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US4093201A
Expired / Lapsed
US
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Disc support structure
Assignee: Siemens AG
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Filing: 1975-12-08
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Granted: 1978-06-06
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Expires: 1995-12-08
Abstract
Abstract A support structure composed of Si or SiC for supporting semiconductor crystal discs during annealing or doping thereof. A somewhat tube-shaped member having at least one flat side is formed by thermal deposition of a gaseous silicon compound onto a similarly shaped carrier member and the tube-shaped member is then cut and mechanically processed in directions parallel and perpendicular to the axes of the tube to form a support structure having a flat base and upwardly extending curved side walls.
Inventors
- 👤 Wolfgang Dietze
- 👤 Richard Mittermeier
- 👤 Gerhard Steinwagner
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 21:20
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/01; C23C16/22; C30; C30B; C30B31/00; C30B31/06; C30B31/14; Y; Y10; Y10S; Y10S206/00; Y10S206/832; Y10S269/00; Y10S269/903
Claims Analysis
Total Claims: 2
Claim 1
Independent Claim
170 words
A support structure for supporting a plurality of crystal discs thereon during treatment of said discs, comprising: an elongated tub-shaped body having an open top, said body being composed of a material selected from the group consisting of Si and SiC, said body having a flat continuous bottom wall and upwardly extending curved side walls integrally formed with said bottom wall and being curved in opposition relative to one another, and at least one strut integrally formed with said side walls and extending upwardly beyond the periphery of said side walls a distance greater than the radius of a disc to be supported on said structure so as to form a closed arc above said bottom wall and join said curved side walls to one another; and a movable block member composed of a material selected from the group consisting of Si and SiC, said block member being of a size fitting within said tub-shaped body to support a stack of said discs at a position within said support structure.
Claim 2
Dependent Claim
170 words
A support structure for supporting a plurality of crystal discs thereon during treatment of said discs, comprising: an elongated tub-shaped body having an open top, said body being composed of a material selected from the group consisting of Si and SiC, said body having a flat continuous bottom wall and upwardly extending curved side walls integrally formed with said bottom wall and being curved in opposition relative to one another, and at least one strut integrally formed with said side walls and extending upwardly beyond the periphery of said side walls a distance greater than the radius of a disc to be supported on said structure so as to form a closed arc above said bottom wall and join said curved side walls to one another; and a movable block member composed of a material selected from the group consisting of Si and SiC, said block member being of a size fitting within said tub-shaped body to support a stack of said discs at a position within said support structure.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1981-06-05 | 1981-12-05 | 1982-06-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1985-06-05 | 1985-12-05 | 1986-06-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1989-06-05 | 1989-12-05 | 1990-06-06 | $7700.00 | Window Closed / Lapsed |