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US5043243A
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Positive-working quinone diazide photoresist composition containing a dye
Assignee: Zeon Corp
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Filing: 1989-11-17
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Granted: 1991-08-27
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Expires: 2009-11-17
Abstract
Abstract A positive type photoresist composition comprising at least one alkali-soluble resin, at least one quinone diazide compound and a compound of the general formula (I) ##STR1## wherein R 1 and R 2 represents alkyl groups having 1 to 8 carbon atoms or a cycloalkyl group having 1 to 8 carbon atoms, R 3 represents hydrogen, an alkyl group having 1 to 4 carbon atoms or halogen, R 4 represents hydrogen or a cyano group and R 5 represents a cyano group or a carboxyl group.
Inventors
- 👤 Mikio Yajima
- 👤 Shigemitsu Kamiya
- 👤 Shoji Kawata
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-03 04:35
CPC Classifications
G; G03; G03F; G03F7/00; G03F7/004; G03F7/09; G03F7/091; G03F7/022; G03F7/0226
Claims Analysis
Total Claims: 7
Claim 1
Independent Claim
67 words
A positive type photoresist composition comprising at least one alkali-soluble resin, at least one quinone diazide compound and a compound of the formula (I) ##STR3## wherein R 1 and R 2 represents alkyl having 1 to 8 carbon atoms or cycloalkyl having 1 to 8 carbon atoms, R 3 represents hydrogen, alkyl having 1 to 4 carbon atoms or halogen, and R 4 represents hydrogen or cyano.
Claim 2
Dependent Claim
67 words
A positive type photoresist composition comprising at least one alkali-soluble resin, at least one quinone diazide compound and a compound of the formula (I) ##STR3## wherein R 1 and R 2 represents alkyl having 1 to 8 carbon atoms or cycloalkyl having 1 to 8 carbon atoms, R 3 represents hydrogen, alkyl having 1 to 4 carbon atoms or halogen, and R 4 represents hydrogen or cyano.
Claim 3
Dependent Claim
37 words
A composition of claim 1 comprising 100 parts by weight of alkali-soluble resins, 10 to 50 parts by weight of quinone diazide compound and 0.5 to 10 parts by weight of a compound of general formula (I).
Claim 4
Dependent Claim
37 words
A composition of claim 1 comprising 100 parts by weight of alkali-soluble resin 15 to 40 parts by weight of quinone diazide compound and 1 to 6 parts by weight of a compound of general formula (I).
Claim 5
Dependent Claim
37 words
A composition of claim 1 wherein the alkali-soluble resin is a condensation reaction product of an aromatic hydroxy compound and an aldehyde, or a polyvinylphenol, a polyisopropenyl phenol, or a copolymer of vinyl phenol and isopropenyl phenol.
Claim 6
Dependent Claim
24 words
A composition of claim 1 wherein the quinone diazide compound is an ester of o-naphthoquinodiazide-4-sulfonic acid chloride or an ester of o-naphthoquinondiazide-5-sulfonic acid chloride.
Claim 7
Dependent Claim
14 words
A composition of claim 1 wherein the compound of general formula (I) is 2-(4-N,N-di-hexylaminophenyl)-1-carboxy-1-cyanoethylene.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-08-26 | 1995-02-25 | 1995-08-27 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-08-26 | 1999-02-25 | 1999-08-27 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-08-26 | 2003-02-25 | 2003-08-27 | $7700.00 | Window Closed / Lapsed |