US5102720A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Co-fired multilayer ceramic tapes that exhibit constrained sintering
Assignee: Cornell Research Foundation Inc
•
Filing: 1989-09-22
•
Granted: 1992-04-07
•
Expires: 2009-09-22
Abstract
Abstract Shrinkage is substantially reduced or eliminated in the x-y plane during co-firing interposing predominantly ceramic layer between predominantly glass layers in the green multilayer assembly. The ceramic is preferably aluminum nitride.
Inventors
- 👤 Rishi Raj
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-23 13:54
CPC Classifications
C; C04; C04B; C04B35/00; C04B35/515; C04B35/58; C04B35/581; B; B32; B32B; B32B18/00; C04B35/622; C04B35/64; C04B35/645; H; H10; H10W; H10W70/00; H10W70/01; H10W70/05; H10W99/00; C04B2235/00; C04B2235/65; C04B2235/656; C04B2235/6567; C04B2237/00; C04B2237/30; C04B2237/32; C04B2237/34; C04B2237/341; C04B2237/343; C04B2237/345; C04B2237/346; C04B2237/36; C04B2237/363; C04B2237/365; C04B2237/366; C04B2237/50; C04B2237/68; C04B2237/70; C04B2237/704; Y; Y10; Y10S; Y10S428/00; Y10S428/901; Y10T; Y10T428/00; Y10T428/24; Y10T428/24802; Y10T428/24917; Y10T428/24926; Y10T428/25
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
121 words
A multilayer green substrate assembly for sintering to provide a multilayer circuit, said multilayer green substrate comprising: (a) at least one layer predominantly containing glass particles held together by an organic binder; (b) at least one layer predominantly containing ceramic particles held together by an organic binder, said ceramic particles being composed of ceramic material which is wetted by the glass without significant dissolution or sintering, being such as to remain rigid at sintering temperatures and being such as to stabilize the substrate against shrinkage in the x-y plane on sintering and to substantially constrain shrinkage on sintering to the z-direction; (c) at least one layer of (a) or (b) or (a) and (b) being printed with a metal conductive pattern.
Claim 2
Dependent Claim
121 words
A multilayer green substrate assembly for sintering to provide a multilayer circuit, said multilayer green substrate comprising: (a) at least one layer predominantly containing glass particles held together by an organic binder; (b) at least one layer predominantly containing ceramic particles held together by an organic binder, said ceramic particles being composed of ceramic material which is wetted by the glass without significant dissolution or sintering, being such as to remain rigid at sintering temperatures and being such as to stabilize the substrate against shrinkage in the x-y plane on sintering and to substantially constrain shrinkage on sintering to the z-direction; (c) at least one layer of (a) or (b) or (a) and (b) being printed with a metal conductive pattern.
Claim 3
Dependent Claim
40 words
The substrate of claim 1 wherein each layer (a) contains on a glass plus ceramic basis at least 60% by volume glass and wherein each layer (b) contains on a glass plus ceramic basis at least 60% by volume ceramic.
Claim 4
Dependent Claim
19 words
The substrate of claim 2 wherein said glass has a sintering temperature ranging from 600° C. to 1500° C.
Claim 5
Dependent Claim
19 words
The substrate of claim 3 wherein said glass has a sintering temperature ranging from 800° C. to 900° C.
Claim 6
Dependent Claim
20 words
The substrate of claim 2 wherein said ceramic is selected from the group consisting of carbides, nitrides, oxides and borides.
Claim 7
Dependent Claim
11 words
The substrate of claim 5 wherein said ceramic is aluminum nitride.
Claim 8
Dependent Claim
14 words
The substrate of claim 4 wherein said ceramic is diamond or poorly crystallized carbon.
Claim 9
Dependent Claim
31 words
The substrate of claim 2 wherein each layer (b) contains on a glass plus ceramic basis from 10% to 30% by volume glass and from 90% to 70% by volume ceramic.
Claim 10
Dependent Claim
92 words
A multilayer substrate for mounting of electronic or opto-electronic components, said substrate comprising (a) at least one layer which has a glass matrix and has a porosity from 0 to 10% by volume and contains from 0 to 60% by volume ceramic; (b) at least one layer which contains at least 60% by volume ceramic particles with the remainder being any combination of porosity and glass; the ceramic of (a) and the ceramic particles of (b) being composed of ceramic material which is wetted by the glass without significant dissolution or sintering.
Claim 11
Dependent Claim
92 words
A multilayer substrate for mounting of electronic or opto-electronic components, said substrate comprising (a) at least one layer which has a glass matrix and has a porosity from 0 to 10% by volume and contains from 0 to 60% by volume ceramic; (b) at least one layer which contains at least 60% by volume ceramic particles with the remainder being any combination of porosity and glass; the ceramic of (a) and the ceramic particles of (b) being composed of ceramic material which is wetted by the glass without significant dissolution or sintering.
Claim 12
Dependent Claim
8 words
The substrate of claim 9 which is self-supporting.
Claim 13
Dependent Claim
22 words
The substrate of claim 9 which is built on a monolithic ceramic substrate of ceramic selected from carbides, nitrides, oxides and borides.
Claim 14
Dependent Claim
24 words
The substrate of claim 9 wherein at least one of (a) or (b) or (a) and (b) is printed with a metal conductive pattern.
Claim 15
Dependent Claim
30 words
The substrate of claim 9 wherein the layer (a) has a low dielectric constant and the layer (b) has either a low or high dielectric constant or is a resistor.
Claim 16
Dependent Claim
12 words
The substrate of claim 13 wherein the layer (b) has electro-optic properties.
Claim 17
Dependent Claim
102 words
A multilayer green substrate assembly for fabrication of multilayer packages with metal circuits, said multilayer green substrate comprising: (a) at least one layer predominantly containing glass particles held together by an organic binder; (b) at least one layer predominantly containing ceramic particles held together by an organic binder, said ceramic particles being composed of ceramic material which is wetted by the glass without significant dissolution or sintering, being such as to remain rigid at sintering temperatures and being such as to stabilize the substrate against shrinkage in the x-y plane on sintering and to substantially constrain shrinkage on sintering to the z-direction.
Claim 18
Dependent Claim
102 words
A multilayer green substrate assembly for fabrication of multilayer packages with metal circuits, said multilayer green substrate comprising: (a) at least one layer predominantly containing glass particles held together by an organic binder; (b) at least one layer predominantly containing ceramic particles held together by an organic binder, said ceramic particles being composed of ceramic material which is wetted by the glass without significant dissolution or sintering, being such as to remain rigid at sintering temperatures and being such as to stabilize the substrate against shrinkage in the x-y plane on sintering and to substantially constrain shrinkage on sintering to the z-direction.
Claim 19
Dependent Claim
52 words
The assembly of claim 15 which consists of a three layer structure where the outer layers are layers (a) which contain on a glass plus ceramic basis at least 60% by volume glass and a middle layer (b) which contains on a glass plus ceramic basis at least 60% by volume ceramic.
Claim 20
Dependent Claim
84 words
In the method for producing a self standing substrate for a multilayer circuit which method comprises the steps of tape casting, screen printing, stacking, laminating, and removing organic binder to provide a green multilayer assembly comprising glass and ceramic which is composed of material which is wetted by the glass without significant dissolution or sintering, and co-firing, the improvements comprising co-firing under a pressure applied in the z-direction and with shrinkage essentially only in the z-direction and essentially no shrinkage in the x-y plane.
Claim 21
Dependent Claim
84 words
In the method for producing a self standing substrate for a multilayer circuit which method comprises the steps of tape casting, screen printing, stacking, laminating, and removing organic binder to provide a green multilayer assembly comprising glass and ceramic which is composed of material which is wetted by the glass without significant dissolution or sintering, and co-firing, the improvements comprising co-firing under a pressure applied in the z-direction and with shrinkage essentially only in the z-direction and essentially no shrinkage in the x-y plane.
Claim 22
Dependent Claim
44 words
The method of claim 17 wherein the co-firing is carried out with the green multi-layer assembly built on a monolithic ceramic substrate thereby to provide greater reliability by the elimination of delamination and interface defects that otherwise result from shrinkage in the x-y plane.
Claim 23
Dependent Claim
39 words
The method of claim 18 wherein co-firing is carried out under a pressure applied in the z-direction in the range of 3 to 30 psi thereby to prevent warping and improve adhesion between layers and said monolithic ceramic substrate.
Claim 24
Dependent Claim
38 words
The method of claim 17 where co-firing is carried out under a pressure applied in the z-direction in the range of 3 to 30 psi thereby to improve adhesion between layers and to reduce the possibility of warping.
References Cited (Backward Citations)
UST888004I4
Cited
US4301324A
Cited
US4221047A
Cited
US4234367A
Cited
US4313900A
Cited
JPS6054966A
Cited
JPS6054964A
Cited
US4600604A
Cited
US4645552A
Cited
US4799984A
Cited
US4806188A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-04-07 | 1995-10-07 | 1996-04-07 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-04-07 | 1999-10-07 | 2000-04-07 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-04-07 | 2003-10-07 | 2004-04-07 | $7700.00 | Window Closed / Lapsed |