US5037778A
Expired / Lapsed
US
⏱️ 0.0 years remaining
Die attach using gold ribbon with gold/silicon eutectic alloy cladding
Assignee: Intel Corp
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Filing: 1989-05-12
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Granted: 1991-08-06
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Expires: 2009-05-12
Abstract
Abstract An improved method for eutectically bonding a silicon wafer into a cavity of a packaging body. A gold/silicon eutectic alloy cladding is formed on a ribbon made of gold. A strip is cut from the ribbon and placed into the package cavity with the cladding side up. Then a die is placed onto the strip on top of the gold/silicon cladding. The die is then scrubbed at a temperature of approximately 400° C. and the gold/silicon cladding acts as a catalyst to form a gold/silicon eutectic bond between the die and the packaging body.
Inventors
- 👤 James Stark
- 👤 Michael J. Whitcomb
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-11-05 18:01
CPC Classifications
H; H10; H10W; H10W72/00; H10W72/071; H10W72/072; H10W72/073; H10W72/07331; H10W72/07336; H10W72/30; H10W72/321; Y; Y10; Y10S; Y10S148/00; Y10S148/012; Y10S148/062; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49124; Y10T29/4913; Y10T29/49144
Claims Analysis
Total Claims: 9
Claim 1
Independent Claim
246 words
A method for bonding a semiconductor die onto a dielectrically insulated body having a cavity for receiving the die, said cavity having a bottom onto which a layer of gold has been deposited, said die having a silicon chip onto which an intermediate metal barrier layer has been deposited, said method comprising the steps of: (a) preheating the body and gold layer to a temperature of approximately 400° C.; (b) cutting a strip from a ribbon made of gold and having a gold/silicon eutectic alloy cladding on one side thereof; (c) placing said strip into said cavity onto said gold layer such that said cladding is opposed from said gold layer; (d) placing said die onto said strip such that said intermediate metal layer is adjacent to said cladding; (e) heating said body, strip and die combination to a temperature of approximately 400° C.; (f) scrubbing said die on said ribbon and cladding at a bonding temperature of approimately 400° C. such that said cladding melts and forms a liquid layer which acts as a catalyst for further transfer of thermal energy from said gold ribbon and said gold layer to said die; wherein continued scrubbing of said die causes silicon atoms from said chip to penetrate said intermediate barrier metal layer and combine with said gold/silicon liquid layer, thereby increasing the percentage of silicon relative to the percentage of gold in said liquid layer and causing the melting point of said gold/silicon layer to decrease.
Claim 2
Independent Claim
246 words
A method for bonding a semiconductor die onto a dielectrically insulated body having a cavity for receiving the die, said cavity having a bottom onto which a layer of gold has been deposited, said die having a silicon chip onto which an intermediate metal barrier layer has been deposited, said method comprising the steps of: (a) preheating the body and gold layer to a temperature of approximately 400° C.; (b) cutting a strip from a ribbon made of gold and having a gold/silicon eutectic alloy cladding on one side thereof; (c) placing said strip into said cavity onto said gold layer such that said cladding is opposed from said gold layer; (d) placing said die onto said strip such that said intermediate metal layer is adjacent to said cladding; (e) heating said body, strip and die combination to a temperature of approximately 400° C.; (f) scrubbing said die on said ribbon and cladding at a bonding temperature of approimately 400° C. such that said cladding melts and forms a liquid layer which acts as a catalyst for further transfer of thermal energy from said gold ribbon and said gold layer to said die; wherein continued scrubbing of said die causes silicon atoms from said chip to penetrate said intermediate barrier metal layer and combine with said gold/silicon liquid layer, thereby increasing the percentage of silicon relative to the percentage of gold in said liquid layer and causing the melting point of said gold/silicon layer to decrease.
Claim 3
Dependent Claim
111 words
The method defined by claim 1 wherein said scrubbing is initiated at a melting point of said gold/silicon eutectic alloy having an initial value greater than the minimum melting temperature of the gold/silicon eutectic alloy, but continued scrubbing causes said eutectic melting point to decrease in value until said minimum value is reached, at which time further reaction of silicon from said chip increases the percentage of silicon in comparison to gold, causing said eutectic melting point to increase until said eutectic melting point reaches said bonding temperature, wherein silicon atoms in said die migrate across said intermediate metal barrier layer to said gold ribbon and form a gold/silicon eutectic bond.
Claim 4
Independent Claim
32 words
The method as defined in cliam 1, wherein said intermediate metal barrier layer is comprised of chromium and said bonding is substantially independent of the thickness of said intermediate metal barrier layer.
Claim 5
Independent Claim
32 words
The method as defined in cliam 1, wherein said intermediate metal barrier layer is comprised of chromium and said bonding is substantially independent of the thickness of said intermediate metal barrier layer.
Claim 6
Dependent Claim
41 words
The method as defined in claim 3, wherein said die includes a gold layer deposited on said intermediate metal barrier layer, such that said gold layer makes contact with said gold/silicon eutectic alloy when said die is placed onto said strip.
Claim 7
Dependent Claim
29 words
The method as defined by claim 1 wherein the ratio of gold to gold/silicon eutectic alloy in said ribbon ranges between approximately 30 to 1 and 80 to 1.
Claim 8
Dependent Claim
16 words
The method as defined by claim 1 wherein said cladding is approximately centered upon said ribbon.
Claim 9
Dependent Claim
38 words
The method as defined by claim 1 wherein the surface area of said strip is at least 70% of the surface area of a surface of said die which is to contact said ribbon during said scrubbing step.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-08-05 | 1995-02-04 | 1995-08-06 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-08-05 | 1999-02-04 | 1999-08-06 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-08-05 | 2003-02-04 | 2003-08-06 | $7700.00 | Window Closed / Lapsed |