US5059899A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Semiconductor dies and wafers and methods for making
Assignee: Micron Technology Inc
•
Filing: 1990-08-16
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Granted: 1991-10-22
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Expires: 2010-08-16
Abstract
Abstract Disclosed is a method for producing individual semiconductor chips which are singulated from larger wafers, and singulated wafers produced according to the method. Wafers from which the singulated dies are produced include scribe line area through which the wafer is cut by a saw or other method for singulating individual dies. In one aspect of the invention, test pads are provided within the scribe line area for testing of individual dies prior to severing of the wafer. In another aspect of the invention, conventional test circuitry is formed within the scribe line area and utilized in conjunction with text pads for testing operability of individual wafers prior to severing of the wafer into individual chips. Upon test, the scribe lines are severed effectively destroying the sacrificial test pads and circuitry.
Inventors
- 👤 Warren D. Farnworth
- 👤 Kevin Duesman
- 👤 Ed Heitzeberg
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-24 05:28
CPC Classifications
H; H10; H10P; H10P74/00; H10P74/27; H10P74/273; G; G01; G01R; G01R31/00; G01R31/28; G01R31/2851; G01R31/2884; G01R31/317; G01R31/3181; G01R31/3185; G01R31/318505; G01R31/318511; H10P74/277
Claims Analysis
Total Claims: 26
Claim 1
Independent Claim
72 words
A semiconductor wafer comprising: a plurality of individual dies containing integrated circuits, the dies containing at least one signal node; scribe line area separating the dies to be severed through to cut the wafer into individual chips; a conductive interface test pad formed in the scribe line area; and a conductive interconnecting line extending from the at least one signal node to the conductive interface test pad in the scribe line area.
Claim 2
Dependent Claim
72 words
A semiconductor wafer comprising: a plurality of individual dies containing integrated circuits, the dies containing at least one signal node; scribe line area separating the dies to be severed through to cut the wafer into individual chips; a conductive interface test pad formed in the scribe line area; and a conductive interconnecting line extending from the at least one signal node to the conductive interface test pad in the scribe line area.
Claim 3
Dependent Claim
21 words
The semiconductor wafer of claim 1 wherein the conductive interconnecting line comprises induced voltage isolating circuitry formed within the individual dies.
Claim 4
Dependent Claim
36 words
The semiconductor wafer of claim 2 wherein the induced voltage isolating circuitry comprises a transistor within the die having a control line which is biased within the die to place the transistor in an off condition.
Claim 5
Dependent Claim
46 words
The semiconductor wafer of claim 1 wherein interconnecting lines extending from selected signal nodes from a plurality of dies are electrically connected in parallel with at least one selected interface test pads in the scribe line area to provide for simultaneous parallel testing of multiple dies.
Claim 6
Dependent Claim
26 words
The semiconductor wafer of claim 4 wherein the interconnecting lines extending from the selected signal nodes comprise induced voltage isolating circuitry formed within the individual dies.
Claim 7
Dependent Claim
40 words
The semiconductor wafer of claim 5 wherein the induced voltage isolating circuitry comprises a transistor within the individual dies, the transistor having a control line which is biased within the individual die to place the transistor in an off condition.
Claim 8
Dependent Claim
28 words
The semiconductor wafer of claim 1 further comprising integrated test circuitry formed within the scribe line area to facilitate testing of individual dies or groups of individual dies.
Claim 9
Dependent Claim
21 words
The semiconductor wafer of claim 7 wherein the conductive interconnecting line comprises induced voltage isolating circuitry formed within the individual dies.
Claim 10
Dependent Claim
52 words
The semiconductor wafer of claim 7 wherein the conductive interconnecting line comprises induced voltage isolating circuitry formed within the individual dies, and wherein the induced voltage isolating circuitry comprises a transistor within the die having a control line which is biased within the die to place the transistor in an off condition.
Claim 11
Dependent Claim
63 words
The semiconductor wafer of claim 7 wherein, the conductive interconnecting line comprises induced voltage isolating circuitry formed within the individual dies; the induced voltage isolating circuitry comprises a transistor within the die having a control line which is biased within the die to place the transistor in an off condition; and the control line extends to and connects with the integrated test circuitry.
Claim 12
Dependent Claim
62 words
The semiconductor wafer of claim 7 wherein, conductive interconnecting lines extending from selected signal nodes from a plurality of dies are electrically connected in parallel with at least one selected interface test pad in the scribe line area to provide for simultaneous parallel testing of multiple dies; and the conductive interconnecting lines comprise induced voltage isolating circuitry formed within the individual dies.
Claim 13
Dependent Claim
91 words
The semiconductor wafer of claim 7 wherein, conductive interconnecting lines extending from selected signal nodes from a plurality of dies are electrically connected in parallel with at least one selected interface test pad in the scribe line area to provide for simultaneous parallel testing of multiple dies; and the conductive interconnecting lines comprise induced voltage isolating circuitry formed within the individual dies, the induced voltage isolating circuitry comprises a transistor within the die having a control line which is biased within the die to place the transistor in an off condition.
Claim 14
Dependent Claim
19 words
The semiconductor wafer of claim 12 wherein the control line extends to and connects with the integrated test circuitry.
Claim 15
Dependent Claim
70 words
A semiconductor wafer comprising: a plurality of individual dies containing integrated circuits, the dies containing at least one signal node; scribe line area separating the dies to be severed through to cut the wafer into individual chips; integrated test circuitry formed within the scribe line area; and a conductive interconnecting line extending from the at least one signal node to the integrated test circuitry formed within the scribe line area.
Claim 16
Dependent Claim
70 words
A semiconductor wafer comprising: a plurality of individual dies containing integrated circuits, the dies containing at least one signal node; scribe line area separating the dies to be severed through to cut the wafer into individual chips; integrated test circuitry formed within the scribe line area; and a conductive interconnecting line extending from the at least one signal node to the integrated test circuitry formed within the scribe line area.
Claim 17
Dependent Claim
21 words
The semiconductor wafer of claim 14 wherein the conductive interconnecting line comprises induced voltage isolating circuitry formed within the individual dies.
Claim 18
Dependent Claim
48 words
The semiconductor wafer of claim 15 wherein the induced voltage isolating circuitry comprises a transistor within the die having a control line which is biased within the die to place the transistor in an off condition, the control line extending to and connecting with the integrated test circuitry.
Claim 19
Independent Claim
146 words
A method of fabricating a semiconductor wafer comprising the following steps: processing a semiconductor wafer to form a plurality of individual dies containing integrated circuits and at least one signal node, the individual dies being formed on the wafer to define severing scribe line area between individual dies; forming at least one conductive interface test pad in the scribe line area; forming conductive interconnecting lines which extend from a plurality of signal nodes from different individual dies to the at least one conductive interface test pad in the scribe line area; testing individual dies in parallel by contacting a test probe with the at least one conductive interface test pad; designating which of the tested individual dies are defective; severing through the scribe line area, the conductive interface test pad, and interconnecting lines within the scribe line area, to form individual chips; and collecting operable chips.
Claim 20
Independent Claim
146 words
A method of fabricating a semiconductor wafer comprising the following steps: processing a semiconductor wafer to form a plurality of individual dies containing integrated circuits and at least one signal node, the individual dies being formed on the wafer to define severing scribe line area between individual dies; forming at least one conductive interface test pad in the scribe line area; forming conductive interconnecting lines which extend from a plurality of signal nodes from different individual dies to the at least one conductive interface test pad in the scribe line area; testing individual dies in parallel by contacting a test probe with the at least one conductive interface test pad; designating which of the tested individual dies are defective; severing through the scribe line area, the conductive interface test pad, and interconnecting lines within the scribe line area, to form individual chips; and collecting operable chips.
Claim 21
Dependent Claim
39 words
The method of fabricating a semiconductor wafer of claim 17 further comprising forming induced voltage isolating circuitry within individual dies to selectively isolate the at least one signal node from selected portions of the conductive interconnecting lines extending therefrom.
Claim 22
Dependent Claim
48 words
The method of fabricating a semiconductor wafer of claim 17 further comprising forming integrated test circuitry within the scribe line area, the conductive interconnecting lines extending from individual dies to the integrated test circuitry and from there selectively to conductive interface test pads in the scribe line area.
Claim 23
Dependent Claim
76 words
The method of fabricating a semiconductor wafer of claim 17 further comprising: forming induced voltage isolating circuitry within individual dies to selectively isolate the at least one signal node from selected portions of the conductive interconnecting lines extending therefrom; and forming integrated test circuitry within the scribe line area, the conductive interconnecting lines extending from individual dies to the integrated test circuitry and from there selectively to conductive interface test pads in the scribe line area.
Claim 24
Independent Claim
138 words
A method of fabricating a semiconductor wafer comprising the following steps: processing a semiconductor wafer to form a plurality of individual dies containing integrated circuits and at least one signal node, the individual dies being formed on the wafer to define severing scribe line area between individual dies; forming integrated test circuitry within the scribe line area; forming conductive interconnecting lines which extend from a plurality of signal nodes from different individual dies to the integrated test circuitry within the scribe line area; testing individual dies by using the integrated test circuitry within the scribe line area; designating which of the tested individual dies are defective; severing through the scribe line area, the interconnecting lines within the scribe line area, and the integrated test circuitry within the scribe line area, to form individual chips; and collecting operable chips.
Claim 25
Independent Claim
138 words
A method of fabricating a semiconductor wafer comprising the following steps: processing a semiconductor wafer to form a plurality of individual dies containing integrated circuits and at least one signal node, the individual dies being formed on the wafer to define severing scribe line area between individual dies; forming integrated test circuitry within the scribe line area; forming conductive interconnecting lines which extend from a plurality of signal nodes from different individual dies to the integrated test circuitry within the scribe line area; testing individual dies by using the integrated test circuitry within the scribe line area; designating which of the tested individual dies are defective; severing through the scribe line area, the interconnecting lines within the scribe line area, and the integrated test circuitry within the scribe line area, to form individual chips; and collecting operable chips.
Claim 26
Dependent Claim
39 words
The method of fabricating a semiconductor wafer of claim 21 further comprising forming induced voltage isolating circuitry within individual dies to selectively isolate the at least one signal node from selected portions of the conductive interconnecting lines extending therefrom.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-10-21 | 1995-04-22 | 1995-10-22 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-10-21 | 1999-04-22 | 1999-10-22 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-10-21 | 2003-04-22 | 2003-10-22 | $7700.00 | Window Closed / Lapsed |