US5074017A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Susceptor
Assignee: Coorstek KK
•
Filing: 1989-12-26
•
Granted: 1991-12-24
•
Expires: 2009-12-26
Abstract
Abstract A susceptor for use in a vertical vapor growth apparatus includes a susceptor body (12) having an upper surface, a plurality of wafer receiving portions (17) formed in the upper surface of the susceptor body (12), and plates (16) fixed in the upper surface of the susceptor body (12) near the wafer setting portions (17). The plates (16) have an upper surface such that, when wafers (5) are mounted in the wafer setting portions (17), the upper surfaces of the plates (16) and the wafers (5) are positioned substantially in the same plane. The plates (16) are made of quartz glass or fused silica.
Inventors
- 👤 Eiichi Toya
- 👤 Yukio Itoh
- 👤 Tadashi Ohashi
- 👤 Masayuki Sumiya
- 👤 Yasumi Sasaki
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 11:15
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/458; C23C16/4582; C23C16/4583; C23C16/4584
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
103 words
A susceptor for supporting a plurality of wafers for epitaxial crystal growth from vapor thereon, said susceptor comprising: a main body portion presenting an upper surface for supporting the wafers thereon, said main body portion including a base and a SiC coating formed on said base and presenting said upper surface; plate means embedded in said upper surface of said main body portion, said plate means defining a planar surface; and holding means, including a plurality of concave first recesses extending from said upper surface into said main body portion, for holding the wafers with their upper surfaces coplanar with said planar surface.
Claim 2
Dependent Claim
103 words
A susceptor for supporting a plurality of wafers for epitaxial crystal growth from vapor thereon, said susceptor comprising: a main body portion presenting an upper surface for supporting the wafers thereon, said main body portion including a base and a SiC coating formed on said base and presenting said upper surface; plate means embedded in said upper surface of said main body portion, said plate means defining a planar surface; and holding means, including a plurality of concave first recesses extending from said upper surface into said main body portion, for holding the wafers with their upper surfaces coplanar with said planar surface.
Claim 3
Dependent Claim
17 words
A susceptor as claimed in claim 1, wherein the plate means is is made of quartz glass.
Claim 4
Dependent Claim
16 words
A susceptor as claimed in claim 1, wherein the plate means is made of fused silica.
Claim 5
Dependent Claim
34 words
A susceptor as claimed in claim 1, wherein said upper surface of said main body portion and the upper surfaces of all wafers mounted in the holding means are within a common horizontal plane.
Claim 6
Dependent Claim
21 words
A susceptor as claimed in claim 1, wherein the plate means is a plurality of plates embedded in the susceptor body.
Claim 7
Dependent Claim
26 words
A susceptor as claimed in claim 1 wherein said holding means is a plurality of recesses formed in said upper surface of said main body portion.
Claim 8
Dependent Claim
26 words
A susceptor as claimed in claim 5 wherein said main body portion has a plurality of second recesses or grooves for receiving said plurality of plates.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-12-23 | 1995-06-24 | 1995-12-24 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-12-23 | 1999-06-24 | 1999-12-24 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-12-23 | 2003-06-24 | 2003-12-24 | $7700.00 | Window Closed / Lapsed |