US4485000A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Sputtering target supporting device
Assignee: Toshiba Corp
•
Filing: 1984-04-25
•
Granted: 1984-11-27
•
Expires: 2004-04-25
Abstract
Abstract In a sputtering target supporting device for fixing, to a common electrode, a plurality of beams forming a mosaic target used for co-sputtering, at least one pressing mechanism is provided exclusively for each of the beams to press the respective beam against the common electrode by means of the respective pressing mechanism provided therefor.
Inventors
- 👤 Tatsuzo Kawaguchi
- 👤 Mitsutoshi Koyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-30 02:34
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/34; H01J37/3411; H01J37/3414; H01J37/3423; C; C23; C23C; C23C14/00; C23C14/22; C23C14/34; C23C14/3407; H01J37/3426; H01J37/3429
Claims Analysis
Total Claims: 6
Claim 1
Independent Claim
56 words
A sputtering target supporting device for fixing, to a common electrode, a plurality of beams forming a mosaic target used for co-sputtering, wherein at least one pressing mechanism is provided exclusively for each of the beams to press the respective beam against the common electrode by means of said at least one pressing mechanism provided therefor.
Claim 2
Dependent Claim
56 words
A sputtering target supporting device for fixing, to a common electrode, a plurality of beams forming a mosaic target used for co-sputtering, wherein at least one pressing mechanism is provided exclusively for each of the beams to press the respective beam against the common electrode by means of said at least one pressing mechanism provided therefor.
Claim 3
Dependent Claim
33 words
A device according to claim 1, further comprising a holder fixed to said electrode, wherein each of the pressing mechanisms comprises means mounted to the holder and pressing the beam against the electrode.
Claim 4
Dependent Claim
48 words
A device according to claim 2, wherein said holder has an overhang, an end of each beam is inserted between the overhang and the electrode, and each of said pressing mechanisms comprises a screw threaded in said overhang and having its end in abutment with the respective beam.
Claim 5
Dependent Claim
58 words
A device according to claim 2, wherein each of the beams is substantially wedge-shaped, the electrode is substantially disk-shaped, the holder extends along the outer periphery of the disk-shaped electrode, and fixed to the outer peripheral portion of the electrode, and the pressing mechanisms are mounted to the holder and press the wider ends of the respective beams.
Claim 6
Dependent Claim
41 words
A device according to claim 4, further comprising an additional holder which is positioned in the central portion of the disk-shaped electrode, and fixed to the central portion, and has an overhang for pressing the narrower ends of the respective beams.
References Cited (Backward Citations)
JPS5773179A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1987-11-27 | 1988-05-28 | 1988-11-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1991-11-27 | 1992-05-28 | 1992-11-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1995-11-27 | 1996-05-28 | 1996-11-27 | $7700.00 | Window Closed / Lapsed |