US5038712A
Expired / Lapsed
US
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Apparatus with layered microwave window used in microwave plasma chemical vapor deposition process
Assignee: Canon Inc
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Filing: 1989-12-18
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Granted: 1991-08-13
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Expires: 2009-12-18
Abstract
Abstract An improved apparatus for the formation of a functional deposited film using a microwave plasma chemical vapor deposition process characterized in that a microwave transmissible dielectric material is used for the microwave introducing window, and the window has a structure wherein the dielectric material is divided into blocks of the same or different dielectric materials having a specific inductive capacity of more than 1.0. In this way it is possible to adjust not only the resonant frequency characteristics but also the electromagnetic resonant mode of the window to resonate with the microwave oscillation frequency so as to enhance microwave transmission.
Inventors
- 👤 Yasutomo Fujiyama
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-01 12:25
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32192; H01J37/32211; H01J37/32238; C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/511; G; G03; G03G; G03G5/00; G03G5/02; G03G5/04; G03G5/08; G03G5/082; H01J37/32266; H01J37/32284
Claims Analysis
Total Claims: 39
Claim 1
Independent Claim
117 words
In an apparatus for the formation of a functional deposited film using microwave plasma chemical vapor deposition process comprising a substantially enclosed deposition chamber which is provided with a substrate supporting means, a raw material gas feeding means, an exhaust means and a window allowing transmission of microwaves from a microwave power source as a constituent wall member of the deposition chamber, the improvement which comprises a plurality of layers laminated concentrically in the center of the window and in the direction of microwave transmission, each of said layers comprising a microwave transmissible material having a specific inductive capacity of more than 1.0, whereby the laminated window acts as a microwave resonator and provides enhanced microwave transmission.
Claim 2
Dependent Claim
117 words
In an apparatus for the formation of a functional deposited film using microwave plasma chemical vapor deposition process comprising a substantially enclosed deposition chamber which is provided with a substrate supporting means, a raw material gas feeding means, an exhaust means and a window allowing transmission of microwaves from a microwave power source as a constituent wall member of the deposition chamber, the improvement which comprises a plurality of layers laminated concentrically in the center of the window and in the direction of microwave transmission, each of said layers comprising a microwave transmissible material having a specific inductive capacity of more than 1.0, whereby the laminated window acts as a microwave resonator and provides enhanced microwave transmission.
Claim 3
Dependent Claim
19 words
The apparatus according to claim 1, wherein said plurality of layers are comprised of the same microwave transmissible material.
Claim 4
Dependent Claim
13 words
The apparatus according to claim 2, wherein said microwave transmissible material is alumina.
Claim 5
Dependent Claim
14 words
The apparatus according to claim 2, wherein said microwave transmissible material is alumina ceramic.
Claim 6
Dependent Claim
18 words
The apparatus according to claim 1, wherein said plurality of layers are comprised of different microwave transmissible materials.
Claim 7
Dependent Claim
22 words
The apparatus according to claim 5, wherein one of said different microwave transmissible materials is alumina and the other is quartz glass.
Claim 8
Dependent Claim
26 words
The apparatus according to claim 1, wherein the microwave transmissible material to constitute each of said plurality of layers has a specific inductive capacity of 10.
Claim 9
Dependent Claim
14 words
The apparatus according to claim 1, wherein said plurality of layers vary in thickness.
Claim 10
Dependent Claim
25 words
The apparatus according to claim 8, wherein the thickness of one of said plurality of layers corresponds to a half wavelength of the microwave used.
Claim 11
Dependent Claim
19 words
The apparatus according to claim 1, wherein each of said plurality of layers is shaped in a circular form.
Claim 12
Dependent Claim
13 words
The apparatus according to claim 10, wherein the circular layers have different radii.
Claim 13
Dependent Claim
19 words
The apparatus according to claim 1, wherein the side wall of one of said plurality of layers is tapered.
Claim 14
Dependent Claim
38 words
The apparatus according to claim 1 which further comprises a dielectric plate member being disposed on the upper layer, and said dielectric plate member comprising a microwave transmissible material having a specific inductive capacity of more than 1.0.
Claim 15
Dependent Claim
45 words
The apparatus according to claim 13 which further comprises a plurality of dielectric blocks respectively having a small radius being disposed on said dielectric plate member, each of said dielectric blocks comprising a microwave transmissible material having a specific inductance capacity of more than 1.0.
Claim 16
Dependent Claim
27 words
The apparatus according to claim 14, wherein said plurality of dielectric blocks are arranged so as to intersect with the electric lines of force of microwave transmission.
Claim 17
Dependent Claim
18 words
The apparatus according to claim 15, wherein each of the arranged blocks comprises two dielectric blocks being piled.
Claim 18
Dependent Claim
66 words
The apparatus according to claim 1 which further comprises a plurality of dielectric plate members being placed on the upper layer of said plurality of layers, the size of each of said plurality of dielectric plate members being smaller than that of said upper layer, and each of the dielectric plate members comprising a microwave transmissible material having a specific inductive capacity of more than 1.0.
Claim 19
Dependent Claim
53 words
The apparatus according to claim 17 which further comprises a plurality of dielectric blocks respectively having a small radius being arranged on the upper dielectric member of said plurality of said dielectric plate members, each of said dielectric blocks comprising a microwave transmissible material having a specific inductive capacity of more than 1.0.
Claim 20
Dependent Claim
27 words
The apparatus according to claim 18, wherein said plurality of dielectric blocks are arranged so as to intersect with the electric lines of force of microwave transmission.
Claim 21
Dependent Claim
18 words
The apparatus according to claim 19, wherein each of the arranged blocks comprises two dielectric blocks being piled.
Claim 22
Dependent Claim
133 words
In an apparatus for the formation of a functional deposited film using microwave plasma chemical vapor deposition process comprising a substantially enclosed deposition chamber which is provided with a substrate supporting means, a raw material gas feeding means, an exhaust means and a window allowing transmission of microwave from a microwaves power source as a constituent wall member of the deposition chamber, the improvement which comprises a plurality of dielectric blocks being arranged in the center of said window to intersect with the electric lines of force of microwave transmission, each of said dielectric blocks having a small radius and comprising a microwave transmissible material having a specific inductive capacity of more than 1.0, whereby said window having said plurality of dielectric blocks acts as a microwave resonator and provides enhanced microwave transmission.
Claim 23
Dependent Claim
133 words
In an apparatus for the formation of a functional deposited film using microwave plasma chemical vapor deposition process comprising a substantially enclosed deposition chamber which is provided with a substrate supporting means, a raw material gas feeding means, an exhaust means and a window allowing transmission of microwave from a microwaves power source as a constituent wall member of the deposition chamber, the improvement which comprises a plurality of dielectric blocks being arranged in the center of said window to intersect with the electric lines of force of microwave transmission, each of said dielectric blocks having a small radius and comprising a microwave transmissible material having a specific inductive capacity of more than 1.0, whereby said window having said plurality of dielectric blocks acts as a microwave resonator and provides enhanced microwave transmission.
Claim 24
Dependent Claim
20 words
The apparatus according to claim 21, wherein said plurality of dielectric blocks are comprised of the same microwave transmissible material.
Claim 25
Dependent Claim
19 words
The apparatus according to claim 21, wherein said plurality of dielectric blocks are comprised of different microwave transmissible materials.
Claim 26
Dependent Claim
49 words
The apparatus according to claim 21, wherein said plurality of dielectric blocks are arranged as a plurality of layers laminated concentrically in the center and in the direction of microwave transmission, each of said layers comprising a microwave transmissible material having a specific inductive capacity of more than 1.0.
Claim 27
Dependent Claim
19 words
The apparatus according to claim 24, wherein said plurality of layers are comprised of the same microwave transmissible material.
Claim 28
Dependent Claim
13 words
The apparatus according to claim 25, wherein said microwave transmissible material is alumina.
Claim 29
Dependent Claim
14 words
The apparatus according to claim 25, wherein said microwave transmissible material is alumina ceramic.
Claim 30
Dependent Claim
18 words
The apparatus according to claim 24, wherein said plurality of layers are comprised of different microwave transmissible materials.
Claim 31
Dependent Claim
22 words
The apparatus according to claim 28, wherein one of said different microwave transmissible materials is alumina and the other is quartz glass.
Claim 32
Dependent Claim
26 words
The apparatus according to claim 24, wherein the microwave transmissible material to constitute each of said plurality of layers has a specific inductive capacity of 10.
Claim 33
Dependent Claim
14 words
The apparatus according to claim 24, wherein said plurality of layers have different thicknesses.
Claim 34
Dependent Claim
25 words
The apparatus according to claim 31, wherein the thickness of one of said plurality of layers corresponds to a half wavelength of the microwave used.
Claim 35
Dependent Claim
19 words
The apparatus according to claim 24, wherein each of said plurality of layers is shaped in a circular form.
Claim 36
Dependent Claim
13 words
The apparatus according to claim 33, wherein the circular layers have different radiuses.
Claim 37
Dependent Claim
19 words
The apparatus according to claim 24, wherein the side wall of one of said plurality of layers is tapered.
Claim 38
Dependent Claim
58 words
The apparatus according to claim 24 which further comprises a dielectric plate member being disposed on the upper layer of said plurality of layers, the size of said dielectric plate member being smaller than that of said upper layer, and said dielectric plate member comprising a microwave transmissible material having a specific inductive capacity of more than 1.0.
Claim 39
Dependent Claim
18 words
The apparatus according to claim 24, wherein each of the arranged blocks comprises two dielectric blocks being piled.
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