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US5087547A
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Dual-tone photoresist utilizing diazonaphthoquinone resin and carbodiimide stabilizer
Assignee: LONDON CHEMICAL COMPANY Inc A DE CORP
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Filing: 1990-03-02
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Granted: 1992-02-11
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Expires: 2010-03-02
Abstract
Abstract The resolution and stability of liquid, dual-tone photoresist formulations containing novolac resins and photoactive compounds are enhanced by the incorporation therein of certain carbodiimide resolution enhancers.
Inventors
- 👤 James W. Taylor
- 👤 David R. Bassett
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 18:02
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/022; G03F7/0226
Claims Analysis
Total Claims: 22
Claim 1
Independent Claim
93 words
A liquid, dual-tone photoresist formulation of improved stability for the production of positive or negative images comprising a photoresist of a phenol-formaldehyde resin and a diazonaphthoquinone sensitizer wherein the diazonaphthoquinone sensitizer is attached to the backbone of said phenol-formaldehyde resin; and a stabilizing amount of a carbodiimide of the formula: R--N═C═N--R wherein each R, independently, can be a secondary or tertiary alkyl group of from 3 to 30 carbon atoms, a cycloalkyl group of up to 30 carbon atoms, or one R can be an aryl group of up to 30 carbon atoms.
Claim 2
Dependent Claim
93 words
A liquid, dual-tone photoresist formulation of improved stability for the production of positive or negative images comprising a photoresist of a phenol-formaldehyde resin and a diazonaphthoquinone sensitizer wherein the diazonaphthoquinone sensitizer is attached to the backbone of said phenol-formaldehyde resin; and a stabilizing amount of a carbodiimide of the formula: R--N═C═N--R wherein each R, independently, can be a secondary or tertiary alkyl group of from 3 to 30 carbon atoms, a cycloalkyl group of up to 30 carbon atoms, or one R can be an aryl group of up to 30 carbon atoms.
Claim 3
Dependent Claim
15 words
A photoresist formulation as defined in claim 1 wherein the said diazonaphthoquinone is 1,2-naphthoquinone-(2)-diazo-5-sulfonyl chloride.
Claim 4
Dependent Claim
15 words
A photoresist formulation as defined in claim 1 wherein the said carbodiimide is dicyclohexyl carbodiimide.
Claim 5
Dependent Claim
28 words
The formulation of claim 1 wherein the carbodiimide is present in an amount of from about 0.1 to about 50 weight percent based on the weight of resin.
Claim 6
Dependent Claim
16 words
The formulation of claim 1 wherein each R of the carbodiimide is a secondary alkyl group.
Claim 7
Dependent Claim
15 words
The formulation of claim 1 wherein each R of the carbodiimide is an isopropyl group.
Claim 8
Dependent Claim
16 words
The formulation of claim 1 wherein each R of the carbodiimide is a tertiary alkyl group.
Claim 9
Dependent Claim
16 words
The formulation of claim 1 wherein each R of the carbodiimide is a tertiary butyl group.
Claim 10
Dependent Claim
15 words
The formulation of claim 1 wherein each R of the carbodiimide is a cylcoalkyl group.
Claim 11
Dependent Claim
15 words
The formulation of claim 1 wherein each R of the carbodiimide is a cyclohexyl group.
Claim 12
Dependent Claim
93 words
A process for providing a liquid, dual-tone photoresist formulation of improved stability which comprises adding to a photoresist of a phenol-formaldehyde resin and a diazonaphthoquinone sensitizer wherein the diazonaphthoquinone sensitizer is attached to the backbone of said phenol-formaldehyde resin, at least a stabilizing amount of a carbodiimide of the formula: R--N═C═N--R wherein each R, independently, can be a secondary or tertiary alkyl group of from 3 to 30 carbon atoms, a cycloalkyl group of up to 30 carbon atoms, or one R can be an aryl group of up to 30 carbon atoms.
Claim 13
Dependent Claim
93 words
A process for providing a liquid, dual-tone photoresist formulation of improved stability which comprises adding to a photoresist of a phenol-formaldehyde resin and a diazonaphthoquinone sensitizer wherein the diazonaphthoquinone sensitizer is attached to the backbone of said phenol-formaldehyde resin, at least a stabilizing amount of a carbodiimide of the formula: R--N═C═N--R wherein each R, independently, can be a secondary or tertiary alkyl group of from 3 to 30 carbon atoms, a cycloalkyl group of up to 30 carbon atoms, or one R can be an aryl group of up to 30 carbon atoms.
Claim 14
Dependent Claim
11 words
The process of claim 11 wherein said diazonaphthoquinone is 1,2-naphthoquinone-(2)-diazo-5-sulfonyl chloride.
Claim 15
Dependent Claim
12 words
The process of claim 11 wherein the said carbodiimide is dicyclohexyl carbodiimide.
Claim 16
Dependent Claim
28 words
The process of claim 11 wherein the carbodiimide is present in an amount of from about 0.1 to about 50 weight percent based on the weight of resin.
Claim 17
Dependent Claim
16 words
The process of claim 11 wherein each R of the carbodiimide is a secondary alkyl group.
Claim 18
Dependent Claim
15 words
The process of claim 11 wherein each R of the carbodiimide is an isopropyl group.
Claim 19
Dependent Claim
16 words
The process of claim 11 wherein each R of the carbodiimide is a tertiary alkyl group.
Claim 20
Dependent Claim
16 words
The process of claim 11 wherein each R of the carbodiimide is a tertiary butyl group.
Claim 21
Dependent Claim
15 words
The process of claim 11 wherein each R of the carbodiimide is a cylcoalkyl group.
Claim 22
Dependent Claim
15 words
The process of claim 11 wherein each R of the carbodiimide is a cyclohexyl group.
References Cited (Backward Citations)
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1995-02-10 | 1995-08-12 | 1996-02-11 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1999-02-10 | 1999-08-12 | 2000-02-11 | $3760.00 | Window Closed / Lapsed |
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