US3834349A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Device for holding semiconductor discs during high temperature treatment
Assignee: Siemens AG
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Filing: 1972-06-12
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Granted: 1974-09-10
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Expires: 1992-06-12
Abstract
Abstract A device for holding semiconductor discs during high temperature treatment, such as the diffusion of impurities therein, consisting of a base plate having grooves extending therealong, and a plurality of spaced holders supported by the base plate, the holders having slots therein which are vertically aligned with the grooves in the base plate so that a semiconductor disc positioned with its edge in one of the grooves will be supported by the slots in the holder at a position at or above its center of gravity to prevent bending of the discs during high temperature treatment.
Inventors
- 👤 W Dietze
- 👤 R Emeis
- 👤 K Reuschel
- 👤 W Keller
- 👤 A Muehlbauer
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-26 21:48
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0431; H10P72/0436; Y; Y10; Y10S; Y10S206/00; Y10S206/832; Y10S206/833; Y10S269/00; Y10S269/903
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
118 words
A device for supporting semiconductor discs for high temperature treatment comprising a base plate of semiconductor material having grooves extending therealong, a holder consisting of a tubular segment of semiconductor material, said base plate having a pair of grooves on opposite sides of and parallel to the aforementioned grooves receiving the ends of said holder therein, said holder having slots therein vertically aligned with the grooves in said base plate, each of said slots being proportioned to engage a semiconductor disc at least as high as its center of gravity when the disc is positioned standing on end in one of said grooves, each of said discs being supported with substantially edge contact in its groove and slot.
Claim 2
Independent Claim
118 words
A device for supporting semiconductor discs for high temperature treatment comprising a base plate of semiconductor material having grooves extending therealong, a holder consisting of a tubular segment of semiconductor material, said base plate having a pair of grooves on opposite sides of and parallel to the aforementioned grooves receiving the ends of said holder therein, said holder having slots therein vertically aligned with the grooves in said base plate, each of said slots being proportioned to engage a semiconductor disc at least as high as its center of gravity when the disc is positioned standing on end in one of said grooves, each of said discs being supported with substantially edge contact in its groove and slot.
Claim 3
Dependent Claim
18 words
The device of claim 1 in which both said base plate and said holder are composed of silicon.
Claim 4
Dependent Claim
22 words
The device of claim 1 in which both said base plate and said holder are composed of a Group 3-Group 5 compound.
Claim 5
Dependent Claim
22 words
The device of claim 1 in which both said base plate and said holder are composed of a Group 2-Group 6 compound.
Claim 6
Dependent Claim
19 words
The device of claim 1 in which both said base plate and said holder are composed of boron nitride.
Claim 7
Dependent Claim
19 words
The device of claim 1 in which both said base plate and said holder are composed of silicon carbide.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1977-09-09 | 1978-03-11 | 1978-09-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1981-09-09 | 1982-03-11 | 1982-09-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1985-09-09 | 1986-03-11 | 1986-09-10 | $7700.00 | Window Closed / Lapsed |