Structure for supporting heating element

Abstract

Abstract PURPOSE:To reduce electric power consumption in a detector which requires temp. control by providing a spherical reflection surface to the detector, supporting a heating element in the space at the center of the spherical face and reflecting the radiation heat from the heating element to the heating element. CONSTITUTION:An insulating film 2, for example, Si3N4 or SiO2 is deposited on the substrate 1, for example, Si, Ni, etc. of the detector. The semispherical recessed space 3 is formed in the central part of the substrate 1 and a bridge 4 is provided of an electrical insulating materil so a to be spanned across the space 3. Leads 5a, 5b for detection are provided on the bridge 4 and are connected to a gas detecting layer 6. A heater 9 is provided on the bridge 4 to heat the layer 6 to an adequate temp. The gas concn. is detected from the change of the resistance value. The radiation heat from the heater 9 is reflected by a spherical face 13 and heats the layer 6. The heating is thus made possible efficiently with the low electric power consumption.

Inventors

• 👤 Junji Manaka
• 👤 順二 間中

Bibliographic Details