US4594473A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Substrate having at least one fine-wired conductive layer
Assignee: NEC Corp
•
Filing: 1984-03-09
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Granted: 1986-06-10
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Expires: 2004-03-09
Abstract
Abstract A fine-wired conductor for use in LSI circuits exhibits good adhesion properties. The conductor is made up of a film of metal such as chrome or titanium on an insulator such as a ceramic substrate, a gold layer over the film of metal and a palladium film on the gold layer. In addition, a palladium layer can be interposed between the metal film and the gold layer to facilitate gold plating and inhibit diffusion of the metal and the gold.
Inventors
- 👤 Tatsuo Inoue
- 👤 Mitsuru Kimura
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 17:02
CPC Classifications
H; H10; H10W; H10W70/00; H10W70/60; H10W70/62; H10W70/66; H01; H01B; H01B5/00; H01B5/14; H05; H05K; H05K3/00; H05K3/38; Y; Y10; Y10S; Y10S428/00; Y10S428/901
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
55 words
A substrate comprising a first fine wiring conductive layer consisting of a first metal film formed over the surface of an insulated substrate, a gold conductive layer formed over said first metal film, a first palladium film formed over said gold conductive layer; and a polyimide resin layer covering said first fine wiring conductive layer.
Claim 2
Dependent Claim
55 words
A substrate comprising a first fine wiring conductive layer consisting of a first metal film formed over the surface of an insulated substrate, a gold conductive layer formed over said first metal film, a first palladium film formed over said gold conductive layer; and a polyimide resin layer covering said first fine wiring conductive layer.
Claim 3
Dependent Claim
22 words
A substrate, as claimed in claim 1, wherein said first metal film is selected from the group consisting of chrome and titanium.
Claim 4
Dependent Claim
29 words
A substrate, as claimed in claim 2, wherein said first conductive layer further comprises a second palladium film provided between said first metal film and said gold conductive layer.
Claim 5
Dependent Claim
31 words
A substrate, as claimed in claim 1, 2 or 3, and further including a second fine wiring layer disposed over said polyimide resin layer to thereby form a multi-layered wiring conductor.
Claim 6
Dependent Claim
28 words
A substrate, as claimed in claim 4, wherein said second conductive layer includes a second metal film, a gold conductive layer and a palladium film in that order.
Claim 7
Dependent Claim
22 words
A substrate, as claimed in claim 5, wherein said second metal film is selected from the group consisting of chrome and titanium.
References Cited (Backward Citations)
US3576722A
Cited
US3634159A
Cited
US4068022A
Cited
US4031272A
Cited
US4281057A
Cited
US4226932A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1989-06-09 | 1989-12-09 | 1990-06-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1993-06-09 | 1993-12-09 | 1994-06-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1997-06-09 | 1997-12-09 | 1998-06-10 | $7700.00 | Window Closed / Lapsed |