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US5034086A Expired / Lapsed US ⏱️ 0.0 years remaining

Plasma processing apparatus for etching, ashing and film-formation

Assignee: Canon Inc
•
Filing: 1990-11-02
•
Granted: 1991-07-23
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Expires: 2010-11-02
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Abstract

Abstract A plasma processing apparatus includes a vacuum vessel defining a discharge chamber is provided at least a source gas supply for supplying a processing gas into the discharge chamber a magnetic field creating device, a microwave introducing device. The microwave introducing device employs a microwave radiating member having the shape of a flat plate and provided with a cut. The plasma processing apparatus is capable of uniformly processing a work with a plasma and efficiently applying a microwave only to the work. The periphery of a microwave transmission window is tapered, so that the microwave transmission window can be attached adhesively and hermetically to a microwave launcher in a simple construction, whereby the reliability of the adhesive attachment of the microwave transmission window to the microwave launcher is enhanced.

Inventors

  • 👤 Yasue Sato

Bibliographic Details

Application Number —
Jurisdiction US
Data Source google_patents
Last Synchronized 2026-10-29 03:52
CPC Classifications
H; H01; H01J; H01J37/00; H01J37/32; H01J37/32009; H01J37/32192; H01J37/32211; H01J37/3222; B; B05; B05D; B05D3/00; B05D3/14; B05D3/141; C; C23; C23C; C23C16/00; C23C16/44; C23C16/50; C23C16/511; H01J37/32238

Claims Analysis

Total Claims: 7
Claim 1
Independent Claim 61 words
A plasma processing apparatus comprising: a vacuum vessel defining a discharge chamber, provided at least with source gas supply means for supplying a source gas for processing a work, magnetic field creating means, and microwave introducing means; characterized in that the microwave introducing means comprises a microwave radiating member having the shape of a flat plate and provided with a cut.
Claim 2
Dependent Claim 61 words
A plasma processing apparatus comprising: a vacuum vessel defining a discharge chamber, provided at least with source gas supply means for supplying a source gas for processing a work, magnetic field creating means, and microwave introducing means; characterized in that the microwave introducing means comprises a microwave radiating member having the shape of a flat plate and provided with a cut.
Claim 3
Dependent Claim 26 words
A plasma processing apparatus according to claim 1, wherein said microwave radiating member is joined to a coaxial tube or a waveguide for guiding a microwave.
Claim 4
Dependent Claim 29 words
A plasma processing apparatus according to claim 1, wherein work holding means for holding a work, disposed within said vacuum vessel is connected to a high-frequency power supply means.
Claim 5
Dependent Claim 43 words
A plasma processing apparatus according to claim 1, wherein high-frequency cut-off means is provided in a portion of microwave guide means for guiding a microwave to said microwave introducing means so that a high-frequency wave can be applied to said microwave radiating member.
Claim 6
Dependent Claim 53 words
A plasma processing apparatus according to claim 1, wherein said discharge chamber is divided by conductive ion drawing electrode means into a plasma producing space and a processing space for processing a work, and ions are drawn selectively from the plasma produced in the plasma producing space by the ion drawing electrode means.
Claim 7
Dependent Claim 31 words
A plasma processing apparatus according to claim 5, wherein said ion drawing electrode means comprises one or a plurality of members arranged at intervals and each having a plurality of openings.

References Cited (Backward Citations)

US4611121A Cited
JPS60120525A Cited
US4761199A Cited
US4776918A Cited
US4778561A Cited

USPTO Annuity & Maintenance Windows

Annuity Stage Window Opens Payment Deadline Surcharge Period Until Estimated Fee Status
3.5 Years (Year 4) 1994-07-22 1995-01-21 1995-07-23 $2000.00 Window Closed / Lapsed
7.5 Years (Year 8) 1998-07-22 1999-01-21 1999-07-23 $3760.00 Window Closed / Lapsed
11.5 Years (Year 12) 2002-07-22 2003-01-21 2003-07-23 $7700.00 Window Closed / Lapsed

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