Patent US5111003A successfully refreshed from Google Patents.
US5111003A
Expired / Lapsed
US
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Multilayer wiring substrate
Assignee: NEC Corp
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Filing: 1991-03-06
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Granted: 1992-05-05
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Expires: 2011-03-06
Abstract
Abstract A multilayer wiring substrate which includes a glass ceramic section, a wiring layer section having a plurality of wiring layers electrically insulated from each other by a polyimide material, and an intermediate layer made of an inorganic material and arranged between the ceramic section and the wiring layer section. 8
Inventors
- 👤 Kohji Kimbara
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 13:31
CPC Classifications
H; H01; H01F; H01F17/00; H01F17/0006; H01F17/0013; H05; H05K; H05K3/00; H05K3/46; H05K3/4602; H05K3/4605; H05K1/00; H05K1/02; H05K1/03; H05K1/0306; H05K1/0313; H05K1/032; H05K1/0346; H05K2201/00; H05K2201/01; H05K2201/0137; H05K2201/0154; H05K2201/0179; H05K2203/00; H05K2203/15; H05K2203/1581; H05K3/38; H05K3/388; H05K3/4644; H05K3/467; Y; Y10; Y10T; Y10T428/00; Y10T428/12; Y10T428/12493; Y10T428/12535; Y10T428/12556; Y10T428/12583; Y10T428/12771; Y10T428/12861; Y10T428/12875; Y10T428/12889; Y10T428/24; Y10T428/24802; Y10T428/24851; Y10T428/24917; Y10T428/24926; Y10T428/31504; Y10T428/31551; Y10T428/31609; Y10T428/31612; Y10T428/31623; Y10T428/31678; Y10T428/31681; Y10T428/31721; Y10T428/31725; Y10T428/31765
Claims Analysis
Total Claims: 14
Claim 1
Independent Claim
106 words
A multilayer wiring substrate comprising: a glass ceramic section; a wiring layer section having a plurality of wiring layers electrically insulated from each other by a polymide material; and an intermediate layer made of an inorganic material which ensures a strong adhesion between said ceramic section and said wiring layer section wherein the width and length of the intermediate layer is different from the width and length of said ceramic section and the width and length of said wiring layer section so that no peripheral edges of said intermediate layer come into contact with any peripheral edges of said ceramic section and said wiring layer section.
Claim 2
Dependent Claim
106 words
A multilayer wiring substrate comprising: a glass ceramic section; a wiring layer section having a plurality of wiring layers electrically insulated from each other by a polymide material; and an intermediate layer made of an inorganic material which ensures a strong adhesion between said ceramic section and said wiring layer section wherein the width and length of the intermediate layer is different from the width and length of said ceramic section and the width and length of said wiring layer section so that no peripheral edges of said intermediate layer come into contact with any peripheral edges of said ceramic section and said wiring layer section.
Claim 3
Dependent Claim
17 words
The multilayer wiring substrate as claimed in claim 1, wherein said inorganic material is an electrical insulator.
Claim 4
Dependent Claim
16 words
The multilayer wiring substrate as claimed in claim 1, wherein said inorganic material is a metal.
Claim 5
Dependent Claim
47 words
The multilayer wiring substrate as claimed in claim 1, wherein the thermal expansion coefficient of said intermediate layer is between the thermal expansion coefficient of the glass ceramic of said glass ceramic section and the thermal expansion coefficient of the polymide material in said wiring layer section.
Claim 6
Dependent Claim
16 words
The multilayer wiring substrate as claimed in claim 1, wherein said inorganic material is silicon dioxide.
Claim 7
Dependent Claim
26 words
The multilayer wiring substrate as claimed in claim 1, wherein said inorganic material is selected from the group consisting of aluminum oxide, aluminum and boron nitride.
Claim 8
Dependent Claim
21 words
The multilayer wiring substrate as claimed in claim 1, wherein said glass ceramic section has at least one wiring layer therein.
Claim 9
Dependent Claim
43 words
The multilayer wiring substrate as claimed in claim 7, wherein said intermediate layer has at least one via-hole to respectively electrically connect at least one wiring layer in said glass ceramic section and at least one wiring layer in said wiring layer section.
Claim 10
Dependent Claim
50 words
The multilayer substrate as claimed in claim 1, wherein said glass ceramic section has a plurality of wiring layers therein and said intermediate layer has a plurality of via-holes to respectively electrically connect the wiring layers in said wiring layer section and the wiring layers in said glass ceramic section.
Claim 11
Dependent Claim
23 words
The multilayer wiring substrate as claimed in claim 1, wherein said intermediate layer is composed of a multilayer plating including gold and pallladium.
Claim 12
Dependent Claim
27 words
The multilayer wiring substrate as claimed in claim 1, wherein said intermediate layer includes a chromium-sputtered film, a palladium-sputtered film, a gold-plated film, and a palladium-plated film.
Claim 13
Dependent Claim
43 words
The multilayer wiring substrate as claimed in claim 11, wherein said chromium-sputtered film is 1,000 Å in thickness, said palladium-sputtered film is 1,000 Å in thickness, said gold-plated film is 5 μ in thickness, and said palladium-plated film is 0.5 μ in thickness.
Claim 14
Dependent Claim
59 words
The multilayer wiring substrate as claimed in claim 1, wherein said intermediate layer is a multifilm layer including: a sputtered film selected from the group consisting of titanium, tungsten and Nichrome; a sputtered film selected from the group consisting of platinum and nickle; a copper-plated film; and a plated film selected from the group consisting of nickel or chromium.
References Cited (Backward Citations)
US4594473A
Cited
FR2601501A1
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-05-05 | 1995-11-04 | 1996-05-05 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-05-05 | 1999-11-04 | 2000-05-05 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-05-05 | 2003-11-04 | 2004-05-05 | $7700.00 | Window Closed / Lapsed |