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US5039203A
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US
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Optical window member and method for production thereof
Assignee: Seiko Instruments Inc
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Filing: 1990-02-08
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Granted: 1991-08-13
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Expires: 2010-02-08
Abstract
Abstract An optical window member comprises a substrate having a multiplicity of through-holes, and a diamond film formed on one surface of the substrate and covering the through-holes. A method for producing the optical window member comprises forming a thin film of diamond on one surface of the substrate, imparting a pattern to a photoresist layer formed on the substrate for partially exposing the substrate, and removing the exposed part of the substrate by etching thereby partically forming a diamond monolayer region. The thus obtained substrate possessing a multiplicity of through-holes assumes a lattice-like form, gives shape to the diamond monolayer region and, at the same time, prevents the thin diamond film from being warped or curved, and imparts improved compression strength to the diamond film and protects the diamond film against fracture.
Inventors
- 👤 Akira Nishikawa
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-08 13:31
CPC Classifications
G; G03; G03F; G03F1/00; G03F1/22; C; C03; C03C; C03C17/00; C03C17/22; G02B1/105; G02; G02B; G02B1/00; G02B1/10; G02B1/14; G02B5/00; C03C2217/00; C03C2217/20; C03C2217/28; C03C2217/282; C03C2218/00; C03C2218/30; C03C2218/32; C03C2218/328; C03C2218/33; Y; Y10; Y10S; Y10S359/00; Y10S359/90
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
62 words
A method for producing an optical window member, comprising the steps of: forming a thin film of diamond on one surface of a substrate, applying photoresist to another surface of said substrate, forming a pattern for partially exposing said substrate in said applied photoresist, and removing the exposed part of said substrate by etching thereby partially forming a monolayer region of diamond.
Claim 2
Independent Claim
62 words
A method for producing an optical window member, comprising the steps of: forming a thin film of diamond on one surface of a substrate, applying photoresist to another surface of said substrate, forming a pattern for partially exposing said substrate in said applied photoresist, and removing the exposed part of said substrate by etching thereby partially forming a monolayer region of diamond.
Claim 3
Dependent Claim
27 words
An optical window member, comprising: a substrate possessing a plurality of pores, and a diamond film formed on one surface of said substrate and covering said pores.
Claim 4
Dependent Claim
27 words
An optical window member, comprising: a substrate possessing a plurality of pores, and a diamond film formed on one surface of said substrate and covering said pores.
Claim 5
Independent Claim
54 words
A method for producing an optical window member, comprising the steps of: providing a substrate having two opposed major surfaces; forming a diamond film on one of the substrate major surfaces; and then forming a pattern of through-holes in the substrate but not in the diamond film to thereby form an optical window member.
Claim 6
Independent Claim
54 words
A method for producing an optical window member, comprising the steps of: providing a substrate having two opposed major surfaces; forming a diamond film on one of the substrate major surfaces; and then forming a pattern of through-holes in the substrate but not in the diamond film to thereby form an optical window member.
Claim 7
Dependent Claim
26 words
A method according to claim 3; wherein the step of forming a pattern comprises forming a pattern of through-holes in a central region of the substrate.
Claim 8
Dependent Claim
19 words
A method according to claim 3; wherein the step of forming a pattern comprises etching the substrate by photolithography.
Claim 9
Dependent Claim
70 words
A method according to claim 5; wherein the etching of the substrate by photolithography comprises forming a photoresist layer on the other one of the substrate major surfaces, exposing the photoresist layer through a patterned photomask, removing the exposed portion of the photoresist layer, and etching the substrate using the remaining unexposed portion of the photoresist layer as a mask to thereby form the pattern of through-holes in the substrate.
Claim 10
Dependent Claim
45 words
An optical window member comprising: a substrate having two opposed major surfaces and having a plurality of through-holes extending therethrough from one major surface to the other major surface; and a diamond film disposed on one of the substrate major surfaces and covering the through-holes.
Claim 11
Dependent Claim
45 words
An optical window member comprising: a substrate having two opposed major surfaces and having a plurality of through-holes extending therethrough from one major surface to the other major surface; and a diamond film disposed on one of the substrate major surfaces and covering the through-holes.
Claim 12
Dependent Claim
29 words
An optical window member according to claim 7; wherein the through-holes are configured and arranged to define a lattice-like region of the substrate effective to reinforce the diamond film.
Claim 13
Dependent Claim
15 words
An optical window member according to claim 8; wherein the through-holes have a circular shape.
Claim 14
Dependent Claim
15 words
An optical window member according to claim 8; wherein the through-holes have a triangular shape.
Claim 15
Dependent Claim
15 words
An optical window member according to claim 8; wherein the through-holes have a rectangular shape.
Claim 16
Dependent Claim
20 words
An optical window member according to claim 8; wherein the lattice-like region is at the central part of the substrate.
Claim 17
Dependent Claim
21 words
An optical window member according to claim 8; wherein the diamond film has a thickness on the order of 4 μm.
Claim 18
Dependent Claim
15 words
An optical window member according to claim 8; wherein the substrate is composed of silicon.
Claim 19
Dependent Claim
21 words
An optical window member according to claim 14; wherein the silicon substrate has a thickness on the order of 200 μm.
Claim 20
Dependent Claim
31 words
An optical window member according to claim 8; wherein the lattice-like region of the substrate is effective to enable the diamond film to withstand a pressure of 1 atmosphere without fracturing.
Claim 21
Dependent Claim
21 words
An optical window member according to claim 7; wherein the diamond film has a thickness on the order of 4 μm.
Claim 22
Dependent Claim
15 words
An optical window member according to claim 7; wherein the substrate is composed of silicon.
Claim 23
Dependent Claim
21 words
An optical window member according to claim 18; wherein the silicon substrate has a thickness on the order of 200 μm.
Claim 24
Dependent Claim
15 words
An optical window member according to claim 7; wherein the substrate has a circular shape.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-08-12 | 1995-02-11 | 1995-08-13 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-08-12 | 1999-02-11 | 1999-08-13 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-08-12 | 2003-02-11 | 2003-08-13 | $7700.00 | Window Closed / Lapsed |