Patent US5047649A successfully refreshed from Google Patents.
US5047649A
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Method and apparatus for writing or etching narrow linewidth patterns on insulating materials
Assignee: International Business Machines Corp
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Filing: 1990-10-09
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Granted: 1991-09-10
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Expires: 2010-10-09
Abstract
Abstract A method and apparatus for producing fine line patterns on insulating surfaces utilizing a conductive spring-like cantilever having a pointed tip which is in proximity to the surface to be affected. Electrons emitted from the tip travel toward the insulator surface and cause changes therein or affect molecules located in the proximity of the insulator surface. Tunneling current is not required, and a highly conducting return current path for electrons through the insulator is not necessary. The incident electrons can be used to provide patterned, narrow-width features either by deposition of a material onto the insulator surface, or by producing etching in localized regions of the insulator surface, or by changing the insulator surface so that it can be etched.
Inventors
- 👤 Rodney T. Hodgson
- 👤 Jackson E. Stanland
- 👤 Oliver C. Wells
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-25 20:24
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/0002; B; B41; B41M; B41M5/00; B41M5/20; B82; B82Y; B82Y10/00; B82Y40/00; G03F7/20; G03F7/2049; G11; G11B; G11B9/00; G11B9/12; G11B9/14; H; H01; H01J; H01J37/00; H01J37/30; H01J37/317; H01J37/3174; G01; G01Q; G01Q80/00; H01J2237/00; H01J2237/004; H01J2237/0041; H01J2237/0044; H01J2237/30; H01J2237/317; H01J2237/31735; H01J2237/31738; H01J2237/3174; H01J2237/31747; H01J2237/3175; H01J2237/31752; H01J2237/31759; Y; Y10; Y10S; Y10S977/00; Y10S977/84; Y10S977/849; Y10S977/855; Y10S977/856; Y10S977/857; Y10S977/859
Claims Analysis
Total Claims: 25
Claim 1
Independent Claim
114 words
A method for producing fine linewidth patterns on an insulating substrate, comprising the steps of: bringing to close proximity an insulating substrate and a pointed tip, said pointed tip being connected to a spring-like cantilever and electrically connected to a voltage source, applying a voltage of said pointed tip to emit electrons therefrom, said electrons traveling to said insulator and affecting molecules at the surface or within said insulator, there being no highly conducting return path for said electrons through said insulating substrate, and moving said pointed tip and said substrate relative to one another to scan said tip across said substrate to thereby expose different areas of the substrate surface to said electrons.
Claim 2
Independent Claim
114 words
A method for producing fine linewidth patterns on an insulating substrate, comprising the steps of: bringing to close proximity an insulating substrate and a pointed tip, said pointed tip being connected to a spring-like cantilever and electrically connected to a voltage source, applying a voltage of said pointed tip to emit electrons therefrom, said electrons traveling to said insulator and affecting molecules at the surface or within said insulator, there being no highly conducting return path for said electrons through said insulating substrate, and moving said pointed tip and said substrate relative to one another to scan said tip across said substrate to thereby expose different areas of the substrate surface to said electrons.
Claim 3
Dependent Claim
18 words
The method of claim 1, where said insulating substrate includes a thick electron or ion sensitive resist layer.
Claim 4
Dependent Claim
32 words
The method of claim 1, including the further step of applying a voltage of opposite polarity to said pointed tip to remove or neutralize charge on the surface of said insulating substrate.
Claim 5
Dependent Claim
44 words
The method of claim 1, including the step of providing a cloud of gas molecules between said pointed tip and said insulating substrate, or on said insulating substrate said gas molecules being decomposable or dissociable by electrons or ions emitted from said pointed tip.
Claim 6
Independent Claim
171 words
A method for producing fine linewidth patterns on an insulating substrate, including the following steps: bringing to close proximity an insulating substrate and a conductive pointed tip, said pointed tip being connected to a spring-like cantilever and a voltage source. emitting electrons from said pointed tip by applying a voltage thereto, affecting molecules at the surface or within said insulator there being no highly electrically conductive return path for said electrons through said substrate, said electrons traveling to said substrate and producing a negatively charged localized region on the surface of said substrate, exposing said negatively charged localized region to a positively charged gas or particle cloud, reacting said positively charged gas or particle cloud at said localized negatively charged region of said substrate surface to etch said insulator layer at said charged region to produce a fine linewidth recess in said insulator, moving said pointed tip and said insulating substrate relative to one another and repeating said steps to create another fine linewidth recess in the surface of said insulator.
Claim 7
Independent Claim
171 words
A method for producing fine linewidth patterns on an insulating substrate, including the following steps: bringing to close proximity an insulating substrate and a conductive pointed tip, said pointed tip being connected to a spring-like cantilever and a voltage source. emitting electrons from said pointed tip by applying a voltage thereto, affecting molecules at the surface or within said insulator there being no highly electrically conductive return path for said electrons through said substrate, said electrons traveling to said substrate and producing a negatively charged localized region on the surface of said substrate, exposing said negatively charged localized region to a positively charged gas or particle cloud, reacting said positively charged gas or particle cloud at said localized negatively charged region of said substrate surface to etch said insulator layer at said charged region to produce a fine linewidth recess in said insulator, moving said pointed tip and said insulating substrate relative to one another and repeating said steps to create another fine linewidth recess in the surface of said insulator.
Claim 8
Independent Claim
191 words
A method for producing a fine linewidth pattern on the surface of an insulating substrate, including the following steps: bringing to close proximity an insulating substrate and a conductive pointed tip, said pointed tip being connected to a conductive spring-like cantilever and to a voltage source, applying a voltage to said pointed tip to emit electrons therefrom, said electrons traveling from said pointed tip to said insulating substrate and affecting molecules at the surface or within said insulator, there being no highly electrically conductive path for electrons through said substrate, exposing a localized region of the surface of said insulating substrate to said electrons to produce a local negatively charged region of said insulator, exposing said negatively charged localized region to a positive gas or particle cloud, reacting said positive gas or particle cloud at said negatively charged localized region to deposit a constituent of said gas or particle cloud at said localized region to thereby produce a fine linewidth pattern, providing relative motion between said insulating substrate and said pointed tip and repeating the heretofore mentioned steps to create a fine linewidth pattern at another location on said insulator substrate.
Claim 9
Independent Claim
191 words
A method for producing a fine linewidth pattern on the surface of an insulating substrate, including the following steps: bringing to close proximity an insulating substrate and a conductive pointed tip, said pointed tip being connected to a conductive spring-like cantilever and to a voltage source, applying a voltage to said pointed tip to emit electrons therefrom, said electrons traveling from said pointed tip to said insulating substrate and affecting molecules at the surface or within said insulator, there being no highly electrically conductive path for electrons through said substrate, exposing a localized region of the surface of said insulating substrate to said electrons to produce a local negatively charged region of said insulator, exposing said negatively charged localized region to a positive gas or particle cloud, reacting said positive gas or particle cloud at said negatively charged localized region to deposit a constituent of said gas or particle cloud at said localized region to thereby produce a fine linewidth pattern, providing relative motion between said insulating substrate and said pointed tip and repeating the heretofore mentioned steps to create a fine linewidth pattern at another location on said insulator substrate.
Claim 10
Independent Claim
120 words
An apparatus for exposure of a nonconductive, electron-sensitive resist layer located on an insulating substrate, comprising the following components: a conductive pointed tip connected to a conductive spring-like cantilever, a voltage source electrically connected to said pointed tip through said cantilever, displacement means for producing relative motion between said pointed tip and said insulating substrate, means for activating said voltage source to produce a fine linewidth pattern of electrons emanating from said pointed tip, said electrons traveling to said insulating substrate and affecting molecules at the surface or within said insulator, there being no highly conducting electrical return path for said electrons through said insulating substrate, and means for adjusting the distance between said pointed tip and said insulating substrate.
Claim 11
Independent Claim
120 words
An apparatus for exposure of a nonconductive, electron-sensitive resist layer located on an insulating substrate, comprising the following components: a conductive pointed tip connected to a conductive spring-like cantilever, a voltage source electrically connected to said pointed tip through said cantilever, displacement means for producing relative motion between said pointed tip and said insulating substrate, means for activating said voltage source to produce a fine linewidth pattern of electrons emanating from said pointed tip, said electrons traveling to said insulating substrate and affecting molecules at the surface or within said insulator, there being no highly conducting electrical return path for said electrons through said insulating substrate, and means for adjusting the distance between said pointed tip and said insulating substrate.
Claim 12
Dependent Claim
15 words
The apparatus of claim 7, where said resist layer is at least 50 Å thick.
Claim 13
Dependent Claim
23 words
The apparatus of claim 7, where said substrate is comprised of a first thin electron-sensitive resist layer and a second thick resist layer.
Claim 14
Dependent Claim
21 words
The apparatus of claim 7, where said pointed tip and said spring-like cantilever are portions of a single doped semiconductor material.
Claim 15
Dependent Claim
11 words
The apparatus of claim 10, where said doped semiconductor is silicon.
Claim 16
Dependent Claim
13 words
The apparatus of claim 7, where said pointed tip is a semiconducting diamond.
Claim 17
Dependent Claim
144 words
In combination, a pointed tip of nanometer radius sharpness, said tip being comprised of a conductive material, a conductive, spring-like cantilever connected to said pointed tip, a voltage source connected to said cantilever for providing a voltage at said pointed tip, applying a voltage to said pointed tip to emit electrons therefrom, said electrons traveling to an insulating substrate and affecting molecules at the surface or within said insulator, there being no highly conducting return path for said electrons through said insulating substrate, displacement means for producing relative motion between said pointed tip and said substrate to scan said tip relative to said substrate in an X-Y plane, further displacement means for producing relative motion in a Z-direction between said tip and said substrate to vary the tip-to-substrate distance to thereby establish the Z coordinate of said pointed tip for succession of X-Y displacements.
Claim 18
Dependent Claim
144 words
In combination, a pointed tip of nanometer radius sharpness, said tip being comprised of a conductive material, a conductive, spring-like cantilever connected to said pointed tip, a voltage source connected to said cantilever for providing a voltage at said pointed tip, applying a voltage to said pointed tip to emit electrons therefrom, said electrons traveling to an insulating substrate and affecting molecules at the surface or within said insulator, there being no highly conducting return path for said electrons through said insulating substrate, displacement means for producing relative motion between said pointed tip and said substrate to scan said tip relative to said substrate in an X-Y plane, further displacement means for producing relative motion in a Z-direction between said tip and said substrate to vary the tip-to-substrate distance to thereby establish the Z coordinate of said pointed tip for succession of X-Y displacements.
Claim 19
Dependent Claim
20 words
The combination of claim 13, where said pointed tip and said cantilever are an integral unit of the same material.
Claim 20
Dependent Claim
12 words
The combination of claim 14, where said material is a doped semiconductor.
Claim 21
Dependent Claim
18 words
The combination of claim 15, where said semiconductor is chosen from the group consisting of silicon and diamond.
Claim 22
Dependent Claim
26 words
The combination of claim 13, where the circuit impedance of said insulating substrate conductive tip and conductive spring-like cantilever is greater than about 10 10 ohms.
Claim 23
Dependent Claim
17 words
The combination of claim 13, where said substrate includes a layer of ion or electron sensitive resist.
Claim 24
Dependent Claim
33 words
The combination of claim 13, where said pointed tip is spaced from the surface of said substrate and has a sufficient voltage thereat to cause field emission of electrons from said pointed tip.
Claim 25
Dependent Claim
19 words
The combination of claim 19, where said substrate includes an electron-sensitive resist layer which is exposed by said electrons.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-09-09 | 1995-03-11 | 1995-09-10 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-09-09 | 1999-03-11 | 1999-09-10 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-09-09 | 2003-03-11 | 2003-09-10 | $7700.00 | Window Closed / Lapsed |