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US5089290A
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Method for generating glow-polymerisate layers
Assignee: Siemens AG
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Filing: 1990-11-30
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Granted: 1992-02-18
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Expires: 2010-11-30
Abstract
Abstract Starting from hydrocarbons and/or fluorocarbons, glow polymerisate layers can be generated on a substrate by means of a high-frequency low-pressure glow discharge. Chemically stable layers are obtained if the glow polymerisate is subjected, after the preparation and with the exclusion of air, to an annealing process in an atmosphere of hydrocarbon and/or fluorocarbon monomers at temperatures between 100° and 450° C. for 1 to 10 hours, or if the substrate is heated to temperatures between 100° and 450° C. during the preparation of the glow polymerisate.
Inventors
- 👤 Wolf Kleeberg
- 👤 Johann Kammermaier
- 👤 Rolf-Winfried Schulte
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-31 16:09
CPC Classifications
B; B05; B05D; B05D1/00; B05D1/62; B05D3/00; B05D3/04; B05D3/0433; B05D3/0453; B05D3/14; C; C08; C08F; C08F114/00; C08F114/18; C08F114/26; C08F2/00; C08F2/46; C08F2/52; B05D3/02; B05D3/0254
Claims Analysis
Total Claims: 17
Claim 1
Independent Claim
80 words
A method for the generation of polymer layers on a substrate comprising: glow discharging monomers selected from the group consisting of hydrocarbons, fluorocarbons and mixtures of hydrocarbons and fluorocarbons at a high frequency and low pressure to form polymer layers on the substrate, and annealing the polymer layers in an atmosphere comprising at least one hydrocarbon and/or fluorocarbon monomer and in the absence of air at a temperature of between 100° and 450° C. for between 1 and 10 hours.
Claim 2
Independent Claim
80 words
A method for the generation of polymer layers on a substrate comprising: glow discharging monomers selected from the group consisting of hydrocarbons, fluorocarbons and mixtures of hydrocarbons and fluorocarbons at a high frequency and low pressure to form polymer layers on the substrate, and annealing the polymer layers in an atmosphere comprising at least one hydrocarbon and/or fluorocarbon monomer and in the absence of air at a temperature of between 100° and 450° C. for between 1 and 10 hours.
Claim 3
Dependent Claim
24 words
The method of claim 1 wherein said annealing atmosphere also further comprises a reactive gas selected from the group consisting of hydrogen and fluorine.
Claim 4
Dependent Claim
33 words
The method of claim 1 wherein said annealing atmosphere further comprises a reactive gas selected from the group consisting of oxygen, sulfur dioxide, steam and mixtures thereof, ammonia, primary amines and secondary amines.
Claim 5
Independent Claim
17 words
The method of claims 1 or 3 wherein said annealing is carried out in an electric field.
Claim 6
Independent Claim
20 words
The method of claims 1 or 3 wherein said annealing is carried out at a temperature of about 400° C.
Claim 7
Dependent Claim
13 words
The method of claim 5 wherein said glow discharged monomer is a perfluorocarbon.
Claim 8
Dependent Claim
10 words
The method of claim 6 wherein said perfluorocarbon is octafluorocyclobutane.
Claim 9
Independent Claim
15 words
The method of claims 1 or 3 wherein said glow discharged monomer is a perfluorocarbon.
Claim 10
Dependent Claim
10 words
The method of claim 6 wherein said perfluorocarbon is octafluorocyclobutane.
Claim 11
Independent Claim
64 words
A method for the generation of polymer layers on a substrate comprising glow discharging monomers on a substrate in the absence of air and heating said substrate to a temperature of between 100° C. and 450° C. during the glow discharging of the monomers, wherein said glow discharged monomers are selected from the group consisting of hydrocarbons, fluorocarbons and mixtures of hydrocarbons and fluorocarbons.
Claim 12
Independent Claim
64 words
A method for the generation of polymer layers on a substrate comprising glow discharging monomers on a substrate in the absence of air and heating said substrate to a temperature of between 100° C. and 450° C. during the glow discharging of the monomers, wherein said glow discharged monomers are selected from the group consisting of hydrocarbons, fluorocarbons and mixtures of hydrocarbons and fluorocarbons.
Claim 13
Dependent Claim
11 words
The method of claim 10 wherein said monomer is a perfluorocarbon.
Claim 14
Dependent Claim
10 words
The method of claim 11 wherein said perfluorocarbon is octafluorocyclobutane.
Claim 15
Dependent Claim
12 words
The method of claim 12 wherein said temperature is about 400° C.
Claim 16
Dependent Claim
12 words
The method of claim 11 wherein said temperature is about 400° C.
Claim 17
Dependent Claim
12 words
The method of claim 10 wherein said temperature is about 400° C.
References Cited (Backward Citations)
US4096315A
Cited
US4252848A
Cited
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1995-02-17 | 1995-08-19 | 1996-02-18 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-02-17 | 1999-08-19 | 2000-02-18 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2003-02-17 | 2003-08-19 | 2004-02-18 | $7700.00 | Window Closed / Lapsed |