US5048336A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Moisture-sensitive device
Assignee: Sharp Corp
•
Filing: 1989-12-29
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Granted: 1991-09-17
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Expires: 2009-12-29
Abstract
Abstract A moisture-sensitive device comprising a substrate such as silicon substrate, a pair of belt-like heating elements extending over recesses formed in the substrate, the heating elements being composed of a resistive film of platinum or nickel and a heat-resistant insulating film covering the resistive film in which one of the heating elements acts as a detector element and the other as a reference element, which device can exactly determine an absolute humidity irrespective of sudden changes of temperature.
Inventors
- 👤 Takashi Sugihara
- 👤 Kazutaka Uda
- 👤 Hiroki Tabuchi
- 👤 Shuji Miyoshi
- 👤 Yasuhiko Inami
- 👤 Nobuo Hashizume
- 👤 Hisatoshi Furubayashi
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-07 11:25
CPC Classifications
G; G01; G01N; G01N27/00; G01N27/02; G01N27/04; G01N27/14; G01N27/18
Claims Analysis
Total Claims: 13
Claim 1
Independent Claim
111 words
A moisture-sensitive device comprising: a substrate provided with a pair of recesses; a pair of belt-like heating elements extending over the recesses and formed adjacent at least one side of openings of the recesses, each of said heating elements comprising a resistive film of platinum or nickel and a heat-resistant insulating film covering the resistive film; an insulator formed between the substrate and the heating elements; a container, the inside of which is an atmosphere of a given humidity, the container being formed integral with the substrate and acting to isolate one of the heating elements from an outside atmosphere; and lead wires for supplying electric current to the heating elements.
Claim 2
Dependent Claim
111 words
A moisture-sensitive device comprising: a substrate provided with a pair of recesses; a pair of belt-like heating elements extending over the recesses and formed adjacent at least one side of openings of the recesses, each of said heating elements comprising a resistive film of platinum or nickel and a heat-resistant insulating film covering the resistive film; an insulator formed between the substrate and the heating elements; a container, the inside of which is an atmosphere of a given humidity, the container being formed integral with the substrate and acting to isolate one of the heating elements from an outside atmosphere; and lead wires for supplying electric current to the heating elements.
Claim 3
Dependent Claim
18 words
A moisture-sensitive device of claim 1, wherein the resistive film has a thickness of 2000 to 5000 A.
Claim 4
Dependent Claim
15 words
A moisture-sensitive device of claim 1, wherein the resistive film is in a pattern form.
Claim 5
Dependent Claim
15 words
A moisture-sensitive device of claim 3, wherein the pattern form is a meandering pattern form.
Claim 6
Dependent Claim
21 words
A moisture-sensitive device of claim 1, wherein the belt-like heating element operates in the range of 300° C. to 400° C.
Claim 7
Dependent Claim
13 words
A moisture-sensitive device of claim 1, wherein the substrate is a silicon substrate.
Claim 8
Dependent Claim
57 words
A moisture-sensitive device of claim 1, wherein each of the belt-like heating elements has a container which is integral with the substrate and isolated from the outside atmosphere, the inside of one of the containers of the heating elements being an atmosphere of a given humidity, the other being provided with holes communicating with the outside atmosphere.
Claim 9
Dependent Claim
22 words
A moisture-sensitive device of claim 7 wherein the holes are formed at positions at which the containers are joined to the substrate.
Claim 10
Dependent Claim
13 words
A moisture-sensitive device of claim 7 wherein the substrate is a silicon substrate.
Claim 11
Dependent Claim
23 words
The moisture-sensitive device of claim 1, wherein said pair of belt-like heating elements are formed on opposite sides of openings of said recesses.
Claim 12
Dependent Claim
24 words
The moisture-sensitive device of plain 1, wherein said pair of belt-like heating elements are formed on the same side of openings of said recesses.
Claim 13
Dependent Claim
24 words
The moisture-sensitive device of plain 1, wherein said pair of belt-like heating elements are formed on the same side of openings of said recesses.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-09-16 | 1995-03-18 | 1995-09-17 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-09-16 | 1999-03-18 | 1999-09-17 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-09-16 | 2003-03-18 | 2003-09-17 | $7700.00 | Window Closed / Lapsed |