US5095627A
Expired / Lapsed
US
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Method for mounting of semiconductor crystals
Assignee: Individual
•
Filing: 1990-05-31
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Granted: 1992-03-17
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Expires: 2010-05-31
Abstract
Abstract A process is provided for the mounting of semiconductor crystals with integrated circuits or circuit elements on a base support. In the first stage of the process, the front surface of a semiconductor crystal (1) and, substantially coplanar exposed contacts (6) on this surface, are bonded over the entire surface thereof to the base support by a dielectric substance. In a second stage, the contacts are at least partially exposed by partial etching away of the crystal (1). In the last stage, conductive connections (7) to the contacts are produced by coating of an electrically conductive material onto the base support.
Inventors
- 👤 Evgneius S. Bujagec
- 👤 Vaclav V. Prokopovich
- 👤 Janos Bocsanczy
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 06:43
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/30; H10W74/00; H10W74/01; H10W74/012; H10W74/10; H10W74/15; H10W72/071; H10W72/072; H10W72/07231; H10W72/07236; H10W72/073; H10W72/851; H10W72/853; H10W72/856; Y; Y10; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/4913
Claims Analysis
Total Claims: 20
Claim 1
Independent Claim
80 words
A method for the mounting on a substrate of a semiconductor crystal having contacts on the surface of the front face thereof substantially coplanar therewith, said method comprising first bonding the front face of the crystal over the entire surface thereof to the substrate by means of a dielectric material, then at least partially exposing the contacts of the crystal and thereafter applying electrically conductive material to exposed portions of the contacts and to the substrate to provide conductive connections.
Claim 2
Independent Claim
80 words
A method for the mounting on a substrate of a semiconductor crystal having contacts on the surface of the front face thereof substantially coplanar therewith, said method comprising first bonding the front face of the crystal over the entire surface thereof to the substrate by means of a dielectric material, then at least partially exposing the contacts of the crystal and thereafter applying electrically conductive material to exposed portions of the contacts and to the substrate to provide conductive connections.
Claim 3
Dependent Claim
15 words
A method as in claim 1, wherein the dielectric material comprises a polymerized anaerobic compound.
Claim 4
Dependent Claim
15 words
A method as in claim 1, wherein said dielectric material comprises a light sensitive adhesive.
Claim 5
Dependent Claim
20 words
A method as in claim 1 wherein the contacts of the crystal are exposed by etching using a chemical liquid.
Claim 6
Dependent Claim
18 words
A method as in claim 1 wherein the contacts of the crystal are exposed by plasma chemical etching.
Claim 7
Dependent Claim
12 words
A method as in claim 1 wherein the substrate comprises a ceramic.
Claim 8
Dependent Claim
13 words
A method as in claim 1 wherein the substrate comprises a moncrystalline semiconductor.
Claim 9
Dependent Claim
13 words
A method as in claim 1 wherein the substrate comprises a polycrystalline semiconductor.
Claim 10
Dependent Claim
15 words
A method as in claim 1 wherein the conductive connections are produced by metal coating.
Claim 11
Dependent Claim
18 words
A method as in claim 1 wherein the conductive connections are produced by metal coating with subsequent photolithography.
Claim 12
Dependent Claim
24 words
A method as in claim 1 wherein the conductive connections are produced by precipitation of metal from a salt solution using a laser beam.
Claim 13
Dependent Claim
21 words
A method as in claim 1 wherein the conductive connections are produced by thermal dissociation of a gaseous metallic organic compound.
Claim 14
Dependent Claim
21 words
A method as in claim 1 wherein the conductive connections are produced by chemical precipitation of metal from a liquid solution.
Claim 15
Dependent Claim
28 words
A method as claimed in claim 1 wherein the conductive connections are produced by precipitation of metal from a gaseous metallic organic compound by means of laser beam.
Claim 16
Dependent Claim
29 words
A method as in claim 1 wherein the contacts of the crystal are exposed by etching and said etching of the crystal occurs simultaneously on all exposed surfaces thereof.
Claim 17
Dependent Claim
26 words
A method as in claim 15, wherein said etching is used to expose a part of one side surface and the reverse side of the contacts.
Claim 18
Dependent Claim
76 words
A method as in claim 15 wherein said etching occurs in a plurality of stages in which the crystal is first etched away over an epitaxial layer covering the reverse side of the contacts as far as substantially half of the contact surface, the epitaxial layer is then etched away as far as substantially half of the contact surface, an the crystal is then etched away over the epitaxial layer essentially over the entire contact surface.
Claim 19
Dependent Claim
44 words
A method in claim 1 wherein during the production of the conductive connections the electrically conductive material is coated onto the substrate and onto exposed ares of the contacts on the surface thereof opposite that which is exposed prior to bonding of the crystal.
Claim 20
Dependent Claim
49 words
A method as in claim 1 wherein prior to bonding of the crystal to the substrate, conductive strips are provided on the substrate and, after said bonding and said partially exposing of the contacts, the electrically conductive material is coated on the conductive strips to provide the conductive connections.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-03-17 | 1995-09-16 | 1996-03-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-03-17 | 1999-09-16 | 2000-03-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-03-17 | 2003-09-16 | 2004-03-17 | $7700.00 | Window Closed / Lapsed |