Patent US5036020A successfully refreshed from Google Patents.
US5036020A
Expired / Lapsed
US
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Method of fabricating microelectronic device incorporating capacitor having lowered topographical profile
Assignee: Texas Instruments Inc
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Filing: 1990-08-31
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Granted: 1991-07-30
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Expires: 2010-08-31
Abstract
Abstract A microelectronic device (10a) provides an improved capacitor (12a) having two plate members (22a, 26a) capacitively coupled via a dielectric layer (24). In accordance with the invention, contact portions (32a, 42a) have substantially twice the thickness of functional portions (28, 38) prior to etching oxide (16) to form contacts (18, 20). In this fashion, the total thickness of capacitor (12a) is minimized yet the thickness of contact portions (32a, 42a) is maximized. Hence, maximum thickness for etching purposes [to construct metal contact 18, 20)] is achieved. Thus the topographical profile of microelectronic device (10a) is essentially reduced to half that of the prior art while the necessary pre-etch thickness of contact portions (32a) and (42a) is maintained. Other pre-etch thickness proporations may be utilized between conductive layer subportions (34) and (36) and conductive layer subportions (44) and (46). For example,the conductive layer subportion (34) might be 2000 angstroms and the conductive layer subportion (36) might be 1000 angstroms so that a total preetch thickness of 3000 angstrom for contact portion (32a) is still achieved. In another embodiment of the invention, additional conductive layers may be added so that the respective plate members become interleaved, enhancing the capacitance of the resulting capacitor. In such an alternative embodiment, the individual thickness of the conductive layers may be decreased and yet by the advantageous configuration of the invention, the pre-etch thickness of the contact portions are not decreased and thus a contact etch may be safely performed.
Inventors
- 👤 Howard L. Tigelaar
Bibliographic Details
Application Number
—
Jurisdiction
US
Data Source
google_patents
Last Synchronized
2026-10-29 19:39
CPC Classifications
H; H10; H10D; H10D1/00; H10D1/60; H10D1/68; Y; Y10; Y10S; Y10S148/00; Y10S148/014
Claims Analysis
Total Claims: 8
Claim 1
Independent Claim
326 words
A method for forming a microelectronic device incorporating a capacitor having a lowered topographical profile, the method comprising the steps of: (a) providing a substrate; (b) forming a first conductive layer; (c) removing selected portions of said first conductive layer to form a major portion of said first conductive layer and a minor portion of said first conductive layer therefrom, said major portion of said first conductive layer being laterally spaced from said minor portion of said first conductive layer, said major portion of said first conductive layer including a functional portion and a first conductive layer subportion; (d) forming a thin conformal insulation layer over said major portion of said first conductive layer and said minor portion of said first conductive layer; (e) removing selected portions of said thin conformal insulation layer to form a dielectric layer, said dielectric layer including portions overlying said functional portion of said major portion of said first conductive layer; (f) forming a second conductive layer over said major portion of said first conductive layer, said minor portion of said first conductive layer, and said dielectric layer; (g) removing selected portions of said second conductive layer to form a major portion of said second conductive layer and a minor portion of said second conductive layer therefrom, said major portion of said second conductive layer being laterally spaced from said minor portion of said second conductive layer, said major portion of said second conductive layer including a functional portion and a second conductive layer subportion, said minor portion of said second conductive layer and said first conductive layer subportion being intimately connected so as to be electrically conductive, said minor portion of said first conductive layer and said second conductive layer subportion being intimately connected so as to be electrically conductive, said functional portion of said major portion of said second conductive layer directly overlying said dielectric layer and said functional portion of said major portion of said first conductive layer.
Claim 2
Independent Claim
326 words
A method for forming a microelectronic device incorporating a capacitor having a lowered topographical profile, the method comprising the steps of: (a) providing a substrate; (b) forming a first conductive layer; (c) removing selected portions of said first conductive layer to form a major portion of said first conductive layer and a minor portion of said first conductive layer therefrom, said major portion of said first conductive layer being laterally spaced from said minor portion of said first conductive layer, said major portion of said first conductive layer including a functional portion and a first conductive layer subportion; (d) forming a thin conformal insulation layer over said major portion of said first conductive layer and said minor portion of said first conductive layer; (e) removing selected portions of said thin conformal insulation layer to form a dielectric layer, said dielectric layer including portions overlying said functional portion of said major portion of said first conductive layer; (f) forming a second conductive layer over said major portion of said first conductive layer, said minor portion of said first conductive layer, and said dielectric layer; (g) removing selected portions of said second conductive layer to form a major portion of said second conductive layer and a minor portion of said second conductive layer therefrom, said major portion of said second conductive layer being laterally spaced from said minor portion of said second conductive layer, said major portion of said second conductive layer including a functional portion and a second conductive layer subportion, said minor portion of said second conductive layer and said first conductive layer subportion being intimately connected so as to be electrically conductive, said minor portion of said first conductive layer and said second conductive layer subportion being intimately connected so as to be electrically conductive, said functional portion of said major portion of said second conductive layer directly overlying said dielectric layer and said functional portion of said major portion of said first conductive layer.
Claim 3
Independent Claim
191 words
A method of forming a capacitor in conjunction with a microelectronic device having a substrate, the method comprising: (a) forming a first plate member adjacent the substrate, said first plate member having a functional portion and a contact portion, said functional portion and said contact portion of said first plate member having predetermined thicknesses; (b) forming a dielectric layer disposed adjacent said first plate member layer; and (c) forming a second plate member of conductive material disposed adjacent said dielectric material, said second plate member having a functional portion and a contact portion, said first plate member, said dielectric layer and said second plate member being configured so that said functional portion of said first plate member and said functional portion of said second plate member are capacitively coupled, said functional portion and said contact portion of said second plate member having predetermined thicknesses, steps (a) and (c) being selectively performed so that the ratio of thicknesses of said contact portion and said functional portion of said first plate member is in a range of from no more than about 6 to 1 to no less than about 1.5 to 1.
Claim 4
Independent Claim
191 words
A method of forming a capacitor in conjunction with a microelectronic device having a substrate, the method comprising: (a) forming a first plate member adjacent the substrate, said first plate member having a functional portion and a contact portion, said functional portion and said contact portion of said first plate member having predetermined thicknesses; (b) forming a dielectric layer disposed adjacent said first plate member layer; and (c) forming a second plate member of conductive material disposed adjacent said dielectric material, said second plate member having a functional portion and a contact portion, said first plate member, said dielectric layer and said second plate member being configured so that said functional portion of said first plate member and said functional portion of said second plate member are capacitively coupled, said functional portion and said contact portion of said second plate member having predetermined thicknesses, steps (a) and (c) being selectively performed so that the ratio of thicknesses of said contact portion and said functional portion of said first plate member is in a range of from no more than about 6 to 1 to no less than about 1.5 to 1.
Claim 5
Dependent Claim
14 words
The method of claim 2 wherein said first plate member is formed of polysilicon.
Claim 6
Dependent Claim
14 words
The method of claim 2 wherein said second plate member is formed of polysilicon.
Claim 7
Dependent Claim
20 words
The method of claim 2 wherein one of said first plate and said second plate member is formed of metal.
Claim 8
Dependent Claim
71 words
The method of claim 2 wherein said first plate member is formed so that predetermined portions of said functional portion of said first plate member are above certain preselected portions of said functional portion of said second plate member while other preselected portions of said functional portion of said first plate member are below said selected portions of said functional portion of said second plate member with respect to the substrate.
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USPTO Annuity & Maintenance Windows
| Annuity Stage | Window Opens | Payment Deadline | Surcharge Period Until | Estimated Fee | Status |
|---|---|---|---|---|---|
| 3.5 Years (Year 4) | 1994-07-29 | 1995-01-28 | 1995-07-30 | $2000.00 | Window Closed / Lapsed |
| 7.5 Years (Year 8) | 1998-07-29 | 1999-01-28 | 1999-07-30 | $3760.00 | Window Closed / Lapsed |
| 11.5 Years (Year 12) | 2002-07-29 | 2003-01-28 | 2003-07-30 | $7700.00 | Window Closed / Lapsed |