Patent US5054418A successfully refreshed from Google Patents.
US5054418A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Cage boat having removable slats
Assignee: Union Oil Company of California
•
Filing: 1989-05-23
•
Granted: 1991-10-08
•
Expires: 2009-05-23
Abstract
Abstract A cage boat having easily replaceable parts utilizes removable spacer rails for holding semiconductor wafers contained within a cage formed from slats removably attached to end pieces perpendicular to the slats.
Inventors
- 👤 Michael S. Thompson
- 👤 Steven R. Hubbard
- 👤 Franklin D. Jackson
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-28 09:10
CPC Classifications
H; H10; H10P; H10P95/00; H10P72/00; H10P72/10; H10P72/19; H10P72/1922; H10P72/12; H10P72/14
Claims Analysis
Total Claims: 61
Claim 1
Independent Claim
85 words
A cage boat comprising a pair of planar, spaced apart end pieces, each of said end pieces extending radially outward about a common axis, a plurality of substantially parallel slats, each of said slats being perpendicular to said end pieces and removably attached thereto, and a plurality of spacer rails, parallel to said slats and removably positioned thereupon, each of said rails having a plurality of groove means for receiving semiconductor wafers, said end pieces and said slats forming a cage enclosing said spacer rails.
Claim 2
Dependent Claim
85 words
A cage boat comprising a pair of planar, spaced apart end pieces, each of said end pieces extending radially outward about a common axis, a plurality of substantially parallel slats, each of said slats being perpendicular to said end pieces and removably attached thereto, and a plurality of spacer rails, parallel to said slats and removably positioned thereupon, each of said rails having a plurality of groove means for receiving semiconductor wafers, said end pieces and said slats forming a cage enclosing said spacer rails.
Claim 3
Dependent Claim
10 words
A cage boat according to claim 1 constructed of graphite.
Claim 4
Dependent Claim
18 words
A cage boat according to claim 2 wherein said graphite comprises a fine particle, high strength, isotropic graphite.
Claim 5
Dependent Claim
11 words
A cage boat according to claim 3 having a cylindrical configuration.
Claim 6
Dependent Claim
22 words
A cage boat according to claim 4 wherein said case is substantially closed, openings being provided in the body of said slats.
Claim 7
Dependent Claim
17 words
A cage boat according to claim 5 wherein each of said end pieces is divided in half.
Claim 8
Dependent Claim
19 words
A cage boat according to claim 6 wherein the end piece halves are matingly engageable to form said cage.
Claim 9
Dependent Claim
15 words
A cage boat according to claim 7 wherein said end piece halves fit together snugly.
Claim 10
Dependent Claim
33 words
A cage boat according to claim 8 wherein one of said end piece halves contains one or more projections and the other of said end piece halves contains one or more mating depressions.
Claim 11
Dependent Claim
26 words
A cage boat according to claim 9 wherein said projections comprise peg means and said depressions comprise aperture means for securing said end piece halves together.
Claim 12
Dependent Claim
17 words
A cage boat according to claim 10 wherein said slats are threadedly attached to said end pieces.
Claim 13
Dependent Claim
35 words
A cage boat according to claim 11 wherein said spacer rail is held in position by slot means in each of said pair of end pieces into which the ends of said spacer rail fit.
Claim 14
Dependent Claim
18 words
A cage boat according to claim 12 wherein one of said slot means extends through the end piece.
Claim 15
Dependent Claim
21 words
A cage boat according to claim 13 wherein said spacer rail is held stationary by means bearing against an end thereof.
Claim 16
Dependent Claim
28 words
A cage boat according to claim 14 wherein said means bearing against an end of said spacer rail extends into the slot means extending through the end piece.
Claim 17
Dependent Claim
33 words
A cage boat according to claim 15 wherein said means bearing against an end of said spacer rail comprises means threaded into the end piece through which one of said slot means extends.
Claim 18
Dependent Claim
28 words
A cage boat according to claim 16 wherein said graphite comprises a fine particle, high strength, isotropic graphite, the surface of which has been sealed with pyrolytic carbon.
Claim 19
Dependent Claim
19 words
A cage boat according to claim 4 wherein said cage is substantially closed, openings being provided between said slats.
Claim 20
Dependent Claim
17 words
A cage boat according to claim 13 wherein each of said end pieces is divided in half.
Claim 21
Dependent Claim
19 words
A cage boat according to claim 19 wherein the end piece halves are matingly engageable to form said cage.
Claim 22
Dependent Claim
15 words
A cage boat according to claim 20 wherein said end piece halves fit together snugly.
Claim 23
Dependent Claim
33 words
A cage boat according to claim 21 wherein one of said end piece halves contains one or more projections and the other of said end piece halves contains one or more mating depressions.
Claim 24
Dependent Claim
26 words
A cage boat according to claim 22 wherein said projections comprise peg means and said depressions comprise aperture means for securing said end piece halves together.
Claim 25
Dependent Claim
17 words
A cage boat according to claim 23 wherein said slats are threadedly attached to said end pieces.
Claim 26
Dependent Claim
35 words
A cage boat according to claim 24 wherein said spacer rail is held in position by slot means in each of said pair of end pieces into which the ends of said spacer rail fit.
Claim 27
Dependent Claim
18 words
A cage boat according to claim 25 wherein one of said slot means extends through the end piece.
Claim 28
Dependent Claim
21 words
A cage boat according to claim 26 wherein said spacer rail is held stationary by means bearing against an end thereof.
Claim 29
Dependent Claim
28 words
A cage boat according to claim 27 wherein said means bearing against an end of said spacer rail extends into the slot means extending through the end piece.
Claim 30
Dependent Claim
33 words
A cage boat according to claim 28 wherein said means bearing against an end of said spacer rail comprises means threaded into the end piece through which one of said slot means extends.
Claim 31
Dependent Claim
28 words
A cage boat according to claim 29 wherein said graphite comprises a fine particle, high strength isotropic graphite the surface of which has been sealed with pyrolytic carbon.
Claim 32
Dependent Claim
28 words
A cage boat according to claim 2 wherein said graphite comprises a fine particle, high strength, isotropic graphite, the surface of which has been sealed with pyrolytic carbon.
Claim 33
Dependent Claim
11 words
A cage boat according to claim 1 having a cylindrical configuration.
Claim 34
Dependent Claim
22 words
A cage boat according to claim 32 wherein said cage is substantially closed, openings being provided in the body of said slats.
Claim 35
Dependent Claim
17 words
A cage boat according to claim 33 wherein each of said end pieces is divided in half.
Claim 36
Dependent Claim
19 words
A cage boat according to claim 34 wherein the end piece halves are matingly engageable to form said cage.
Claim 37
Dependent Claim
15 words
A cage boat according to claim 35 wherein said end piece halves fit together snugly.
Claim 38
Dependent Claim
33 words
A cage boat according to claim 36 wherein one of said end piece halves contains one or more projections and the other of said end piece halves contains one or more mating depressions.
Claim 39
Dependent Claim
26 words
A cage boat according to claim 37 wherein said projections comprise peg means and said depressions comprise aperture means for securing said end piece halves together.
Claim 40
Dependent Claim
17 words
A cage boat according to claim 38 wherein said slats are threadedly attached to said end pieces.
Claim 41
Dependent Claim
35 words
A cage boat according to claim 39 wherein said spacer rail is held in position by slot means in each of said pair of end pieces into which the ends of said spacer rail fit.
Claim 42
Dependent Claim
18 words
A cage boat according to claim 40 wherein one of said slot means extends through the end piece.
Claim 43
Dependent Claim
21 words
A cage boat according to claim 41 wherein said spacer rail is held stationary by means bearing against an end thereof.
Claim 44
Dependent Claim
28 words
A cage boat according to claim 42 wherein said means bearing against an end of said spacer rail extends into the slot means extending through the end piece.
Claim 45
Dependent Claim
33 words
A cage boat according to claim 43 wherein said means bearing against an end of said spacer rail comprises means threaded into the end piece through which one of said slot means extends.
Claim 46
Dependent Claim
19 words
A cage boat according to claim 32 wherein said cage is substantially closed, openings being provided between said slats.
Claim 47
Dependent Claim
17 words
A cage boat according to claim 45 wherein each of said end pieces is divided in half.
Claim 48
Dependent Claim
19 words
A cage boat according to claim 46 wherein the end piece halves are matingly engageable to form said cage.
Claim 49
Dependent Claim
15 words
A cage boat according to claim 47 wherein said end piece halves fit together snugly.
Claim 50
Dependent Claim
33 words
A cage boat according to claim 48 wherein one of said end piece halves contains one or more projections and the other of said end piece halves contains one or more mating depressions.
Claim 51
Dependent Claim
26 words
A cage boat according to claim 49 wherein said projections comprise peg means and said depressions comprise aperture means for securing said end piece halves together.
Claim 52
Dependent Claim
17 words
A cage boat according to claim 50 wherein said slats are threadedly attached to said end pieces.
Claim 53
Dependent Claim
35 words
A cage boat according to claim 51 wherein said spacer rail is held in position by slot means in each of said pair of end pieces into which the ends of said spacer rail fit.
Claim 54
Dependent Claim
18 words
A cage boat according to claim 52 wherein one of said slot means extends through the end piece.
Claim 55
Dependent Claim
21 words
A cage boat according to claim 53 wherein said spacer rail is held stationary by means bearing against an end thereof.
Claim 56
Dependent Claim
28 words
A cage boat according to claim 54 wherein said means bearing against an end of said spacer rail extends into the slot means extending through the end piece.
Claim 57
Dependent Claim
33 words
A cage boat according to claim 55 wherein said means bearing against an end of said spacer rail comprises means threaded into the end piece through which one of said slot means extends.
Claim 58
Dependent Claim
192 words
A cage boat comprising a pair of end pieces, a plurality of substantially parallel interchangeable slats removably attached thereto and forming a slatted surface perpendicular to said end pieces, and a plurality of interchangeable grooved spacer rails, substantially parallel to said slats and removably positioned thereupon, said end pieces and said slats forming a cage enclosing said spacer rails, closed except for openings in said slatted surface, each of said end pieces being divided in half with one-half being provided with one or more projections and the other half being provided with one or more mating depressions for holding said halves together securely, each of said plurality of spacer rails being held in position at one end thereof by slot means located in one of said pair of end pieces for receiving said one end of each of said spacer rails and each of said rails being held in position at the other end thereof by means bearing against said other end and extending into a through-slot in the other of said pair of end pieces, said through-slot providing means for inserting a spacer rail into said cage without opening said cage.
Claim 59
Dependent Claim
192 words
A cage boat comprising a pair of end pieces, a plurality of substantially parallel interchangeable slats removably attached thereto and forming a slatted surface perpendicular to said end pieces, and a plurality of interchangeable grooved spacer rails, substantially parallel to said slats and removably positioned thereupon, said end pieces and said slats forming a cage enclosing said spacer rails, closed except for openings in said slatted surface, each of said end pieces being divided in half with one-half being provided with one or more projections and the other half being provided with one or more mating depressions for holding said halves together securely, each of said plurality of spacer rails being held in position at one end thereof by slot means located in one of said pair of end pieces for receiving said one end of each of said spacer rails and each of said rails being held in position at the other end thereof by means bearing against said other end and extending into a through-slot in the other of said pair of end pieces, said through-slot providing means for inserting a spacer rail into said cage without opening said cage.
Claim 60
Dependent Claim
10 words
A cage boat according to claim 57 constructed of graphite.
Claim 61
Dependent Claim
16 words
A cage boat according to claim 57 constructed of a fine particle, high strength, isotropic graphite.
References Cited (Backward Citations)
AT128422B
Cited
US2544053A
Cited
US3493142A
Cited
US3195272A
Cited
US3461842A
Cited
US3737282A
Cited
US3796182A
Cited
US3900039A
Cited
US3951587A
Cited
US4098923A
Cited
US4264803A
Cited
US4694778A
Cited
US4679689A
Cited
US4676008A
Cited
US4841906A
Cited
US4861452A
Cited
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-10-07 | 1995-04-08 | 1995-10-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-10-07 | 1999-04-08 | 1999-10-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-10-07 | 2003-04-08 | 2003-10-08 | $7700.00 | Window Closed / Lapsed |