US4499354A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Susceptor for radiant absorption heater system
Assignee: GNERAL INSTRUMENT Corp
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Filing: 1982-10-06
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Granted: 1985-02-12
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Expires: 2002-10-06
Abstract
Abstract A susceptor for use in a chemical vapor deposition process in a radiant absorption heating system comprises a heater adapted to absorb radiant energy and a sheath of high purity quartz completely surrounding the heater. The sheath further comprises dimples inside the sheath spacing the sheath from the heater. The heater may be graphite having a substantially pinhole-free outgas-inhibiting outer-coating such as silicon carbide.
Inventors
- 👤 Lawrence B. Hill
- 👤 Dennis Garbis
- 👤 Robert C. Heller
- 👤 Amedeo J. Granata
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 16:33
CPC Classifications
C; C30; C30B; C30B25/00; C30B25/02; C30B25/12; C23; C23C; C23C16/00; C23C16/44; C23C16/458; C23C16/4581; C23C16/48; C23C16/481
Claims Analysis
Total Claims: 18
Claim 1
Independent Claim
50 words
A susceptor for use in a chemical vapor deposition in a radiant absorption heating system comprising: (A) a heater for absorbing radiant energy and redirecting heat therefrom; and (B) a sheath of high purity quartz completely surrounding said heater for supporting on its outer surface substrates to receive vapor deposition.
Claim 2
Dependent Claim
50 words
A susceptor for use in a chemical vapor deposition in a radiant absorption heating system comprising: (A) a heater for absorbing radiant energy and redirecting heat therefrom; and (B) a sheath of high purity quartz completely surrounding said heater for supporting on its outer surface substrates to receive vapor deposition.
Claim 3
Dependent Claim
18 words
The susceptor of claim 1 further comprising means inside said sheath for spacing said sheath from said heater.
Claim 4
Dependent Claim
22 words
The susceptor of claim 2 wherein said spacing means is a part of said sheath and makes minimal contact with said heater.
Claim 5
Dependent Claim
25 words
The susceptor of claim 2 wherein said spacing means comprises protrusions from the interior surfaces of said sheath which terminate in tips of minimal area.
Claim 6
Dependent Claim
31 words
The susceptor of claim 1, 2, 3 or 4 further comprising means in said sheath for providing access to the interior of said sheath and means for closing said access means.
Claim 7
Dependent Claim
26 words
The susceptor of claim 5, wherein said sheath and said means for closing said access means together define a substantially gas-impermeable enclosure totally containing said heater.
Claim 8
Dependent Claim
19 words
The susceptor of claims 2, 3, or 4 wherein the space between said heater and said sheath is evacuated.
Claim 9
Dependent Claim
38 words
The susceptor of claims 2, 3, or 4 wherein a gas of relatively high thermal conductivity and relative inertness to the compositions of said sheath and heater is present in the space between said sheath and said heater.
Claim 10
Dependent Claim
10 words
The susceptor of claim 8 wherein said gas is helium.
Claim 11
Dependent Claim
28 words
The susceptor of claim 8 wherein the amount of gas is such as to exert a pressure of about one atmosphere at the operating temperature of said susceptor.
Claim 12
Dependent Claim
25 words
The susceptor of claims 1, 2, 3, or 4 wherein said heater has an interior of a first composition and a substantially pinhole-free outgas-inhibiting outer-coating.
Claim 13
Dependent Claim
11 words
The susceptor of claim 11 wherein said first composition is graphite.
Claim 14
Dependent Claim
13 words
The susceptor of claim 12 wherein said coating is composed of silicon carbide.
Claim 15
Dependent Claim
13 words
The susceptor of claim 11 wherein said coating is composed of silicon carbide.
Claim 16
Dependent Claim
36 words
The susceptor of claims 1, 2, 3, or 4 wherein the composition of the interior of said heater is selected from the group consisting of graphite, glassy carbon, quartz coated with black, molybdenum and silicon carbide.
Claim 17
Dependent Claim
12 words
The susceptor of claim 15 therein said interior heater composition is graphite.
Claim 18
Dependent Claim
11 words
The susceptor of claim 1 wherein said sheath is structurally self-supporting.
References Cited (Backward Citations)
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US3301213A
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US3665139A
Cited
US4093201A
Cited
US4168998A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1988-02-12 | 1988-08-13 | 1989-02-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1992-02-12 | 1992-08-13 | 1993-02-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1996-02-12 | 1996-08-13 | 1997-02-12 | $7700.00 | Window Closed / Lapsed |