Abstract A method for the production of a semiconductor device in which wiring is formed in three dimensions by the use of interlevel insulators having a flat surface, which method comprises the steps of: applying first insulation material and hardening by heat treatment to form an insulating film made of the first material; etching the insulating film made of the first material in such a manner that only concave portions of an underlying layer are filled with an insulator made of the first material; and forming an insulating film made of a second material thereon, wherein the interlevel insulator is formed by repeating the steps for at least two times so as to have a plurality of the insulators made of the first material which are separated by the insulating films made of the second material.
A method for the production of a semiconductor device in which wiring is formed in three dimensions by the use of an interlevel insulator, which method comprises the steps of: applying first insulation material and hardening by heat treatment to form an insulating film made of the first material; etching said insulating film made of the first material in such a manner that only concave portions of an underlying layer are filled with an insulator made of the first material; and forming an insulating film made of a second material therein, wherein said interlevel insulator is formed by repeating said steps for at least two times so as to have a plurality of said insulators made of the first material which are separated by said insulating films made of the second material.
Claim 2
Independent Claim
132 words
A method for the production of a semiconductor device in which wiring is formed in three dimensions by the use of an interlevel insulator, which method comprises the steps of: applying first insulation material and hardening by heat treatment to form an insulating film made of the first material; etching said insulating film made of the first material in such a manner that only concave portions of an underlying layer are filled with an insulator made of the first material; and forming an insulating film made of a second material therein, wherein said interlevel insulator is formed by repeating said steps for at least two times so as to have a plurality of said insulators made of the first material which are separated by said insulating films made of the second material.
Claim 3
Dependent Claim
21 words
A method for the production of a semiconductor device according to claim 1, wherein said first material is organic silanol glass.
Claim 4
Dependent Claim
28 words
A method for the production of a semiconductor device according to claim 1, wherein said insulating film made of the second material is formed by chemical vapor deposition.