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US5034591A Expired / Lapsed US ⏱️ 0.0 years remaining

Tape automated bonding leads having a stiffener and a method of bonding with same

Assignee: Fujitsu IT Holdings Inc
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Filing: 1989-12-21
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Granted: 1991-07-23
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Expires: 2009-12-21
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Abstract

Abstract An improved lead structure for tape automated bonding includes a stiffener which is an integral part of the leads. The stiffener maintains the alignment and spacing of the leads during fabrication and subsequent processing, e.g., bonding to a semiconductor chip. A laser is used to remove (or excise) the stiffener from the leads by cutting the leads individually or in groups. Several methods may be used to protect the semiconductor chip during excising, including focussing the beam so that the spot diameter at the focal point of the beam is less than one third of the distance between the focal point and the semiconductor device, providing a protective (e.g., reflective) coating on the semiconductor chip, or providing the laser beam with a shallow depth of field so that the beam is diverged at the surface of the semiconductor chip.

Inventors

  • 👤 Jolson K. Fang

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-11-04 09:09
CPC Classifications
H; H10; H10P; H10P72/00; H10P72/04; H10P72/0444; B; B23; B23K; B23K1/00; B23K1/005; B23K1/0056; Y; Y10; Y10S; Y10S438/00; Y10S438/94; Y10T; Y10T29/00; Y10T29/49; Y10T29/49002; Y10T29/49117; Y10T29/49121

Claims Analysis

Total Claims: 19
Claim 1
Independent Claim 85 words
A tape automated bonding (TAB) method, comprising the steps of: providing a substrate having an aperture, a plurality of leads extending into the aperture, and a stiffener attached to the portion of the leads extending into the aperture; bonding the leads to a semiconductor device; and removing the stiffener from the leads by irradiating each lead with a laser beam having a spot diameter which is less than one third of the distance between the focal point of the laser beam and the semiconductor device.
Claim 2
Dependent Claim 85 words
A tape automated bonding (TAB) method, comprising the steps of: providing a substrate having an aperture, a plurality of leads extending into the aperture, and a stiffener attached to the portion of the leads extending into the aperture; bonding the leads to a semiconductor device; and removing the stiffener from the leads by irradiating each lead with a laser beam having a spot diameter which is less than one third of the distance between the focal point of the laser beam and the semiconductor device.
Claim 3
Dependent Claim 16 words
A TAB method according to claim 1, wherein said removing step is performed after bonding step.
Claim 4
Dependent Claim 17 words
A TAB method according to claim 1, wherein said removing step is performed before said bonding step.
Claim 5
Dependent Claim 35 words
A TAB method according to claim 1, wherein said removing step comprises irradiating the leads with a laser beam having a wavelength which is more readily absorbed by the leads than by the semiconductor device.
Claim 6
Dependent Claim 31 words
A TAB method according to claim 1, further comprising the step of providing a coating on the semiconductor device which is reflective to the laser beam prior to said removing step.
Claim 7
Dependent Claim 83 words
A tape automated bonding (TAB) method, comprising the steps of: providing a substrate having an aperture, a plurality of leads extending into the aperture, and a stiffener attached to the portion of the leads extending into the aperture; bonding the leads to a semiconductor device; and removing the stiffener from the leads by focussing a laser beam on the leads so that the depth of field of the laser beam is less than the distance between the focal point and the semiconductor device.
Claim 8
Dependent Claim 83 words
A tape automated bonding (TAB) method, comprising the steps of: providing a substrate having an aperture, a plurality of leads extending into the aperture, and a stiffener attached to the portion of the leads extending into the aperture; bonding the leads to a semiconductor device; and removing the stiffener from the leads by focussing a laser beam on the leads so that the depth of field of the laser beam is less than the distance between the focal point and the semiconductor device.
Claim 9
Dependent Claim 16 words
A TAB method according to claim 6, wherein said removing step is performed after bonding step.
Claim 10
Dependent Claim 17 words
A TAB method according to claim 6, wherein said removing step is performed before said bonding step.
Claim 11
Dependent Claim 34 words
A TAB method according to claim 6, wherein said removing step comprises irradiating the leads with a laser beam having a wavelength which is more readily absorbed by the leads than the semiconductor device.
Claim 12
Dependent Claim 31 words
A TAB method according to claim 6, further comprising the step of providing a coating on the semiconductor device which is reflective to the laser beam prior to said removing step.
Claim 13
Dependent Claim 141 words
A process for tape automated bonding (TAB) bonding of leads to bonding pads of a semiconductor device, the bonding pads having a thickness x above the surface of the semiconductor device, comprising the steps of: providing a tape having a first surface facing the semiconductor device, a second surface facing away from the semiconductor device, a thickness y between the first and second surfaces, an aperture, a plurality of leads extending into the aperture, and a stiffener attached to the portion of the leads extending into the aperture; bonding the leads to the bonding pads of a semiconductor device; and cutting the stiffener from the leads by focussing a laser beam on the first surface of the leads, the laser beam having a spot diameter which is less than approximately (x+y)/3 and having a depth of field less than approximately y.
Claim 14
Dependent Claim 141 words
A process for tape automated bonding (TAB) bonding of leads to bonding pads of a semiconductor device, the bonding pads having a thickness x above the surface of the semiconductor device, comprising the steps of: providing a tape having a first surface facing the semiconductor device, a second surface facing away from the semiconductor device, a thickness y between the first and second surfaces, an aperture, a plurality of leads extending into the aperture, and a stiffener attached to the portion of the leads extending into the aperture; bonding the leads to the bonding pads of a semiconductor device; and cutting the stiffener from the leads by focussing a laser beam on the first surface of the leads, the laser beam having a spot diameter which is less than approximately (x+y)/3 and having a depth of field less than approximately y.
Claim 15
Dependent Claim 27 words
A method according to claim 11, wherein said cutting step comprises focussing a laser beam having a wavelength of less than approximately 0.5 microns on the leads.
Claim 16
Dependent Claim 29 words
A method according to claim 11, wherein said cutting step comprises focussing a laser beam having a wavelength of approximately 0.19 microns to approximately 0.51 microns on the leads.
Claim 17
Dependent Claim 19 words
A method according to claim 11, wherein said cutting step comprises focussing an excimer laser beam on the leads.
Claim 18
Dependent Claim 217 words
A process for tape automated bonding (TAB) bonding of leads to bonding pads of a semiconductor device, the bonding pads extending a distance x above the surface of the semiconductor device, comprising the steps of: (a) providing a tape having a first surface facing the semiconductor device, a second surface facing away from the semiconductor device, a thickness y between the first and second surfaces, an aperture, a plurality of leads extending into the aperture, and a stiffener attached to the portion of the leads extending into the aperture; (b) aligning the leads with the bonding pads of the semiconductor device; (c) soldering the leads to the bonding pads after said step (b); (d) providing a beam of laser light having a wavelength of approximately 0.19 microns to approximately 0.51 microns, a power of approximately 10-20 joules per square centimeter and a pulse frequency of approximately 75-100 Hz; (e) passing the beam of laser light through a collimating aperture; (f) focussing the beam of laser light on the first surface of a lead over the surface of the semiconductor device so that the laser beam has a spot diameter which is less than approximately 15 microns and has a depth of field less than approximately y; and (h) pulsing the laser beam until the lead is severed.
Claim 19
Dependent Claim 217 words
A process for tape automated bonding (TAB) bonding of leads to bonding pads of a semiconductor device, the bonding pads extending a distance x above the surface of the semiconductor device, comprising the steps of: (a) providing a tape having a first surface facing the semiconductor device, a second surface facing away from the semiconductor device, a thickness y between the first and second surfaces, an aperture, a plurality of leads extending into the aperture, and a stiffener attached to the portion of the leads extending into the aperture; (b) aligning the leads with the bonding pads of the semiconductor device; (c) soldering the leads to the bonding pads after said step (b); (d) providing a beam of laser light having a wavelength of approximately 0.19 microns to approximately 0.51 microns, a power of approximately 10-20 joules per square centimeter and a pulse frequency of approximately 75-100 Hz; (e) passing the beam of laser light through a collimating aperture; (f) focussing the beam of laser light on the first surface of a lead over the surface of the semiconductor device so that the laser beam has a spot diameter which is less than approximately 15 microns and has a depth of field less than approximately y; and (h) pulsing the laser beam until the lead is severed.

References Cited (Backward Citations)

US3444441A Cited
US3611061A Cited
US4137546A Cited
US4204317A Cited
US4380042A Cited
US4551912A Cited
US4554404A Cited
US4663650A Cited
JPS6214451A Cited
US4733292A Cited
US4743956A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-07-22 1995-01-21 1995-07-23 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-07-22 1999-01-21 1999-07-23 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-07-22 2003-01-21 2003-07-23 $7700.00 Window Closed / Lapsed

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