US4676867A
Expired / Lapsed
US
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Planarization process for double metal MOS using spin-on glass as a sacrificial layer
Assignee: Newport Fab LLC
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Filing: 1986-06-06
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Granted: 1987-06-30
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Expires: 2006-06-06
Abstract
Abstract A method of providing a planar or iso-planar surface to the interlevel dielectric layer between metal layers of a multilevel MOS wafer includes applying a first dielectric over the first metal layer, applying a layer of spin-on glass over the first dielectric layer, etching the spin-on glass layer in an etch process in which the rate of etch of the spin-on glass is approximately the same as the rate of etch of the first dielectric to reveal at least a portion of the first dielectric layer. A second dielectric layer is placed over the surface of the first dielectric. Vias may then be defined through the dielectric layers, and the second metal layer may be applied over the relatively smooth surface of the second dielectric layer.
Inventors
- 👤 Patricia C. Elkins
- 👤 Yau-Wai D. Chan
- 👤 Keh-Fei C. Chi
- 👤 Karen A. Reinhardt
- 👤 Rebecca Y. Tang
- 👤 Robert L. Zwingman
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 02:36
CPC Classifications
H; H10; H10W; H10W20/00; H10W20/01; H10W20/031; H10W20/064; H10P; H10P50/00; H10P50/20; H10P50/28; H10P50/282; H10P50/283; H10P95/00; H10P95/06; H10P95/062; H10P95/064; H10W20/071; H10W20/092
Claims Analysis
Total Claims: 21
Claim 1
Independent Claim
71 words
In a method of fabricating a semiconductor wafer, a method of obtaining a topographically planar or iso-planar surface comprising: applying a first layer of dielectric material over a first metal layer: applying a layer of spin-on glass over said first dielectric layer; etching said spin-on glass layer to reveal at least a portion of said first dielectric layer; and applying a second layer of dielectric over said first layer of dielectric.
Claim 2
Dependent Claim
71 words
In a method of fabricating a semiconductor wafer, a method of obtaining a topographically planar or iso-planar surface comprising: applying a first layer of dielectric material over a first metal layer: applying a layer of spin-on glass over said first dielectric layer; etching said spin-on glass layer to reveal at least a portion of said first dielectric layer; and applying a second layer of dielectric over said first layer of dielectric.
Claim 3
Dependent Claim
25 words
The method of claim 1 wherein said spin-on glass is etched to reveal said first layer at least over a portion of a metal conductor.
Claim 4
Dependent Claim
29 words
The method of claim 2 wherein said spin-on glass is etched to reveal said first dielectric layer at least in the areas in which vias are to be defined.
Claim 5
Dependent Claim
16 words
The method of claim 1 additionally comprising, prior to said etching step, curing said spin-on glass.
Claim 6
Dependent Claim
28 words
The method of claim 4 wherein the rate of etch of said spin-on glass is substantially the same as the rate of etch of said first dielectric layer.
Claim 7
Dependent Claim
31 words
The method of claim 5 wherein the rate of etch of said spin-on glass is within the range of 0.8 to 1.3 times the rate of etch of said first dielectric.
Claim 8
Dependent Claim
26 words
The method of claim 6 wherein said curing step comprises baking said wafer for at least one minute at a temperature of at least 150° C.
Claim 9
Dependent Claim
48 words
The method of claim 4 wherein said etching step comprises plasma etching with C 2 F 6 in a ratio of approximately 1:2 with helium, and having sufficient oxygen added to cause the said spin-on glass to be etched at approximately the same rate as said first dielectric.
Claim 10
Dependent Claim
26 words
The method of claim 8 wherein the ratio of helium (He) and C 2 F 6 to oxygen (O 2 ) is approximately thirty to one.
Claim 11
Dependent Claim
81 words
The method of claim 8 wherein: said step of applying a first layer of dielectric material comprises depositing, using a plasma enhanced chemical vapor deposition process, a phosphorous doped oxide having a phosphorous content of no more than approximately four percent by weight; said step of applying a layer of spin-on glass comprises applying an organic siloxane; said step of curing said spin-on glass comprises baking said wafer for at least one minute at a temperature of at least 150° C.
Claim 12
Dependent Claim
20 words
The method of claim 8 wherein said oxygen makes up approximately five percent of the total etch process gas flow.
Claim 13
Dependent Claim
146 words
In a method of fabricating a semiconductor wafer having multiple levels of metallization, a method of providing an interlevel dielectric layer having a substantially planar surface, comprising: depositing, using a plasma enhanced chemical vapor deposition process, a first dielectric layer of phosphorous-doped glass over a first metal layer; applying a layer of undoped siloxane spin-on glass over said first dielectric layer; curing said spin-on glass to substantially convert it to silicon dioxide; etching away at least a portion of said spin-on glass and a portion of said first dielectric layer in an etch process in which the rate of etch of said spin-on glass is approximately the same as the rate of etch of said phosphorous-doped glass; and depositing, using the plasma enhanced chemical vapor deposition process, a second dielectric layer of phosphorous-doped glass over the remainder of said first dielectric layer and said spin-in glass.
Claim 14
Dependent Claim
146 words
In a method of fabricating a semiconductor wafer having multiple levels of metallization, a method of providing an interlevel dielectric layer having a substantially planar surface, comprising: depositing, using a plasma enhanced chemical vapor deposition process, a first dielectric layer of phosphorous-doped glass over a first metal layer; applying a layer of undoped siloxane spin-on glass over said first dielectric layer; curing said spin-on glass to substantially convert it to silicon dioxide; etching away at least a portion of said spin-on glass and a portion of said first dielectric layer in an etch process in which the rate of etch of said spin-on glass is approximately the same as the rate of etch of said phosphorous-doped glass; and depositing, using the plasma enhanced chemical vapor deposition process, a second dielectric layer of phosphorous-doped glass over the remainder of said first dielectric layer and said spin-in glass.
Claim 15
Dependent Claim
28 words
The method of claim 12 wherein said curing step comprises placing said wafer on a hot plate at a temperature of approximately 150° C. for approximately one minute.
Claim 16
Dependent Claim
22 words
The method of claim 13 wherein said phosphorous-doped glass has a phosphorous content less than or equal to four percent by weight.
Claim 17
Dependent Claim
33 words
The method of claim 14 wherein said etching step comprises plasma etching with C 2 F 6 in a ratio of approximately 1:2 with helium, and with a concentration of 3-5 percent oxygen.
Claim 18
Dependent Claim
168 words
In a method of fabricating a semiconductor wafer having multiple levels of metallization, a method of providing an interlevel dielectric layer having a substantially planar surface, comprising: depositing, using a plasma, enhanced chemical vapor deposition process, a first dielectric layer of phosphorous-doped glass over a first metal layer; applying a layer of undoped organic siloxane spin-on glass over said first dielectric layer; curing said spin-on glass to substantially convert it to silicon dioxide; etching away at least a portion of said spin-on glass and a portion of said first dielectric layer in an etch process in which the rate of etch of said spin-on glass is approximately the same as the rate of etch of said phosphorous-doped glass until all of said spin-on glass is removed from the areas in which vias are to be defined; and depositing, using the plasma enhanced chemical vapor deposition process, a second dielectric layer of phosphorous-doped glass over the remainder of said first dielectric layer and any remainder of said spin-in glass.
Claim 19
Dependent Claim
168 words
In a method of fabricating a semiconductor wafer having multiple levels of metallization, a method of providing an interlevel dielectric layer having a substantially planar surface, comprising: depositing, using a plasma, enhanced chemical vapor deposition process, a first dielectric layer of phosphorous-doped glass over a first metal layer; applying a layer of undoped organic siloxane spin-on glass over said first dielectric layer; curing said spin-on glass to substantially convert it to silicon dioxide; etching away at least a portion of said spin-on glass and a portion of said first dielectric layer in an etch process in which the rate of etch of said spin-on glass is approximately the same as the rate of etch of said phosphorous-doped glass until all of said spin-on glass is removed from the areas in which vias are to be defined; and depositing, using the plasma enhanced chemical vapor deposition process, a second dielectric layer of phosphorous-doped glass over the remainder of said first dielectric layer and any remainder of said spin-in glass.
Claim 20
Dependent Claim
239 words
In a method of fabricating a semiconductor wafer having multiple levels of metallization, a method of providing an interlevel dielectric layer having a substantially planar surface, comprising: depositing, using a plasma enhanced chemical vapor deposition process, a first dielectric layer of phosphorous-doped glass over a first metal layer, said phosphorous-doped glass having a phosphorous concentration of no more than four percent by weight; applying a layer of undoped siloxane spin-on glass over said first dielectric layer; curing said spin-on glass by baking it for at least one minute at a temperature of at least 150° C.; etching away at least a portion of said spin-on glass and a portion of said first dielectric layer in a plasma etch process in which the plasma comprises a 1:2 ratio of C 2 F 6 to helium, and approximately 3-5 percent oxygen so that the rate of etch of of said spin-on glass is approximately the same as the rate of etch of said phosphorous-doped glass until all of said spin-on glass is removed from the areas in which vias are to be defined to permit connection between said first metal layer and a subsequent metal layer; and depositing, using the plasma enhanced chemical vapor deposition process, a second dielectric layer of phosphorous-doped glass over the remainder of said first dielectric layer and said spin-in glass, said phosphorous doped glass having a phosphorous concentration of no more than four percent by weight.
Claim 21
Dependent Claim
239 words
In a method of fabricating a semiconductor wafer having multiple levels of metallization, a method of providing an interlevel dielectric layer having a substantially planar surface, comprising: depositing, using a plasma enhanced chemical vapor deposition process, a first dielectric layer of phosphorous-doped glass over a first metal layer, said phosphorous-doped glass having a phosphorous concentration of no more than four percent by weight; applying a layer of undoped siloxane spin-on glass over said first dielectric layer; curing said spin-on glass by baking it for at least one minute at a temperature of at least 150° C.; etching away at least a portion of said spin-on glass and a portion of said first dielectric layer in a plasma etch process in which the plasma comprises a 1:2 ratio of C 2 F 6 to helium, and approximately 3-5 percent oxygen so that the rate of etch of of said spin-on glass is approximately the same as the rate of etch of said phosphorous-doped glass until all of said spin-on glass is removed from the areas in which vias are to be defined to permit connection between said first metal layer and a subsequent metal layer; and depositing, using the plasma enhanced chemical vapor deposition process, a second dielectric layer of phosphorous-doped glass over the remainder of said first dielectric layer and said spin-in glass, said phosphorous doped glass having a phosphorous concentration of no more than four percent by weight.
References Cited (Backward Citations)
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| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
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| 3.5 Years (Year 4) | 1990-06-29 | 1990-12-29 | 1991-06-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1994-06-29 | 1994-12-29 | 1995-06-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1998-06-29 | 1998-12-29 | 1999-06-30 | $7700.00 | Window Closed / Lapsed |