US5064771A
Expired / Lapsed
US
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Method of forming crystal array
Assignee: Grumman Corp
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Filing: 1990-04-13
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Granted: 1991-11-12
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Expires: 2010-04-13
Abstract
Abstract A method for forming an array of single crystalline seed crystals separated by an insulator and suitable for use in the formation of infrared detector elements is disclosed. The seed crystals are formed from a single crystalline substrate having first and second planar surfaces. An array of grooves is formed in the first planar surface of the single crystalline substrate such that a plurality of protrusions are formed upon the first planar surface of the single crystalline substrate. The grooves are then filled with an insulator. A portion of the second planar surface of the substrate is then removed to expose the insulator disposed within the grooves to form an array of single crystalline seed crystals. The single crystalline seed crystals are separated by the insulator. The single crystalline seed crystals and the insulator are exposed upon both the first and second surfaces of the array.
Inventors
- 👤 Allen L. Solomon
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-27 07:20
CPC Classifications
H; H10; H10P; H10P90/00; H10P90/19; H10P90/1904; H10P90/1906; H10D; H10D84/00; H10D84/01; H10D84/02; H10D84/07; H10W; H10W10/00; H10W10/01; H10W10/061; H10W10/10; H10W10/181; H10P90/1914; H10W10/011; H10W10/014; H10W10/021; H10W10/17; H10W10/20; Y; Y10; Y10S; Y10S148/00; Y10S148/05; Y10S148/085; Y10S148/135
Claims Analysis
Total Claims: 15
Claim 1
Independent Claim
149 words
A method for forming an array of single crystalline seed crystals separated by an insulator, the seed crystals being formed from a single crystalline first CdTe substrate having first and second surfaces, the method comprising: (a) forming an array of grooves in the first surface of the single crystalline first CdTe substrate, the array of grooves defining a plurality of protrusions upon the first surface of the single crystalline first substrate; (b) filling the grooves with the insulator; and (c) removing a sufficient portion of the second surface of the first CdTe substrate to expose the insulator disposed within the grooves; (d) wherein the step of removing a portion of the second surface results in the formation of an array of single crystalline seed crystals separated by the insulator, the single crystalline seed crystals and the insulator being exposed upon both the first and second surfaces of the array.
Claim 2
Independent Claim
149 words
A method for forming an array of single crystalline seed crystals separated by an insulator, the seed crystals being formed from a single crystalline first CdTe substrate having first and second surfaces, the method comprising: (a) forming an array of grooves in the first surface of the single crystalline first CdTe substrate, the array of grooves defining a plurality of protrusions upon the first surface of the single crystalline first substrate; (b) filling the grooves with the insulator; and (c) removing a sufficient portion of the second surface of the first CdTe substrate to expose the insulator disposed within the grooves; (d) wherein the step of removing a portion of the second surface results in the formation of an array of single crystalline seed crystals separated by the insulator, the single crystalline seed crystals and the insulator being exposed upon both the first and second surfaces of the array.
Claim 3
Dependent Claim
33 words
The method as recited in claim 1 further comprising the step of removably attaching the first surface of the first CdTe substrate to a second substrate to facilitate handling of the first substrate.
Claim 4
Dependent Claim
20 words
The method as recited in claim 2 further comprising the step of forming photosensitive detector elements upon the seed crystals.
Claim 5
Dependent Claim
25 words
The method as recited in claim 3 further comprising the step of forming a conductive grid interconnecting a common electrode of the photosensitive detector elements.
Claim 6
Dependent Claim
24 words
The method as recited in claim 4 wherein the step of filling the grooves with the insulator comprises filling the grooves with silicon dioxide.
Claim 7
Dependent Claim
23 words
The method as recited in claim 4 wherein the step of filling the grooves with the insulator comprises filling the grooves with glass.
Claim 8
Independent Claim
164 words
A method for forming an array of single crystalline seed crystals separated by an insulator, the seed crystals being formed from a single crystalline first substrate having first and second surfaces, the method comprising: (a) forming an array of grooves in the first surface of the single crystalline first substrate, the array of grooves defining a plurality of protrusions upon the first surface of the single crystalline first substrate; (b) forming a conductive layer within the grooves formed in the first surface of the single crystalline substrate; (c) filling the grooves with the insulator: and (d) removing a sufficient portion of the second surface of the first substrate to expose the insulator disposed within the grooves; (e) wherein the step of removing a portion of the second surface results in the formation of an array of single crystalline seed crystals separated by the insulator, the single crystalline seed crystals and the insulator being exposed upon both the first and second surfaces of the array.
Claim 9
Independent Claim
164 words
A method for forming an array of single crystalline seed crystals separated by an insulator, the seed crystals being formed from a single crystalline first substrate having first and second surfaces, the method comprising: (a) forming an array of grooves in the first surface of the single crystalline first substrate, the array of grooves defining a plurality of protrusions upon the first surface of the single crystalline first substrate; (b) forming a conductive layer within the grooves formed in the first surface of the single crystalline substrate; (c) filling the grooves with the insulator: and (d) removing a sufficient portion of the second surface of the first substrate to expose the insulator disposed within the grooves; (e) wherein the step of removing a portion of the second surface results in the formation of an array of single crystalline seed crystals separated by the insulator, the single crystalline seed crystals and the insulator being exposed upon both the first and second surfaces of the array.
Claim 10
Dependent Claim
33 words
The method as recited in claim 7 further comprising the step of removably attaching the grooved first surface of the first substrate to a second substrate to facilitate handling of the first substrate.
Claim 11
Dependent Claim
20 words
The method as recited in claim 8 further comprising the step of forming photosensitive detector elements upon the seed crystals.
Claim 12
Dependent Claim
25 words
The method as recited in claim 9 further comprising the step of forming a conductive grid interconnecting a common electrode of the photosensitive detector elements.
Claim 13
Dependent Claim
40 words
The method as recited in claim 10 wherein the step of forming an array of grooves in the first surface of the single crystalline substrate comprises forming an array of grooves in the first surface of a CdTe first substrate.
Claim 14
Dependent Claim
24 words
The method as recited in claim 11 wherein the step of filling the grooves with the insulator comprises filling the grooves with silicon dioxide.
Claim 15
Dependent Claim
23 words
The method as recited in claim 11 wherein the step of filling the grooves with the insulator comprises filling the grooves with glass.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-11-11 | 1995-05-13 | 1995-11-12 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-11-11 | 1999-05-13 | 1999-11-12 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-11-11 | 2003-05-13 | 2003-11-12 | $7700.00 | Window Closed / Lapsed |