric isolated wafer which improves continuity of a conductor on the dielectric isolated wafer which comprises: providing a polysilicon substrate having a plurality of single crystal silicon tubs in a surface of the substrate with each tub electrically isolated from the substrate by a dielectric liner, a single crystal epitaxial layer covering each tub, a polysilicon epitaxial layer covering the polysilicon substrate, and an interface trough between the single crystal epitaxial layer and the polysilicon epitaxial layer wherein the interface trough exposes a surface of the dielectric liner; covering at least a portion of each tub with a stress relief layer; covering the stress relief layer with a polishing stop; depositing a layer of polysilicon covering the polishing stop, the interface trough, and at least a portion of the polysilicon epitaxial layer; and planarizing the polysilicon layer by polishing the polysilicon layer until the polishing stop terminates the polishing.
Claim 3
Dependent Claim
32 words
The method of claim 1 further including converting at least the polysilicon layer and a portion of the tub not covered by the polishing stop to silicon dioxide by oxidizing the wafer.
Claim 4
Dependent Claim
38 words
The method of claim 1 wherein depositing the layer of polysilicon includes depositing the layer of polysilicon having a thickness that is greater than a distance between the exposed surface of the dielectric liner and the polishing stop.
Claim 5
Dependent Claim
33 words
The method of claim 1 wherein the covering at least the portion of each tub with the stress relief layer step includes covering the portion of each tub with a silicon dioxide layer.
Claim 6
Dependent Claim
27 words
The method of claim 1 wherein covering the stress relief layer with the polishing stop includes covering the stress relief layer with a layer of silicon nitride.
Claim 7
Dependent Claim
17 words
The method of claim 1 including providing the dielectric liner with a thickness of approximately one microns.
Claim 8
Independent Claim
102 words
A method of planarizing a dielectric isolated wafer which comprises: providing a plurality of single crystal silicon tubs in a surface of a polysilicon substrate with each tub electrically isolated from the substrate by a dielectric liner wherein an interface trough that is located in the wafer surface between each single crystal silicon tub and the substrate exposes a surface of the dielectric liner; covering at least a portion of each tub with a layer of silicon dioxide; depositing a layer of polysilicon covering at least the silicon dioxide and the exposed surface of the dielectric liner; and planarizing the polysilicon layer.
Claim 9
Independent Claim
102 words
A method of planarizing a dielectric isolated wafer which comprises: providing a plurality of single crystal silicon tubs in a surface of a polysilicon substrate with each tub electrically isolated from the substrate by a dielectric liner wherein an interface trough that is located in the wafer surface between each single crystal silicon tub and the substrate exposes a surface of the dielectric liner; covering at least a portion of each tub with a layer of silicon dioxide; depositing a layer of polysilicon covering at least the silicon dioxide and the exposed surface of the dielectric liner; and planarizing the polysilicon layer.
Claim 10
Dependent Claim
31 words
The method of claim 7 further including removing the polysilicon and the silicon dioxide covering an active area of each tub, and covering the active area with a silicon nitride layer.
Claim 11
Dependent Claim
23 words
The method of claim 7 wherein planarizing the polysilicon layer includes planarizing the polysilicon by etching the polysilicon with a reactive ion etch.
Claim 12
Dependent Claim
19 words
The method of claim 7 wherein planarizing the polysilicon layer includes etching the polysilicon with a wet chemical etch.
Claim 13
Dependent Claim
22 words
The method of claim 7 further including covering the silicon dioxide with a polishing stop prior to depositing the layer of polysilicon.
Claim 14
Independent Claim
117 words
A method of planarizing a dielectric isolated wafer comprising: providing a plurality of active areas that are formed in a substrate and that are electrically isolated from the substrate by a dielectric wherein an interface through exists between each active area and the substrate; covering the trough and at least a portion of each active area with a thin stress relief layer; covering the thin stress relief layer and any exposed portions of the substrate with a planarizing layer; and removing a portion of an exposed surface of the planarizing layer and leaving a portion of the planarizing layer covering the stress relief layer that is in the trough in order to form a substantially planar surface.
Claim 15
Independent Claim
117 words
A method of planarizing a dielectric isolated wafer comprising: providing a plurality of active areas that are formed in a substrate and that are electrically isolated from the substrate by a dielectric wherein an interface through exists between each active area and the substrate; covering the trough and at least a portion of each active area with a thin stress relief layer; covering the thin stress relief layer and any exposed portions of the substrate with a planarizing layer; and removing a portion of an exposed surface of the planarizing layer and leaving a portion of the planarizing layer covering the stress relief layer that is in the trough in order to form a substantially planar surface.
Claim 16
Independent Claim
91 words
A method of planarizing a dielectric isolated wafer comprising: providing a plurality of active areas that are formed in a substrate with each active area electrically isolated from the substrate by a dielectric wherein an interface trough exists between each active area and the substrate; covering the trough, and at least a portion of the substrate with a layer of polysilicon; and removing a portion of an exposed surface of the polysilicon layer and leaving a portion of the polysilicon in the trough in order to form a substantially planar surface.
Claim 17
Independent Claim
91 words
A method of planarizing a dielectric isolated wafer comprising: providing a plurality of active areas that are formed in a substrate with each active area electrically isolated from the substrate by a dielectric wherein an interface trough exists between each active area and the substrate; covering the trough, and at least a portion of the substrate with a layer of polysilicon; and removing a portion of an exposed surface of the polysilicon layer and leaving a portion of the polysilicon in the trough in order to form a substantially planar surface.
Claim 18
Dependent Claim
27 words
The method of claim 13 further including covering at least a portion of the active area with a polishing stop prior to the covering the trough step.
Claim 19
Dependent Claim
46 words
The method of claim 14 wherein covering at least the portion of the active area with the polishing stop includes covering at least the portion of the active area with a layer of silicon dioxide and covering the silicon dioxide with a layer of silicon nitride.
Claim 20
Dependent Claim
37 words
The method of claim 14 wherein the removing the portion of the exposed surface of the polysilicon layer step includes using a chemical/mechanical wafer polishing procedure wherein the wafer polishing is terminated by exposing the polishing stop.
Claim 21
Dependent Claim
29 words
The method of claim 14 further including forming a field oxide by oxidizing the polysilicon layer and any portion of the active area not covered by the polishing stop.
Claim 22
Dependent Claim
17 words
The method of claim 17 wherein oxidizing the polysilicon layer includes performing a high pressure oxidation procedure.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-05-19 | 1995-11-18 | 1996-05-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-05-19 | 1999-11-18 | 2000-05-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-05-19 | 2003-11-18 | 2004-05-19 | $7700.00 | Window Closed / Lapsed |