Humidity detector

Abstract

Abstract PURPOSE:To obtain a humidity detector which does not require heating and has stable characteristics by providing diffused resistors and a hygroscopic high-polymer film in a polymerized state to the surface of a diaphragm part formed by providing a U-shaped cur groove to a silicone wafer. CONSTITUTION:The diffused resistors R2, R4 are formed on the surface 6 of the silicone wafer 5 by subjecting the same to p-type diffusion of boron. Lead parts 7 are formed thereto by vapor deposition of aluminum. The rear face 8 of the silicone wafer 5 is then anisotropically etched to a trapezoidal shape. The U-shaped cut groove 9 is further formed thereto by etching to form the diaphragm part 11. The hygroscopic high-polymer film 12 is formed on the surface of the diaphragm part 11. The hygroscopic high-polymer film 12 expands and contracts according to a change in the humidity of the atmosphere and the diaphragm part curves. The resistance change corresponding to bending stresses is generated in the diffused resistors R2, R4 by the curving action. The humidity is measured by detecting said resistance change.

Inventors

• 👤 Kazuaki Takami
• 👤 高見　一昭

Bibliographic Details