Patent US5066381A successfully refreshed from Google Patents.
US5066381A
Expired / Lapsed
US
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Target unit
Assignee: Mitsubishi Materials Corp
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Filing: 1990-10-24
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Granted: 1991-11-19
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Expires: 2010-10-24
Abstract
Abstract A target unit includes a backing plate and a target member disposed on the backing plate. The target member includes at least one erosion member of a sputtering material and at least one holding member for releasably holding the erosion member on the backing plate.
Inventors
- 👤 Kenji Ohta
- 👤 Yoshiteru Murakami
- 👤 Nobuyuki Takamori
- 👤 Kenichi Hijikata
- 👤 Takyuki Shingyoji
- 👤 Kazushige Takaishi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 02:23
CPC Classifications
C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407
Claims Analysis
Total Claims: 29
Claim 1
Independent Claim
71 words
A target unit comprising; a backing plate; and a target member disposed on said backing plate, said target member including a plurality of erosion members made of a sputtering material and at least one holding member for releasably holding said erosion members on said backing plate, said plurality of erosion members being integrally joined to said holding member by brazing while said holding member is releasably secured to said backing plate.
Claim 2
Dependent Claim
71 words
A target unit comprising; a backing plate; and a target member disposed on said backing plate, said target member including a plurality of erosion members made of a sputtering material and at least one holding member for releasably holding said erosion members on said backing plate, said plurality of erosion members being integrally joined to said holding member by brazing while said holding member is releasably secured to said backing plate.
Claim 3
Dependent Claim
29 words
A target unit as defined in claim 1, further comprising a thin piece of soft metal interposed between said backing plate and at least one of said erosion members.
Claim 4
Dependent Claim
23 words
A target unit as defined in claim 2, wherein said soft metal is selected from the group consisting of indium, tin, and aluminum.
Claim 5
Dependent Claim
27 words
A target unit as defined in claim 1, wherein said plurality of erosion members are formed and arranged so as to extend along a closed continuous line.
Claim 6
Dependent Claim
76 words
A target unit as defined in claim 1, wherein at least one of said erosion members has a side face sloping outwardly toward said backing plate while said holding member has a side face complementary to said sloping side face of said at least one of said erosion members, whereby when said holding member is pressed against said backing plate, said holding member presses said at least one of said erosion members against said backing plate.
Claim 7
Dependent Claim
24 words
A target unit as defined in claim 1, wherein said plurality of erosion members are each made of sputtering material having a different composition.
Claim 8
Dependent Claim
36 words
A target unit as defined in claim 1, wherein said backing plate has a concave surface portion on an upper face thereof, said plurality of erosion member being held in contact with said concave surface portion.
Claim 9
Dependent Claim
72 words
A target unit comprising: a backing plate; and a target member disposed on said backing plate, said target member including a plurality of erosion members made of a sputtering material and at least one holding member for releasably holding said erosion members on said backing plate, said plurality of erosion members being integrally joined to said holding member by diffusion bonding while said holding member is releasably secured to said backing plate.
Claim 10
Dependent Claim
72 words
A target unit comprising: a backing plate; and a target member disposed on said backing plate, said target member including a plurality of erosion members made of a sputtering material and at least one holding member for releasably holding said erosion members on said backing plate, said plurality of erosion members being integrally joined to said holding member by diffusion bonding while said holding member is releasably secured to said backing plate.
Claim 11
Dependent Claim
29 words
A target unit as defined in claim 8, further comprising a thin piece of soft metal interposed between said backing plate and at least one of said erosion members.
Claim 12
Dependent Claim
23 words
A target unit as defined in claim 9, wherein said soft metal is selected from the group consisting of indium, tin, and aluminum.
Claim 13
Dependent Claim
27 words
A target unit as defined in claim 8, wherein said plurality of erosion members are formed and arranged so as to extend along a closed continuous line.
Claim 14
Dependent Claim
76 words
A target unit as defined in claim 8, wherein at least one of said erosion members has a side face sloping outwardly toward said backing plate while said holding member has a side face complementary to said sloping side face of said at least one of said erosion members, whereby when said holding member is pressed against said backing plate, said holding member presses said at least one of said erosion members against said backing plate.
Claim 15
Dependent Claim
24 words
A target unit as defined in claim 8, wherein said plurality of erosion members are each made of sputtering material having a different composition.
Claim 16
Dependent Claim
36 words
A target unit as defined in claim 8, wherein said backing plate has a concave surface portion on an upper face thereof, said plurality of erosion members being held in contact with said concave surface portion.
Claim 17
Dependent Claim
128 words
A target unit comprising: a backing plate; and a target member disposed on said backing plate, said target member including at least one erosion member made of a sputtering material and at least one holding member for releasably holding said erosion member on said backing plate; wherein said at least one erosion member is structurally distinct from said holding member, said erosion member having a central portion and a peripheral portion, said holding member being releasably secured to said backing plate so as to permit said at least one erosion member to be engaged to said holding member in said peripheral portion so as to be elastically distorted in such a manner that said central portion is pressed against said holding member more intensively than said peripheral portion.
Claim 18
Dependent Claim
128 words
A target unit comprising: a backing plate; and a target member disposed on said backing plate, said target member including at least one erosion member made of a sputtering material and at least one holding member for releasably holding said erosion member on said backing plate; wherein said at least one erosion member is structurally distinct from said holding member, said erosion member having a central portion and a peripheral portion, said holding member being releasably secured to said backing plate so as to permit said at least one erosion member to be engaged to said holding member in said peripheral portion so as to be elastically distorted in such a manner that said central portion is pressed against said holding member more intensively than said peripheral portion.
Claim 19
Dependent Claim
28 words
A target unit as defined in claim 15, further comprising a thin piece of soft metal interposed between said backing plate and said at least one erosion member.
Claim 20
Dependent Claim
23 words
A target unit as defined in claim 16, wherein said soft metal is selected from the group consisting of indium, tin, and aluminum.
Claim 21
Dependent Claim
28 words
A target unit as defined in claim 15, wherein said at least one erosion member is formed and arranged so as to extend along a closed continuous line.
Claim 22
Dependent Claim
65 words
A target unit as defined in claim 15, wherein said at least one erosion member has a side face sloping outwardly toward said backing plate while said holding member has a side face complementary to said sloping side face of said erosion member, whereby when said holding member is pressed against said backing plate, said holding member presses said erosion member against said backing plate.
Claim 23
Dependent Claim
25 words
A target unit as defined in claim 15, further comprising a plurality of said erosion members, the sputtering material of each having a different composition.
Claim 24
Dependent Claim
37 words
A target unit as defined in claim 15, wherein said backing plate has a concave surface portion on an upper face thereof, said at least one erosion member being held in contact with said concave surface portion.
Claim 25
Dependent Claim
41 words
A target unit as defined in claim 15, wherein said holding member has a protruding lip formed at a side face thereof, said lip being held in engagement with said erosion member to hold said erosion member on said backing plate.
Claim 26
Dependent Claim
51 words
A target unit as defined in claim 22, wherein said erosion member has a stepped portion formed on a side face thereof and held in close engagement with said lip of said holding member, and said holding member has an upper face flush with an upper face of said erosion member.
Claim 27
Dependent Claim
34 words
A target unit as defined in claim 23, wherein said backing plate has a concave surface portion on an upper face thereof, said erosion member being held in contact with said concave surface portion.
Claim 28
Dependent Claim
34 words
A target unit as defined in claim 15, wherein said backing plate has a convex surface portion on an upper face thereof, said erosion member being held in contact with said convex surface portion.
Claim 29
Dependent Claim
33 words
A target unit as defined in claim 15, wherein said erosion member has a convex surface portion on a lower face thereof, said backing plate being held in contact with said convex surface.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-11-18 | 1995-05-20 | 1995-11-19 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-11-18 | 1999-05-20 | 1999-11-19 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-11-18 | 2003-05-20 | 2003-11-19 | $7700.00 | Window Closed / Lapsed |