US5100762A
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US
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Radiation-sensitive polymer and radiation-sensitive composition containing the same
Assignee: Mitsubishi Electric Corp
•
Filing: 1990-07-09
•
Granted: 1992-03-31
•
Expires: 2010-07-09
Abstract
Abstract A radiation-sensitive polymer is capable of resistance to the dry etching when it is applied to form very fine patterns in VLSIs and other semiconductor devices, wherein the polymer is a radiation-sensitive polymer that contains at least one unit represented by the general formula (I): ##STR1## (where X is an alkyl group, a halogen atom or a halogenated alkyl group; R 1 is an alkyl group, an alkoxy or an aryl group; R 2 is carbon monoxide; M is Si, Ge, Sn, Ti, Mo or W; k is a number defined by the valence of (M minus 1); and l is zero or a positive integer), and which optionally contains at least one unit represented by the general formula (II): ##STR2## (where Y is an alkyl group, a halogen atom or a halogenated alkyl group; R 3 is an alkyl group or an aryl group) and/or at least one unit represented by the general formula (III): --SO.sub.2 --R.sup.4 (III) (where R 4 is a divalent alkyl or aryl group).
Inventors
- 👤 Youko Tanaka
- 👤 Shigeru Kubota
- 👤 Hideo Horibe
- 👤 Hiroshi Koezuka
- 👤 Teruhiko Kumada
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 10:21
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/075; C; C08; C08L; C08L43/00; G03F7/0042
Claims Analysis
Total Claims: 94
Claim 1
Independent Claim
123 words
A radiation-sensitive polymer that contains at least one unit represented by the general formula (I): ##STR10## wherein X is an alkyl group, a halogen atom or a halogenated alkyl group; R 1 is an alkyl group, an alkoxy group or an aryl group; R 2 is carbon monoxide; M is Ge, Sn, Ti, Mo or W; k is a number defined by the valence of (M minus 1); and l is zero or a positive integer provided that l is zero in the case that M is Ge or Sn, and a moiety having the general formula (II): ##STR11## wherein Y is an alkyl group, a halogen atom or a halogenated alkyl group; and R 3 is an alkyl or an aryl group.
Claim 2
Dependent Claim
123 words
A radiation-sensitive polymer that contains at least one unit represented by the general formula (I): ##STR10## wherein X is an alkyl group, a halogen atom or a halogenated alkyl group; R 1 is an alkyl group, an alkoxy group or an aryl group; R 2 is carbon monoxide; M is Ge, Sn, Ti, Mo or W; k is a number defined by the valence of (M minus 1); and l is zero or a positive integer provided that l is zero in the case that M is Ge or Sn, and a moiety having the general formula (II): ##STR11## wherein Y is an alkyl group, a halogen atom or a halogenated alkyl group; and R 3 is an alkyl or an aryl group.
Claim 3
Dependent Claim
13 words
A radiation-sensitive polymer as claimed in claim 1, said polymer being poly(tri-n-butylstannyl methacrylate).
Claim 4
Dependent Claim
14 words
A radiation-sensitive polymer as claimed in claim 1, said polymer being poly(tri-n-butylstannyl methacrylate-ethyl methacrylate).
Claim 5
Dependent Claim
14 words
A radiation-sensitive polymer as claimed in claim 1, said polymer being poly(triethyl germane methacrylate).
Claim 6
Dependent Claim
15 words
A radiation-sensitive polymer as claimed in claim 1, said polymer being poly(triethyl germane methacrylate-methyl methacrylate).
Claim 7
Dependent Claim
13 words
A radiation-sensitive polymer as claimed in claim 1, said polymer being poly(triethyltitanyl methacrylate).
Claim 8
Dependent Claim
14 words
A radiation-sensitive polymer as claimed in claim 1, said polymer being poly(triethyltitanyl methacrylate-methyl methacrylate).
Claim 9
Dependent Claim
14 words
A radiation-sensitive polymer as claimed in claim 1, said polymer being poly(α-chlorotriethyl-titanyl acrylate/α-chloromethyl acrylate/2-pentenesulfone).
Claim 10
Dependent Claim
16 words
A radiation-sensitive polymer as claimed in claim 1, said polymer being poly(triethyltitanyl-α-n-propyl acrylate/dicarbonyl tropylium tungstenyl-α-n-propyl acrylate).
Claim 11
Dependent Claim
13 words
A radiation-sensitive polymer as claimed in claim 1, said polymer being poly(α-chlorotriethyltitanyl acrylate).
Claim 12
Dependent Claim
14 words
A radiation-sensitive polymer as claimed in claim 1, said polymer being poly(α-chlorotriethyltitanyl acrylate/methyl α-chloroacrylate).
Claim 13
Dependent Claim
111 words
A radiation-sensitive polymer that contains at least one unit represented by the general formula (I): ##STR12## wherein X is an alkyl group, a halogen atom or a halogenated alkyl group; R 1 is an alkyl group, an alkoxy group or an aryl group; R 2 is carbon monoxide; M is Ge, Sn, Ti, Mo or W; k is a number defined by the valence of (M minus l); and l is zero or a positive integer provided that l is zero in the case that M is Ge or Sn, a moiety having the general formula (III): --SO.sub.2 --R.sup.4 -- (III) wherein R 4 is a divalent alkyl or aryl group.
Claim 14
Dependent Claim
111 words
A radiation-sensitive polymer that contains at least one unit represented by the general formula (I): ##STR12## wherein X is an alkyl group, a halogen atom or a halogenated alkyl group; R 1 is an alkyl group, an alkoxy group or an aryl group; R 2 is carbon monoxide; M is Ge, Sn, Ti, Mo or W; k is a number defined by the valence of (M minus l); and l is zero or a positive integer provided that l is zero in the case that M is Ge or Sn, a moiety having the general formula (III): --SO.sub.2 --R.sup.4 -- (III) wherein R 4 is a divalent alkyl or aryl group.
Claim 15
Dependent Claim
16 words
A radiation-sensitive polymer as claimed in claim 1 or 12, wherein X is an alkyl group.
Claim 16
Dependent Claim
30 words
A radiation-sensitive polymer as claimed in claim 13, wherein the alkyl group is selected from the group consisting of methyl, ethyl, n-propyl, isopropyl, n-butyl, t-butyl, n-pentyl, isopentyl, and neopentyl groups.
Claim 17
Dependent Claim
16 words
A radiation-sensitive polymer as claimed in claim 1 or 12, wherein X is a halogen atom.
Claim 18
Dependent Claim
16 words
A radiation-sensitive polymer as claimed in claim 15, wherein the halogen atom is chlorine or bromine.
Claim 19
Dependent Claim
17 words
A radiation-sensitive polymer as claimed in claim 1 or 12, wherein X is a halogenated alkyl group.
Claim 20
Dependent Claim
48 words
A radiation-sensitive polymer as claimed in claim 17, wherein the halogenated alkyl group is selected from the group consisting of chloromethyl, dichloromethyl, trichloromethyl, 1-chloroethyl, 2-chloroethyl, 1,1-dichloroethyl, 1,2-dichloroethyl, 1,1,2-trichloroethyl, 1,2,2-trichloroethyl, 2,2,2-trichloroethyl, 1,1,2,2-tetrachloroethyl, 1,2,2,2-tetrachloroethyl, 1,1,2,2,2-pentachloroethyl, bromomethyl, dibromomethyl, tribromomethyl, 1-bromoethyl, 2-bromomethyl, 1,1-dibromoethyl, 1,2-dibromoethyl, 1,1,2-tribromoethyl, 1,2,2-tribromoethyl, 2,2,2-tribromoethyl, 1,1,2,2-tetrabromoethyl, 1,2,2,2-tetrabromoethyl and 1,1,2,2,2-pentabromoethyl groups.
Claim 21
Dependent Claim
12 words
A radiation-sensitive polymer as claimed in claim 18, wherein X is trichloromethyl.
Claim 22
Dependent Claim
24 words
A radiation-sensitive polymer as claimed in claim 1 or 12, wherein R 1 is an alkyl group containing no more than five carbon atoms.
Claim 23
Dependent Claim
24 words
A radiation-sensitive polymer as claimed in claim 1 or 12, wherein R 1 is an alkoxy group containing no more than five carbon atoms.
Claim 24
Dependent Claim
26 words
A radiation-sensitive polymer as claimed in claim 1 or 12, wherein R 1 is an alkoxy group selected from the group consisting of methoxy and ethoxy.
Claim 25
Dependent Claim
17 words
A radiation-sensitive polymer as claimed in claim 1 or 12, wherein R 1 is an aryl group.
Claim 26
Dependent Claim
24 words
A radiation-sensitive polymer as claimed in claim 23, wherein the aryl group is selected from the group consisting of phenyl, toluyl, m-nitrophenyl, and p-acetylphenyl.
Claim 27
Dependent Claim
16 words
A radiation-sensitive polymer as claimed in claim 1 or 12, wherein Y is an alkyl group.
Claim 28
Dependent Claim
30 words
A radiation-sensitive polymer as claimed in claim 25, wherein the alkyl group is selected from the group consisting of methyl, ethyl, n-propyl, isopropyl, n-butyl, t-butyl, n-pentyl, isopentyl, and neopentyl groups.
Claim 29
Dependent Claim
16 words
A radiation-sensitive polymer as claimed in claim 1 or 2, wherein Y is a halogen atom.
Claim 30
Dependent Claim
16 words
A radiation-sensitive polymer as claimed in claim 27, wherein the halogen atom is chlorine or bromine.
Claim 31
Dependent Claim
17 words
A radiation-sensitive polymer as claimed in claim 1 or 12, wherein Y is a halogenated alkyl group.
Claim 32
Dependent Claim
49 words
A radiation-sensitive polymer as claimed in claim 29, wherein the halogenated alkyl group is selected from the group consisting of chloromethyl, dichloromethyl, trichloromethyl, 1-chloroethyl, 2-chloroethyl, 1,1-dichloroethyl, 1,2-dichloroethyl, 1,1,2-trichloroethyl, 1,2,2-trichloroethyl, 2,2,2-trichloroethyl, 1,1,2,2-tetrachloroethyl, 1,2,2,2-tetrachloroethyl and 1,1,2,2,2-pentachloroethyl, bromomethyl, dibromomethyl, tribromomethyl, 1-bromoethyl, 2-bromomethyl, 1,1-dibromoethyl, 1,2-dibromoethyl, 1,1,2-tribromoethyl, 1,2,2-tribromoethyl, 2,2,2-tribromoethyl, 1,1,2,2-tetrabromoethyl, 1,2,2,2-tetrabromoethyl and 1,1,2,2,2-pentabromoethyl groups.
Claim 33
Dependent Claim
15 words
A radiation-sensitive polymer as claimed in claim 30, wherein the halogenated alkyl group is trichloromethyl.
Claim 34
Dependent Claim
24 words
A radiation-sensitive polymer as claimed in claim 1 or 12, wherein R 3 is an alkyl group containing no more than ten carbon atoms.
Claim 35
Dependent Claim
47 words
A radiation-sensitive polymer as claimed in claim 1 or 12, wherein R 3 is an alkyl or aryl group selected from the group consisting of phenyl, toluyl, m-nitrophenyl, p-acetylphenyl, n-pentyl, isopentyl, neopentyl, n-hexyl, isohexyl, heptyl, octyl, nonyl and decanyl, methyl, ethyl, n-propyl, n-butyl, t-butyl, and m-cyanophenyl groups.
Claim 36
Dependent Claim
31 words
A radiation-sensitive polymer as claimed in claim 1 or 12, wherein R 4 is a divalent alkyl group selected from the group consisting of methylene, ethylene, n-propylene, n-butylene, and t-butylene groups.
Claim 37
Dependent Claim
32 words
A radiation-sensitive polymer as claimed in claim 1 or 12, wherein R 4 is a divalent aryl group selected from the group consisting of o-phenylene, p-phenylene, 1,3-o-toluylene, 1,4-o-toluylene, 1,5-m-toluylene, and 1,3-o-nitrobenzylylene groups.
Claim 38
Dependent Claim
28 words
A radiation-sensitive polymer as claimed in claim 1 or 12, wherein said radiation-sensitive polymer contains at least about 2% of the unit represented by the general formula (I).
Claim 39
Dependent Claim
28 words
A radiation-sensitive polymer as claimed in claim 1 or 12, wherein said radiation-sensitive polymer contains at least about 4.5% of the unit represented by the general formula (I).
Claim 40
Dependent Claim
37 words
A radiation-sensitive polymer as claimed in claim 1 or 12, wherein the ratio of the unit represented by the general formula (I) to the unit represented by the general formula (II) is between about 1:0.5 and 1:45.
Claim 41
Dependent Claim
37 words
A radiation-sensitive polymer as claimed in claim 1 or 12, wherein the ratio of the unit represented by the general formula (I) to the unit represented by the general formula (II) is between about 1:8 and 1:45.
Claim 42
Dependent Claim
37 words
A radiation-sensitive polymer as claimed in claim 1 or 12, wherein the ratio of the unit represented by the general formula (I) to the unit represented by the general formula (III) is between about 1:0.5 and 1:20.
Claim 43
Dependent Claim
37 words
A radiation-sensitive polymer as claimed in claim 1 or 12, wherein the ratio of the unit represented by the general formula (I) to the unit represented by the general formula (III) is between about 1:1 and 1:15.
Claim 44
Dependent Claim
24 words
A radiation-sensitive polymer as claimed in claim 1 or 12, wherein the radiation-sensitive polymer has an average molecular weight between about 20,000 and 500,000.
Claim 45
Dependent Claim
21 words
A radiation-sensitive polymer as claimed in claim 1 or 12, wherein the radiation-sensitive polymer is capable of forming a thin film.
Claim 46
Dependent Claim
24 words
A radiation-sensitive polymer as claimed in claim 1 or 12, wherein said polymer contains two or more units represented by the general formula (II).
Claim 47
Dependent Claim
131 words
A composition containing a radiation-sensitive polymer, wherein the polymer consists of at least one unit represented by the general formula (I): ##STR13## and wherein X is an alkyl group, a halogen atom or a halogenated alkyl group; R 1 is an alkyl group, an alkoxy group or an aryl group; R 2 is carbon monoxide; M is Ge, Sn, Ti, Mo or W; k is a number defined by the valence of (M minus 1); and l is zero or a positive integer provided that l is zero in the case that M is Ge or Sn, and a moiety having the general formula (II): ##STR14## and wherein Y is an alkyl group, a halogen atom or a halogenated alkyl group; and R 3 is an alkyl or an aryl group.
Claim 48
Dependent Claim
131 words
A composition containing a radiation-sensitive polymer, wherein the polymer consists of at least one unit represented by the general formula (I): ##STR13## and wherein X is an alkyl group, a halogen atom or a halogenated alkyl group; R 1 is an alkyl group, an alkoxy group or an aryl group; R 2 is carbon monoxide; M is Ge, Sn, Ti, Mo or W; k is a number defined by the valence of (M minus 1); and l is zero or a positive integer provided that l is zero in the case that M is Ge or Sn, and a moiety having the general formula (II): ##STR14## and wherein Y is an alkyl group, a halogen atom or a halogenated alkyl group; and R 3 is an alkyl or an aryl group.
Claim 49
Dependent Claim
120 words
A composition containing a radiation-sensitive polymer, wherein the polymer consists of at least one unit represented by the general formula (I): ##STR15## and wherein X is an alkyl group, a halogen atom or a halogenated alkyl group; R 1 is an alkyl group, an alkoxy group or an aryl group; R 2 is carbon monoxide; M is Ge, Sn, Ti, Mo or W; k is a number defined by the valence of (M minus 1); and l is zero or a positive integer provided that l is zero in the case that M is Ge or Sn and a moiety having the general formula (III): --SO.sub.2 --R.sup.4 -- (III) and wherein R 4 is a divalent alkyl or aryl group.
Claim 50
Dependent Claim
120 words
A composition containing a radiation-sensitive polymer, wherein the polymer consists of at least one unit represented by the general formula (I): ##STR15## and wherein X is an alkyl group, a halogen atom or a halogenated alkyl group; R 1 is an alkyl group, an alkoxy group or an aryl group; R 2 is carbon monoxide; M is Ge, Sn, Ti, Mo or W; k is a number defined by the valence of (M minus 1); and l is zero or a positive integer provided that l is zero in the case that M is Ge or Sn and a moiety having the general formula (III): --SO.sub.2 --R.sup.4 -- (III) and wherein R 4 is a divalent alkyl or aryl group.
Claim 51
Dependent Claim
21 words
A composition as claimed in claim 45 or 46, further comprising a compound that generates an acid in response to radiation.
Claim 52
Dependent Claim
16 words
A composition as claimed in claim 47, further comprising a compound that provides enhanced radiation sensitivity.
Claim 53
Dependent Claim
30 words
A composition as claimed in claim 48, wherein X is an alkyl group selected from the group consisting of methyl, ethyl, n-propyl, isopropyl, n-butyl, t-butyl, n-pentyl, isopentyl, and neopentyl groups.
Claim 54
Dependent Claim
13 words
A composition as claimed in claim 48, wherein X is a halogen atom.
Claim 55
Dependent Claim
14 words
A composition as claimed in claim 50 wherein X is a chlorine or bromine.
Claim 56
Dependent Claim
49 words
A composition as claimed in claim 50, wherein X is a halogenated alkyl group selected from the group consisting of chloromethyl, dichloromethyl, trichloromethyl, 1-chloroethyl, 2-chloroethyl, 1,1-dichloroethyl, 1,2-dichloroethyl, 1,1,2-trichloroethyl, 1,2,2-trichloroethyl, 2,2,2-trichloroethyl, 1,1,2,2-tetrachloroethyl, 1,2,2,2-tetrachloroethyl and 1,1,2,2,2-pentachloroethyl, bromomethyl, dibromomethyl, tribromomethyl, 1-bromoethyl, 2-bromomethyl, 1,1-dibromoethyl, 1,2-dibromoethyl, 1,1,2-tribromoethyl, 1,2,2-tribromoethyl, 2,2,2-tribromoethyl, 1,1,2,2-tetrabromoethyl, 1,2,2,2-tetrabromoethyl and 1,1,2,2,2-pentabromoethyl groups.
Claim 57
Dependent Claim
21 words
A composition as claimed in claim 48, wherein R 1 is an alkyl group containing no more than five carbon atoms.
Claim 58
Dependent Claim
21 words
A composition as claimed in claim 48, wherein R 1 is an alkoxy group containing no more than five carbon atoms.
Claim 59
Dependent Claim
26 words
A composition as claimed in claim 48, wherein R 1 is an aryl group selected from the group consisting of phenyl, toluyl, m-nitrophenyl, p-acetylphenyl, and m-cyanophenyl.
Claim 60
Dependent Claim
30 words
A composition as claimed in claim 48, wherein Y is an alkyl group selected from the group consisting of methyl, ethyl, n-propyl, isopropyl, n-butyl, t-butyl, n-pentyl, isopentyl, and neopentyl groups.
Claim 61
Dependent Claim
13 words
A composition as claimed in claim 48, wherein Y is a halogen atom.
Claim 62
Dependent Claim
49 words
A composition as claimed in claim 48, wherein Y is a halogenated alkyl group selected from the group consisting of chloromethyl, dichloromethyl, trichloromethyl, 1-chloroethyl, 2-chloroethyl, 1,1-dichloroethyl, 1,2-dichloroethyl, 1,1,2-trichloroethyl, 1,2,2-trichloroethyl, 2,2,2-trichloroethyl, 1,1,2,2-tetrachlorethyl, 1,2,2,2-tetrachloroethyl and 1,1,2,2,2-pentachloroethyl, bromomethyl, dibromomethyl, tribromomethyl, 1-bromoethyl, 2-bromomethyl, 1,1-dibromoethyl, 1,2-dibromoethyl, 1,1,2-tribromoethyl, 1,2,2-tribromoethyl, 2,2,2-tribromoethyl, 1,1,2,2-tetrabromethyl, 1,2,2,2-tetrabromoethyl and 1,1,2,2,2-pentabromoethyl groups.
Claim 63
Dependent Claim
21 words
A composition as claimed in claim 48, wherein R 3 is an alkyl group containing no more than ten carbon atoms.
Claim 64
Dependent Claim
43 words
A composition as claimed in claim 48, wherein R 3 is an alkyl or aryl group selected from the group consisting of phenyl, toluyl, m-nitrophenyl, p-acetylphenyl, n-pentyl, isopentyl, neopentyl, n-hexyl, isohexyl, heptyl, octyl, nonyl decanyl, methyl, ethyl, n-propyl, n-butyl, t-butyl and m-cyanophenyl groups.
Claim 65
Dependent Claim
28 words
A composition as claimed in claim 48, wherein R 4 is a divalent alkyl group selected from the group consisting of methylene, ethylene, n-propylene, n-butylene, and t-butylene groups.
Claim 66
Dependent Claim
29 words
A composition as claimed in claim 48, wherein R 4 is a divalent aryl group selected from the group consisting of o-phenylene, p-phenylene, 1,3-o-toluylene, 1,4-o-toluylene, 1,5-m-toluylene, and 1,3-o-nitrobenzylylene groups.
Claim 67
Dependent Claim
25 words
A composition as claimed in claim 48, wherein the radiation-sensitive polymer contains at least about 2% of the unit represented by the general formula (I).
Claim 68
Dependent Claim
25 words
A composition as claimed in claim 48, wherein said radiation-sensitive polymer contains at least about 4.5% of the unit represented by the general formula (I).
Claim 69
Dependent Claim
34 words
A composition as claimed in claim 48, wherein the ratio of the unit represented by the general formula (I) to the unit represented by the general formula (II) is between about 1:0.5 and 1:45.
Claim 70
Dependent Claim
34 words
A composition as claimed in claim 48, wherein the ratio of the unit represented by the general formula (I) to the unit represented by the general formula (II) is between about 1:8 and 1:45.
Claim 71
Dependent Claim
34 words
A composition as claimed in claim 48, wherein the ratio of the unit represented by the general formula (I) to the unit represented by the general formula (III) is between about 1:0.5 and 1:20.
Claim 72
Dependent Claim
34 words
A composition as claimed in claim 48, wherein the ratio of the unit represented by the general formula (I) to the unit represented by the general formula (III) is between about 1:1 and 1:15.
Claim 73
Dependent Claim
13 words
A composition as claimed in claim 48, further comprising an adhesion improving agent.
Claim 74
Dependent Claim
35 words
A composition as claimed in claim 48, wherein the compound that generates an acid is selected from the group consisting of salts of iodonium, sulfonium, phosphonium, bromonium, chloronium, oxysulfoxonium, oxosulfonium, sulfoxonium, selenium, telluronium and arsonium.
Claim 75
Dependent Claim
56 words
A composition as claimed in claim 48, wherein the compound that generates an acid is selected from the group consisting of triphenylsulfonium tetrafluoroborate, triphenylsulfonium hexafluoroantimonate, triphenylsulfonium hexafluoroarsinate, triphenylsulfonium hexafluorophosphate, triphenylsulfonium trifluorosulfonate, diphenyliodonium hexafluoroantimonate, diphenyliodonium hexafluoroantimonate, diphenyliodonium hexafluoroarsinate, diphenyliodonium hexafluorophosphate, 2,4,6-tris(trichloromethyl)triazine, 2-allyl-4,6-bis(trichloromethyl)triazine, α, α, α-tribromomethylphenylsulfone, α,α,α,α',α',α',-hexachloroxylylene, 2-nitrobenzyl ester of methylsulfonic acid, and 2-nitrobenzyl ester of acetic acid.
Claim 76
Dependent Claim
30 words
A composition as claimed in claim 48, wherein the compound that generates an acid is added in amounts of about 0.1% to 30% on a weight basis of the polymer.
Claim 77
Dependent Claim
30 words
A composition as claimed in claim 48, wherein the compound that generates an acid is added in amounts of about 3% to 15% on a weight basis of the polymer.
Claim 78
Dependent Claim
48 words
A composition as claimed in claim 48, wherein the compound that provides enhanced radiation sensitivity is selected from the group consisting of polynuclear aromatic compounds having at least one substituent in the class consisting of an amino group, a hydroxyl group, an alkoxy group and an acetamido group.
Claim 79
Dependent Claim
46 words
A composition as claimed in claim 48, wherein the compound that provides enhanced radiation sensitivity is selected from the group consisting of 4-methoxynaphthalene, 1,4-dicyanonaphthalene, 9-cyanophenanthrene, phenanthren-9-acetamide, 9-aminophenanthrene, 9-methoxyphenanthrene, 1-aminoanthracene, 2-aminoanthracene, 9-cyanoanthracene, 9,10-dicyanoanthracene, 2,6,9,10-tetracyanoanthracene, 1-methoxyperylene, 1-cyanoperylene, 1-acetamidoperylene, 1,7-dicyanoperylene, 2,8-dicyanoperylene, 2,8-dimethoxyperylene, 1,7-dihydroxyperylene, 2-acetamidofluorene, chrysoldine, 1,7-dicyanochrysene, 1,7-hydroxychrysene, and 2,8-diaminoperylene.
Claim 80
Dependent Claim
31 words
A composition as claimed in claim 48, wherein the compound that provides enhanced radiation sensitivity is added in amounts of about 0.1% to 20% on a weight basis of the polymer.
Claim 81
Dependent Claim
31 words
A composition as claimed in claim 48, wherein the compound that provides enhanced radiation sensitivity is added in amounts of about 1% to 10% on a weight basis of the polymer.
Claim 82
Dependent Claim
36 words
A composition as claimed in claim 48, wherein the composition is characterized by a high resistance to dry etching, thereby allowing pattern transfers to be carried out easily by etching substrates such as inorganic oxide films.
Claim 83
Dependent Claim
32 words
A composition as claimed in claim 48, wherein the polymer contains two or more units represented by the general formula (II), and wherein said units have different Y and R 3 groups.
Claim 84
Dependent Claim
17 words
A composition as claimed in claim 48, wherein the composition is capable of forming a thin film.
Claim 85
Dependent Claim
16 words
A composition containing a radiation-sensitive polymer as claimed in claim 48, said polymer being poly(tri-n-butylstannyl methacrylate).
Claim 86
Dependent Claim
17 words
A composition containing a radiation-sensitive polymer as claimed in claim 48, said polymer being poly(tri-n-butylstannyl methacrylate-ethyl methacrylate).
Claim 87
Dependent Claim
17 words
A composition containing a radiation-sensitive polymer as claimed in claim 48, said polymer being poly(triethyl germane methacrylate).
Claim 88
Dependent Claim
18 words
A composition containing a radiation-sensitive polymer as claimed in claim 48, said polymer being poly(triethyl germane methacrylate-methyl methacrylate).
Claim 89
Dependent Claim
16 words
A composition containing a radiation-sensitive polymer as claimed in claim 48, said polymer being poly(triethyltitanyl methacrylate).
Claim 90
Dependent Claim
17 words
A composition containing a radiation-sensitive polymer as claimed in claim 48, said polymer being poly(triethyltitanyl methacrylate-methyl methacrylate).
Claim 91
Dependent Claim
17 words
A composition containing a radiation-sensitive polymer as claimed in claim 48, said polymer being poly(α-chlorotriethyl-titanyl acrylate/α-chloromethyl acrylate/2-pentenesulfone).
Claim 92
Dependent Claim
19 words
A composition containing a radiation-sensitive polymer as claimed in claim 48, said polymer being poly(triethyltitanyl-α-n-propyl acrylate/dicarbonyl tropylium tungstenyl-α-n-propyl acrylate).
Claim 93
Dependent Claim
16 words
A composition containing a radiation-sensitive polymer as claimed in claim 48, said polymer being poly(α-chlorotriethyltitanyl acrylate).
Claim 94
Dependent Claim
17 words
A composition containing a radiation-sensitive polymer as claimed in claim 48, said polymer being poly(α-chlorotriethyltitanyl acrylate/methyl α-chloroacrylate).
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-03-31 | 1995-09-30 | 1996-03-31 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-03-31 | 1999-09-30 | 2000-03-31 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-03-31 | 2003-09-30 | 2004-03-31 | $7700.00 | Window Closed / Lapsed |