Patent US5537147A successfully refreshed from Google Patents.
Patent US5089747A successfully refreshed from Google Patents.
US5089747A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Electron beam excitation ion source
Assignee: Tokyo Electron Ltd
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Filing: 1990-02-16
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Granted: 1992-02-18
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Expires: 2010-02-16
Abstract
Abstract An electron beam excitation ion source includes a housing having an ion generation chamber therein, a port for supplying a discharge gas to the ion generation chamber, a porous electrode for supplying accelerated electrons to the ion generation chamber from an electron generation chamber, causing the accelerated electrons to collide against the discharge gas to generate a plasma containing ions in the ion generation chamber. The housing have an ion extraction slit port through which the ions are extracted from the ion generation chamber outside the housing. An electrode is formed around the ion extraction port, for causing a local discharge around the ion extraction port so as to guide the ions in the plasma to the ion extraction port.
Inventors
- 👤 Akira Koshiishi
- 👤 Kohei Kawamura
- 👤 Naoki Takayama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-09 15:10
CPC Classifications
H; H01; H01J; H01J27/00; H01J27/02; H01J37/00; H01J37/02; H01J37/04; H01J37/08; H01J27/20
Claims Analysis
Total Claims: 10
Claim 1
Independent Claim
235 words
An electron beam excitation ion source comprising: a housing having an electron generation chamber, an ion generation chamber, and a partition wall for separating the ion and electron generation chambers, the electron generation chamber including a discharge gas supply port through which a discharge gas is supplied into the electron generation chamber, and the ion generation chamber including a source gas supply port through which a source gas is supplied into the ion generation chamber; means for generating a discharge gas plasma using the discharge gas in the electron generation chamber; means for extracting electrons from the discharge gas plasma, and accelerating and transporting the electrons into the ion generation chamber from the electron generation chamber through the partition wall, so that the accelerated electrons collide against the source gas to generate a source gas plasma including source gas ions in the ion generation chamber; an ion extraction port formed in said housing though which the source gas ions are extracted from the ion generation chamber outside said housing; and means for generating in the ion generation chamber an eccentric electric field producing a local discharge around said ion extraction port so as to guide the source gas ions to said ion extraction port, the eccentric electric field having a higher intensity near the ion extraction port than other portions of the ion generation chamber to produce said local discharge around said ion extraction port.
Claim 2
Dependent Claim
235 words
An electron beam excitation ion source comprising: a housing having an electron generation chamber, an ion generation chamber, and a partition wall for separating the ion and electron generation chambers, the electron generation chamber including a discharge gas supply port through which a discharge gas is supplied into the electron generation chamber, and the ion generation chamber including a source gas supply port through which a source gas is supplied into the ion generation chamber; means for generating a discharge gas plasma using the discharge gas in the electron generation chamber; means for extracting electrons from the discharge gas plasma, and accelerating and transporting the electrons into the ion generation chamber from the electron generation chamber through the partition wall, so that the accelerated electrons collide against the source gas to generate a source gas plasma including source gas ions in the ion generation chamber; an ion extraction port formed in said housing though which the source gas ions are extracted from the ion generation chamber outside said housing; and means for generating in the ion generation chamber an eccentric electric field producing a local discharge around said ion extraction port so as to guide the source gas ions to said ion extraction port, the eccentric electric field having a higher intensity near the ion extraction port than other portions of the ion generation chamber to produce said local discharge around said ion extraction port.
Claim 3
Dependent Claim
18 words
An ion source according to claim 1, wherein said housing includes a slit constituting said ion extraction port.
Claim 4
Dependent Claim
30 words
An ion source according to claim 2, wherein said housing includes a side wall which defines said slit and has a conductive portion constituting said eccentric electric field generating means.
Claim 5
Dependent Claim
69 words
An ion source according to claim 2, wherein a side wall of said housing is made of a conductive material, and further comprising an electrically insulating cylinder, formed in said housing so as to be located along said side wall, for defining said ion generation chamber therein, said cylinder having an opening for exposing said slit and a side wall portion around said slit to said ion generation chamber.
Claim 6
Dependent Claim
36 words
An ion source according to claim 4, wherein said opening of said cylinder is larger than said slit and exposes said side wall portion around the entire periphery of said slit to said ion generation chamber.
Claim 7
Dependent Claim
131 words
An ion source according to claim 2, wherein said electric field generating means comprises a conductive plate arranged outside said housing near said ion extraction port, and an insulating plate, arranged between said conductive plate and said housing, for electrically insulating said conductive plate from said housing, said insulating plate having a first opening which communicates with said ion extraction port, and said conductive plate having a second opening which communicates with said ion extraction port through said first opening, the ions being extracted from said ion generation chamber to the outside of said housing via said first and second openings, and said first opening being larger than said second opening such that said first opening exposes a portion of an electrode plate around said second opening to said second opening.
Claim 8
Dependent Claim
44 words
An ion source according to claim 1, comprising said electron generation chamber having an electron extraction hole which communicates with said ion generation chamber, and a pourous electrode being spaced apart from said partition wall by a distance of not more than 10 mm.
Claim 9
Dependent Claim
23 words
An ion source according to claim 7, wherein said partition wall opposes said porous electrode with an interval of 5 to 6 mm.
Claim 10
Dependent Claim
39 words
An ion source according to claim 1 wherein said eccentric electric field generating means includes an electrode formed around said ion extraction port and an insulating means disposed in the ion generation chamber so that the electrode is exposed.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1995-02-17 | 1995-08-19 | 1996-02-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-02-17 | 1999-08-19 | 2000-02-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-02-17 | 2003-08-19 | 2004-02-18 | $7700.00 | Window Closed / Lapsed |