US4729341A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Method and apparatus for making electrophotographic devices
Assignee: Energy Conversion Devices Inc
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Filing: 1986-11-24
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Granted: 1988-03-08
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Expires: 2006-11-24
Abstract
Abstract There are disclosed a method and apparatus for depositing a layer of material onto the outer surfaces of a plurality of cylindrical members. The cylindrical members are arranged to form a substantially closed loop with the longitudinal axes thereof disposed substantially parallel and the outer surfaces of adjacent members being closely spaced apart to form an inner chamber which is substantially closed. Adjacent cylindrical members form narrow passages which communicate with the inner chamber. At least one reaction gas is introduced into the inner chamber through at least one of the narrow passages and a plasma is formed from the at least one reaction gas within the inner chamber to deposit the layer of material onto the outer surfaces of the cylindrical members. The plasma can be formed by using either microwave energy or radio frequency energy. More particularly disclosed is a method and apparatus for making electrophotographic drums.
Inventors
- 👤 Eugene W. Fournier
- 👤 Erik J. Bjornard
- 👤 Annette G. Johncock
- 👤 Joachim Doehler
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 13:09
CPC Classifications
C; C23; C23C; C23C16/00; C23C16/44; C23C16/54; C23C16/50
Claims Analysis
Total Claims: 24
Claim 1
Independent Claim
200 words
Apparatus for depositing a layer of material onto the outer surface of a plurality of substantially cylindrically-shaped members, said apparatus comprising: a substantially closed deposition chamber; a plurality of substantially cylindrically-shaped members; said members aligned in a substantially closed loop with the longitudinal axes thereof disposed substantially parallel to one another; the outer surfaces of adjacent members closely spaced apart to form a substantially closed inner chamber; means for introducing at least one reaction gas into the inner chamber, said at least one reaction gas including at least one element to be deposited; means for forming a plasma from said at least one reaction gas introduced into said inner chamber to deposit a uniform layer of material containing said at least one element onto at least a portion of the outer surfaces of each of said cylindrically-shaped members; and said plasma forming means including microwave generation means for initiating the radiation of microwaves externally of said deposition chamber and waveguide means positioned externally of said deposition chamber for directly transmitting said radiated microwaves into said inner chamber; said deposition of said uniform layer substantially limited to those portions of said outer surfaces of said members disposed within said inner chamber.
Claim 2
Dependent Claim
200 words
Apparatus for depositing a layer of material onto the outer surface of a plurality of substantially cylindrically-shaped members, said apparatus comprising: a substantially closed deposition chamber; a plurality of substantially cylindrically-shaped members; said members aligned in a substantially closed loop with the longitudinal axes thereof disposed substantially parallel to one another; the outer surfaces of adjacent members closely spaced apart to form a substantially closed inner chamber; means for introducing at least one reaction gas into the inner chamber, said at least one reaction gas including at least one element to be deposited; means for forming a plasma from said at least one reaction gas introduced into said inner chamber to deposit a uniform layer of material containing said at least one element onto at least a portion of the outer surfaces of each of said cylindrically-shaped members; and said plasma forming means including microwave generation means for initiating the radiation of microwaves externally of said deposition chamber and waveguide means positioned externally of said deposition chamber for directly transmitting said radiated microwaves into said inner chamber; said deposition of said uniform layer substantially limited to those portions of said outer surfaces of said members disposed within said inner chamber.
Claim 3
Dependent Claim
22 words
An apparatus as defined in claim 1 further including means for rotating each of said cylindrical members about its own longitudinal axes.
Claim 4
Dependent Claim
23 words
An apparatus as defined in claim 1 wherein said plasma forming means includes means for coupling radio frequency energy into said inner chamber.
Claim 5
Dependent Claim
26 words
An apparatus as defined in claim 3 wherein said radio frequency energy coupling means comprises an elongated antenna arranged to be received within said inner chamber.
Claim 6
Dependent Claim
27 words
An apparatus as defined in claim 1, wherein said microwave energy coupling means comprises a first microwave energy source disposed at one end of said inner chamber.
Claim 7
Dependent Claim
34 words
An apparatus as defined in claim 5 further including a window disposed between said first microwave energy source and said inner chamber for limiting reflected microwave energy back to said first microwave energy source.
Claim 8
Dependent Claim
34 words
An apparatus as defined in claim 5 wherein said microwave energy coupling means further comprises a second microwave energy source disposed at the end of said inner chamber opposite said first microwave energy source.
Claim 9
Dependent Claim
32 words
An apparatus as defined in claim 7 wherein said first and second microwave energy sources include antenna probes, and wherein said probes are disposed at an angle with respect to each other.
Claim 10
Dependent Claim
20 words
An apparatus as defined in claim 7 further including a window disposed between each said source and said inner chamber.
Claim 11
Dependent Claim
26 words
An apparatus as defined in claim 5 further including means for absorbing microwave energy disposed at the end of said inner chamber opposite said first magnetron.
Claim 12
Dependent Claim
32 words
An apparatus as defined in claim 1 wherein said reaction gas introducing means includes means for introducing said reaction gas into said inner chamber through every other one of said narrow passages.
Claim 13
Dependent Claim
43 words
An apparatus as defined in claim 11 wherein said reaction gas introducing means comprises a gas reservoir adjacent said every other one of said narrow passages and a narrow channel extending from said reservoir along the outer peripheries of said adjacent cylindrical members.
Claim 14
Dependent Claim
36 words
An apparatus as defined in claim 12 wherein said reaction gas introducing means includes a shield extending over the ends of said cylindrical members to impede reaction gas flow over the ends of said cylindrical members.
Claim 15
Dependent Claim
38 words
An apparatus as defined in claim 1 including means for pumping unused reaction gases from said inner chamber through the narrow passages other than the narrow passages through which said reaction gas is introduced into said inner chamber.
Claim 16
Dependent Claim
15 words
An apparatus as defined in claim 1 further including means for heating said cylindrical members.
Claim 17
Dependent Claim
27 words
An apparatus as defined in claim 15 wherein said heating means is arranged to maintain the temperature of said members between about 20° Centigrade and 400° Centigrade.
Claim 18
Dependent Claim
22 words
An apparatus as defined in claim 15 wherein said heating means comprises a heating element disposed within each of said cylindrical members.
Claim 19
Dependent Claim
27 words
An apparatus as defined in claim 14 wherein said pumping means is arranged for maintaining the pressure within said inner chamber at about 0.05 Torr or less.
Claim 20
Dependent Claim
29 words
An apparatus as defined in claim 1, wherein maintaining the power density of said microwave energy within said inner chamber between about 0.1 to 1 watt per cubic centimeter.
Claim 21
Dependent Claim
26 words
An apparatus as defined in claim 19 wherein said microwave energy coupling means is arranged to provide microwave energy at a frequency of about 2.45 gigahertz.
Claim 22
Dependent Claim
36 words
An apparatus as defined in claim 1 wherein said reaction gas introducing means includes means for providing a substantially uniform flow of said reaction gas through said narrow passage along the length of said cylindrical members.
Claim 23
Dependent Claim
71 words
An apparatus as defined in claim 21 wherein said reaction gas introducing means further includes reaction gas reservoir means disposed along the length of said narrow passage adjacent said cylindrical members opposite said inner chamber for providing said gas reservoir with a gas conductance path adjacent and along the length of said cylindrical members and said narrow passage which is substantially greater than the gas conductance path through said narrow passage.
Claim 24
Dependent Claim
43 words
An apparatus as defined in claim 22 wherein said reaction gas reservoir means further includes gas flow channel means around the periphery of said cylindrical members for providing a gas conductance path substantially less than the gas conductance path through said narrow passage.
References Cited (Backward Citations)
USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1991-03-08 | 1991-09-07 | 1992-03-08 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1995-03-08 | 1995-09-07 | 1996-03-08 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 1999-03-08 | 1999-09-07 | 2000-03-08 | $7700.00 | Window Closed / Lapsed |