Patent US939936A successfully refreshed from Google Patents.
Patent US5075201A successfully refreshed from Google Patents.
US5075201A
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Method for aligning high density infrared detector arrays
Assignee: Grumman Corp
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Filing: 1990-10-31
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Granted: 1991-12-24
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Expires: 2010-10-31
Abstract
Abstract A method for aligning infrared detector arrays having a high density of pixel elements to the surface of a signal processing module or the like is disclosed. The process comprises the steps of forming a plurality of indicia upon the second side of the infrared detector array, forming a corresponding plurality of reference indices upon the support surface, the indices being disposed in a predetermined position relative to the electrical connectors, attaching the second side of the infrared detector array to a transparent substrate and positioning the detector array adjacent the support surface and aligning the indicia to the reference indices by observing the indicia formed upon the second side of the array by looking through the transparent substrate. Three embodiments of indicia are disclosed. A through hole indicia passes from the first surface of the infrared detector array to the second surface thereof, a plurality of fiducial indicia can be formed upon the second surface of the infrared detector array, or notches can be formed in the edges of the infrared detector array and/or substrate.
Inventors
- 👤 Wei H. Koh
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-04 12:43
CPC Classifications
H; H10; H10F; H10F39/00; H10F39/10; H10F39/12; H10F39/18; H10F39/184; H10F39/1843; H10W; H10W46/00; H10W46/301; H10W46/601; H10W72/00; H10W72/071; H10W72/072; H10W72/07231; H10W72/07236; Y; Y10; Y10S; Y10S430/00; Y10S430/145
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
173 words
A method for aligning an infrared detector array with an array of electrical connectors formed on a support surface, the infrared detector array having first and second sides, and a plurality of detector elements formed upon the first side thereof, the method comprising the steps of: (a) forming a plurality of indicia upon the second side of the infrared detector array, the indicia being disposed in predetermined positions in relation to the detector elements; (b) forming a corresponding plurality of reference indices upon the support surface proximate the array of electrical connectors such that the indices are disposed in predetermined positions in relation to the electrical connectors; (c) attaching the second side of the infrared detector array to a substrate, the substrate being transparent; and (d) positioning the first side of the detector array upon the support surface and aligning the indicia to the reference indices by observing the indicia through the transparent substrate wherein alignment of the indicia and reference indices results in alignment of the detector elements with the electrical connectors.
Claim 2
Independent Claim
173 words
A method for aligning an infrared detector array with an array of electrical connectors formed on a support surface, the infrared detector array having first and second sides, and a plurality of detector elements formed upon the first side thereof, the method comprising the steps of: (a) forming a plurality of indicia upon the second side of the infrared detector array, the indicia being disposed in predetermined positions in relation to the detector elements; (b) forming a corresponding plurality of reference indices upon the support surface proximate the array of electrical connectors such that the indices are disposed in predetermined positions in relation to the electrical connectors; (c) attaching the second side of the infrared detector array to a substrate, the substrate being transparent; and (d) positioning the first side of the detector array upon the support surface and aligning the indicia to the reference indices by observing the indicia through the transparent substrate wherein alignment of the indicia and reference indices results in alignment of the detector elements with the electrical connectors.
Claim 3
Dependent Claim
40 words
The method as recited in claim 1 wherein the step of forming a plurality of indicia comprises forming apertures through the detector array, the apertures extending from the first side of the array to the second side of the array.
Claim 4
Dependent Claim
49 words
The method as recited in claim 2 further comprising the step of defining the locations where apertures are to be formed by providing corresponding indicia on a detector pixel implant mask such that the locations are marked on the first side of the array during the pixel implant process.
Claim 5
Dependent Claim
35 words
The method as recited in claim 3 wherein the step of forming apertures through the detector array comprises etching apertures through the detector array at the locations marked on the first side of the array.
Claim 6
Dependent Claim
34 words
The method as recited in claim 4 wherein the step of etching apertures through the detector array further comprises using an etchant specific to the detector material such that the substrate is not etched.
Claim 7
Dependent Claim
38 words
The method as recited in claim 3 wherein the step of forming apertures comprises the step of forming apertures through the detector array with a laser, the apertures being formed at the locations marked on the first side.
Claim 8
Dependent Claim
28 words
The method as recited in claim 6 wherein the step of forming apertures through the detector array with a laser comprises forming apertures with a XeCl excimer laser.
Claim 9
Dependent Claim
28 words
The method as recited in claim 1 wherein the step of forming a plurality of indicia comprises etching the indicia upon the second side of the detector array.
Claim 10
Dependent Claim
79 words
The method as recited in claim 8 wherein the step of etching the indicia upon the second side comprises: (a) placing the detector array in a double side mask aligner; (b) aligning a mask for the second side of the detector array to a primary reference located on the first side of the detector array, said mask having the indicia formed thereon; and (c) exposing and developing the second side of the detector array to form the indicia thereon.
Claim 11
Independent Claim
241 words
A method for aligning an infrared detector array with an array of electrical connectors formed on a support surface, the infrared detector array having first and second sides, and a plurality of detector elements formed upon the first side thereof, the method comprising the steps of: (a) defining the locations where apertures are to be formed by providing corresponding indicia on a detector pixel implant mask such that the locations are marked on the first side of the array during the pixel implant process; (b) forming apertures through the detector array with a laser, the apertures extending from the first side of the array to the second side of the array, the apertures being formed at locations marked on the first side of the detector array, the apertures being disposed in predetermined positions in relation to the detector elements; (c) forming a corresponding plurality of reference indices upon the support surface proximate the array of electrical connectors such that the indices are disposed in predetermined positions in relation to the electrical connectors; (d) attaching the second side of the infrared detector array to a substrate, the substrate being transparent; and (e) positioning the first side of the detector array in laminar juxtaposition to the support surface and aligning the indicia to the reference indices by observing the indicia through the transparent substrate wherein alignment of the indicia and reference indices results in alignment of the detector elements with the electrical connectors.
Claim 12
Independent Claim
241 words
A method for aligning an infrared detector array with an array of electrical connectors formed on a support surface, the infrared detector array having first and second sides, and a plurality of detector elements formed upon the first side thereof, the method comprising the steps of: (a) defining the locations where apertures are to be formed by providing corresponding indicia on a detector pixel implant mask such that the locations are marked on the first side of the array during the pixel implant process; (b) forming apertures through the detector array with a laser, the apertures extending from the first side of the array to the second side of the array, the apertures being formed at locations marked on the first side of the detector array, the apertures being disposed in predetermined positions in relation to the detector elements; (c) forming a corresponding plurality of reference indices upon the support surface proximate the array of electrical connectors such that the indices are disposed in predetermined positions in relation to the electrical connectors; (d) attaching the second side of the infrared detector array to a substrate, the substrate being transparent; and (e) positioning the first side of the detector array in laminar juxtaposition to the support surface and aligning the indicia to the reference indices by observing the indicia through the transparent substrate wherein alignment of the indicia and reference indices results in alignment of the detector elements with the electrical connectors.
Claim 13
Dependent Claim
28 words
The method as recited in claim 10 wherein the step of forming apertures through the detector array with a laser comprises forming apertures with a XeCl excimer laser.
References Cited (Backward Citations)
US3603369A
Cited
US3963489A
Cited
US4179990A
Cited
US4551629A
Cited
JPS58173831A
Cited
JPS5965431A
Cited
US4883359A
Cited
US4617160A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-12-23 | 1995-06-24 | 1995-12-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-12-23 | 1999-06-24 | 1999-12-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-12-23 | 2003-06-24 | 2003-12-24 | $7700.00 | Window Closed / Lapsed |