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US5093884A
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Integrated monomode spatial optical filter and its method of embodiment
Assignee: Commissariat à l'Énergie Atomique et Aux Énergies Alternatives
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Filing: 1991-06-12
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Granted: 1992-03-03
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Expires: 2011-06-12
Abstract
Abstract Integrated monomode spatial optical filter and its method of embodiment. The optical filter of the invention for isolating one first optical mode and eliminating second stray optical modes consists of an optical microguide (4) borne by a substrate (2) and having along a plane parallel to the surface (P) of the substrate at least one curved portion (6) whose radius of curvature is such that the losses in the curve of the first and second modes are respectively negligible and extremely high and two light absorbers (8, 10) disposed within a given plane on both sides of the curved portion (6).
Inventors
- 👤 Pierre Gidon
- 👤 Jean-Pierre Jadot
- 👤 Stephane Renard
- 👤 Serge Valette
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 03:09
CPC Classifications
G; G02; G02B; G02B6/00; G02B6/10; G02B6/12; G02B6/122; G02B6/125
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
89 words
Integrated monomode spatial optical filter intended to isolate a first optical mode and eliminate second stray modes, wherein it consists of an optical microguide borne by a substrate and having, along a plane parallel to the surface of the substrate, at least one curved portion whose radius of curvature is such that the losses in the curve of the first and second modes are respectively negligible and extremely large and two light absorbers are disposed inside a given plane on both sides of the curved portion of the microguide.
Claim 2
Dependent Claim
89 words
Integrated monomode spatial optical filter intended to isolate a first optical mode and eliminate second stray modes, wherein it consists of an optical microguide borne by a substrate and having, along a plane parallel to the surface of the substrate, at least one curved portion whose radius of curvature is such that the losses in the curve of the first and second modes are respectively negligible and extremely large and two light absorbers are disposed inside a given plane on both sides of the curved portion of the microguide.
Claim 3
Dependent Claim
15 words
Optical filter according to claim 1, wherein the absorbers extend fully along the curved portion.
Claim 4
Dependent Claim
18 words
Optical filter according to claim 1, wherein the microguide has the shape of an "S" in said plane.
Claim 5
Dependent Claim
19 words
Optical filter according to claim 1, wherein the side of each absorber opposite the microguide is toothed or notched.
Claim 6
Dependent Claim
21 words
Optical filter according to claim 1, wherein the absorbers have dissymmetrical shapes with respect to the optical axis of the filter.
Claim 7
Dependent Claim
30 words
Optical filter according to claim 1, wherein the lateral distance of the microguide between its input and its output measured inside this plane is at least equal to 20 μm.
Claim 8
Dependent Claim
26 words
Optical filter according to claim 1, wherein the minimum distance measured inside this plane separating the microguide from each absorber is between 3 and 10 μm.
Claim 9
Dependent Claim
15 words
Optical filter according to claim 1, wherein the absorbers are made of an absorbant metal.
Claim 10
Dependent Claim
34 words
Optical filter according to claim 8, wherein the thickness of the absorbers measured along a direction perpendicular to this plane is less than the depth of the second modes for penetrating into the metal.
Claim 11
Dependent Claim
14 words
Optical filter according to claim 9, wherein the metal is covered by a nonconductor.
Claim 12
Dependent Claim
45 words
Optical filter according to claim 1, wherein the absorbers are made of an absorbant nonconductive or semiconductive material whose real refraction index n is close to the real refraction index n' of the upper film and whose imaginary refraction index n" satisfies the equation n"2≦(n-n')2.
Claim 13
Dependent Claim
64 words
Optical filter according to claim 1, wherein it includes a buffer film, a guide film and an upper film stacked on the substrate, the guide film having a refraction index larger than that of the buffer and upper films, the upper film and the guide film being etched so as to fix the shape of the microguide, and an absorbant film constituting the absorbers.
Claim 14
Dependent Claim
14 words
Optical filter according to claim 12, wherein the absorbant film fully covers the microguide.
Claim 15
Dependent Claim
20 words
Optical filter according to claim 1, wherein a protection nonconductor is disposed on the microguide and possibly on the absorbers.
Claim 16
Dependent Claim
65 words
Optical filter according to claim 12, wherein the substrate is made of silicon, the buffer film and the upper film are made of silica possibly doped with dopers reducing its refraction index, and the silica guide film is made of silica doped with a selected doper increasing its refraction index, namely silicon nitride, aluminium or silicon oxinitride with the formula SiOxNy with 0<×<2 and 0<y<4/3.
Claim 17
Dependent Claim
94 words
Method for embodying an integrated monomode spatial optical filter intended to isolate a first optical mode and eliminate second stray optical modes, wherein it consists of forming an optical microguide on a substrate and having along a plane parallel to the surface of the substrate at least one curved portion whose radius of curvature is such that the losses in the curve of the first and second modes are respectively negligible and extremely high, and of forming within a given plane on both sides of the curved portion of the microguide two light absorbers.
Claim 18
Dependent Claim
94 words
Method for embodying an integrated monomode spatial optical filter intended to isolate a first optical mode and eliminate second stray optical modes, wherein it consists of forming an optical microguide on a substrate and having along a plane parallel to the surface of the substrate at least one curved portion whose radius of curvature is such that the losses in the curve of the first and second modes are respectively negligible and extremely high, and of forming within a given plane on both sides of the curved portion of the microguide two light absorbers.
Claim 19
Dependent Claim
102 words
Method according to claim 16, wherein it includes the following stages: a) depositing a first film on the substrate, b) etching this first film so as to form the microguide, c) depositing a second film on the structure obtained at b and having a refraction index equal at the most to that of the first film, d) etching of the second film on both sides of the microguide so as to establish the shape of the absorbers, e) depositing an absorbers film on the structure obtained at d, and possibly, f) etching of the absorbant film so as to delimit the absorbers.
Claim 20
Dependent Claim
128 words
Method according to claim 16, wherein it includes the following stages: a') successive depositings of a buffer film, a guide film and an upper film on the substrate, the guide film having a refraction index larger than that of the buffer and upper films, b') etching of the upper film so as to form the microguide, c') depositing a protection film on the structure obtained at b and having a refraction index equal at the most to that of the upper film, d') etching of the protection film on both sides of the microguide so as to fix the shape of the absorbers, e') depositing an absorbant film on the structure obtained at d', and possibly f') etching of the absorbant film so as to delimit the absorbers.
Claim 21
Dependent Claim
121 words
Method according to claim 16, wherein it includes the following stages: A) successive depositings of a buffer film and a guide film on the substrate, the guide film having a refraction index larger than that of the buffer film, B) etching of the guide film so as to form the microguide, C) depositing of an upper film on the structure obtained at B and having a refraction index smaller than that of the guide film, D) etching of the upper film on both sides of the microguide so as to fix the shape of the absorbers, E) depositing an absorbant film on the structure obtained at D, and possibly F) etching of the absorbant film so as to delimit the absorbers.
Claim 22
Dependent Claim
110 words
Method according to claim 16, wherein it includes the following stages: A') successive depositings of a buffer film, a guide film and an upper film on the substrate, the guide film having a refraction index larger than that of the buffer and upper films, B') etching of the upper film so as to form the microguide, C') depositing an absorbant film on the structure obtained at B', D') etching of the absorbant film so as to fix the shape of the absorbers, and E') possible depositing a protection film on the structure obtained at D' and having a refraction index equal at the most to that of the upper film.
Claim 23
Dependent Claim
39 words
Method according to claim 18, wherein the buffer film and the upper film are made of silica, possibly doped with dopers reducing its refraction index, and wherein the guide film is made of aluminium, silicon nitride or silicon oxinitride.
Claim 24
Dependent Claim
41 words
Method according to claim 19, wherein the buffer film and the upper film are made of silica, possibly doped with dopers reducing its refraction index, and wherein the guide film is made of silica doped with dopers increasing its refraction index.
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1995-03-03 | 1995-09-02 | 1996-03-03 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-03-03 | 1999-09-02 | 2000-03-03 | $3760.00 | Window Closed / Lapsed |
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