Patent US5049520A successfully refreshed from Google Patents.
US5049520A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method of partially eliminating the bird's beak effect without adding any process steps
Assignee: Micron Technology Inc
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Filing: 1990-06-06
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Granted: 1991-09-17
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Expires: 2010-06-06
Abstract
Abstract A method of partially eliminating the field oxide bird's beak over a storage cell and slightly enlarging the storage cell active area without adding any process steps is described. A photomask is used during a buried contact etch to reduce the field oxide bird's beak both vertically and horizonally. The storage cell active area is further enlarged during a first polysilicon etch step without adding process steps. At that point, the wafer is completed by existing techniques.
Inventors
- 👤 David A. Cathey
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 14:50
CPC Classifications
H; H10; H10B; H10B12/00; H10B12/01; H10B12/02; H10B12/03; H10B12/033; H10P; H10P50/00; H10P50/73; H10W; H10W10/00; H10W10/01; H10W10/011; H10W10/012; H10W10/10; H10W10/13; H10W20/00; H10W20/01; H10W20/021; Y; Y10; Y10S; Y10S148/00; Y10S148/106; Y10S148/117
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
217 words
A method of enlarging storage cell active areas in semiconductor circuit devices on a wafer surface, the method comprising: a) depositing a first oxide layer superjacent the wafer surface; b) depositing a dielectric layer superjacent said first oxide layer and patterning said dielectric layer thereby defining locations for said active areas; c) growing field oxide on said first oxide layer not covered by said patterned dielectric layer, growing of said field oxide encroaches under the edges of said patterned dielectric thereby forming field oxide bird's beak; d) applying a photomask to said wafer surface, said photomask having a first opening to expose an area to define a buried contact location and a second opening to expose said storage cell active areas; e) performing a first etching step thereby etching said patterned dielectric and a horizontal portion of said field oxide, said first etching step thereby reducing said field oxide bird's beak primarily in the horizontal direction; f) removing said photomask; g) depositing a polysilicon layer superjacent said wafer surface; h) depositing a second oxide layer superjacent said polysilicon layer; and i) performing a second etching step thereby etching said second oxide layer and said polysilicon layer to form trenches into said storage cell active areas thereby enlarging said storage cell active areas primarily in the vertical direction.
Claim 2
Independent Claim
217 words
A method of enlarging storage cell active areas in semiconductor circuit devices on a wafer surface, the method comprising: a) depositing a first oxide layer superjacent the wafer surface; b) depositing a dielectric layer superjacent said first oxide layer and patterning said dielectric layer thereby defining locations for said active areas; c) growing field oxide on said first oxide layer not covered by said patterned dielectric layer, growing of said field oxide encroaches under the edges of said patterned dielectric thereby forming field oxide bird's beak; d) applying a photomask to said wafer surface, said photomask having a first opening to expose an area to define a buried contact location and a second opening to expose said storage cell active areas; e) performing a first etching step thereby etching said patterned dielectric and a horizontal portion of said field oxide, said first etching step thereby reducing said field oxide bird's beak primarily in the horizontal direction; f) removing said photomask; g) depositing a polysilicon layer superjacent said wafer surface; h) depositing a second oxide layer superjacent said polysilicon layer; and i) performing a second etching step thereby etching said second oxide layer and said polysilicon layer to form trenches into said storage cell active areas thereby enlarging said storage cell active areas primarily in the vertical direction.
Claim 3
Dependent Claim
18 words
An enlarging method as recited in claim 1, further characterized by: said dielectric being a layer of nitride.
Claim 4
Dependent Claim
39 words
An enlarging method as recited in claim 1, further characterized by: said vertical enlargement of said storage cell active area requires using said photomask having said second opening over the storage cell active area during said first etching step.
Claim 5
Independent Claim
218 words
A method of enlarging storage cell active areas in random access memory devices fabricated on a wafer surface, the method comprising: a) depositing a first oxide layer superjacent the wafer surface; b) depositing a dielectric layer superjacent said first oxide layer and patterning said dielectric layer thereby defining locations for said active areas; c) growing field oxide on said first oxide layer not covered by said patterned dielectric layer, growing of said field oxide encroaches under the edges of said patterned dielectric thereby forming field oxide bird's beak; d) applying a photomask to said wafer surface, said photomask having a first opening to expose an area to define a buried contact location and a second opening to expose said storage cell active areas; e) performing a first etching step thereby etching said patterned dielectric and a horizontal portion of said field oxide, said first etching step thereby reducing said field oxide bird's beak primarily in the horizontal direction; f) removing said photomask; g) depositing a polysilicon layer superjacent said wafer surface; h) depositing a second oxide layer superjacent said polysilicon layer; and i) performing a second step thereby etching said second oxide layer and said polysilicon layer to form trenches into said storage cell active areas thereby enlarging said storage cell active areas primarily in the vertical direction.
Claim 6
Independent Claim
218 words
A method of enlarging storage cell active areas in random access memory devices fabricated on a wafer surface, the method comprising: a) depositing a first oxide layer superjacent the wafer surface; b) depositing a dielectric layer superjacent said first oxide layer and patterning said dielectric layer thereby defining locations for said active areas; c) growing field oxide on said first oxide layer not covered by said patterned dielectric layer, growing of said field oxide encroaches under the edges of said patterned dielectric thereby forming field oxide bird's beak; d) applying a photomask to said wafer surface, said photomask having a first opening to expose an area to define a buried contact location and a second opening to expose said storage cell active areas; e) performing a first etching step thereby etching said patterned dielectric and a horizontal portion of said field oxide, said first etching step thereby reducing said field oxide bird's beak primarily in the horizontal direction; f) removing said photomask; g) depositing a polysilicon layer superjacent said wafer surface; h) depositing a second oxide layer superjacent said polysilicon layer; and i) performing a second step thereby etching said second oxide layer and said polysilicon layer to form trenches into said storage cell active areas thereby enlarging said storage cell active areas primarily in the vertical direction.
Claim 7
Dependent Claim
18 words
An enlarging method as recited in claim 4, further characterized by: said dielectric being a layer of nitride.
Claim 8
Dependent Claim
39 words
An enlarging method as recited in claim 4, further characterized by: said vertical enlargement of said storage cell active area requires using said photomask having said second opening over the storage cell active area during said first etching step.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-09-16 | 1995-03-18 | 1995-09-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-09-16 | 1999-03-18 | 1999-09-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-09-16 | 2003-03-18 | 2003-09-17 | $7700.00 | Window Closed / Lapsed |